6/6/2012	9:26:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2012	9:26:31 AM	Recipe started at 9:26 AM
6/6/2012	9:26:31 AM	Helium valve closed
6/6/2012	9:26:31 AM	H2 valve closed
6/6/2012	9:26:31 AM	BCl3 valve closed
6/6/2012	9:26:31 AM	PH3 valve closed
6/6/2012	9:26:31 AM	SiCl4 pre valve closed
6/6/2012	9:26:31 AM	SiCl4 post valve closed
6/6/2012	9:26:31 AM	Main Vac valve closed
6/6/2012	9:26:31 AM	Bypass valve closed
6/6/2012	9:26:31 AM	Bubbler valve closed
6/6/2012	9:26:31 AM	Helium MFC set to  0.000000
6/6/2012	9:26:31 AM	H2 MFC set to  0.000000
6/6/2012	9:26:31 AM	BCl3 MFC set to  0.000000
6/6/2012	9:26:31 AM	PH3 MFC set to  0.000000
6/6/2012	9:26:31 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:26:31 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:26:31 AM	Tube furnace set to 0
6/6/2012	9:26:34 AM	H2 valve closed
6/6/2012	9:26:34 AM	BCl3 valve closed
6/6/2012	9:26:34 AM	PH3 valve closed
6/6/2012	9:26:34 AM	SiCl4 pre valve closed
6/6/2012	9:26:34 AM	SiCl4 post valve closed
6/6/2012	9:26:34 AM	Main Vac valve closed
6/6/2012	9:26:34 AM	Bypass valve closed
6/6/2012	9:26:34 AM	Bubbler valve closed
6/6/2012	9:26:34 AM	Helium valve opened
6/6/2012	9:26:34 AM	Helium MFC set to  500.000000
6/6/2012	9:26:34 AM	H2 MFC set to  0.000000
6/6/2012	9:26:34 AM	BCl3 MFC set to  0.000000
6/6/2012	9:26:34 AM	PH3 MFC set to  0.000000
6/6/2012	9:26:34 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:26:34 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:26:35 AM	Tube furnace set to 0
6/6/2012	9:27:47 AM	Helium valve closed
6/6/2012	9:27:47 AM	H2 valve closed
6/6/2012	9:27:47 AM	BCl3 valve closed
6/6/2012	9:27:47 AM	PH3 valve closed
6/6/2012	9:27:47 AM	SiCl4 pre valve closed
6/6/2012	9:27:47 AM	SiCl4 post valve closed
6/6/2012	9:27:47 AM	Main Vac valve closed
6/6/2012	9:27:47 AM	Bypass valve closed
6/6/2012	9:27:47 AM	Bubbler valve closed
6/6/2012	9:27:47 AM	Helium MFC set to  0.000000
6/6/2012	9:27:47 AM	H2 MFC set to  0.000000
6/6/2012	9:27:47 AM	BCl3 MFC set to  0.000000
6/6/2012	9:27:47 AM	PH3 MFC set to  0.000000
6/6/2012	9:27:47 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:27:47 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:27:47 AM	Tube furnace set to 0
6/6/2012	9:27:48 AM	Run finished at 9:27 AM
6/6/2012	9:27:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2012	9:31:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/6/2012	9:31:37 AM	Recipe started at 9:31 AM
6/6/2012	9:31:37 AM	Helium valve closed
6/6/2012	9:31:37 AM	H2 valve closed
6/6/2012	9:31:37 AM	BCl3 valve closed
6/6/2012	9:31:37 AM	PH3 valve closed
6/6/2012	9:31:37 AM	SiCl4 pre valve closed
6/6/2012	9:31:37 AM	SiCl4 post valve closed
6/6/2012	9:31:37 AM	Main Vac valve closed
6/6/2012	9:31:37 AM	Bubbler valve closed
6/6/2012	9:31:37 AM	Bypass valve opened
6/6/2012	9:31:37 AM	Helium MFC set to  0.000000
6/6/2012	9:31:37 AM	H2 MFC set to  0.000000
6/6/2012	9:31:37 AM	BCl3 MFC set to  0.000000
6/6/2012	9:31:37 AM	PH3 MFC set to  0.000000
6/6/2012	9:31:37 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:31:37 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:31:37 AM	Tube furnace set to 0
6/6/2012	9:32:42 AM	Helium valve closed
6/6/2012	9:32:42 AM	H2 valve closed
6/6/2012	9:32:42 AM	BCl3 valve closed
6/6/2012	9:32:42 AM	PH3 valve closed
6/6/2012	9:32:42 AM	SiCl4 pre valve closed
6/6/2012	9:32:42 AM	SiCl4 post valve closed
6/6/2012	9:32:42 AM	Main Vac valve closed
6/6/2012	9:32:42 AM	Bubbler valve closed
6/6/2012	9:32:42 AM	Bypass valve opened
6/6/2012	9:32:42 AM	Helium MFC set to  0.000000
6/6/2012	9:32:42 AM	H2 MFC set to  0.000000
6/6/2012	9:32:42 AM	BCl3 MFC set to  0.000000
6/6/2012	9:32:42 AM	PH3 MFC set to  0.000000
6/6/2012	9:32:42 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:32:42 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:32:42 AM	Tube furnace set to 0
6/6/2012	9:33:42 AM	Helium valve closed
6/6/2012	9:33:42 AM	H2 valve closed
6/6/2012	9:33:42 AM	BCl3 valve closed
6/6/2012	9:33:42 AM	PH3 valve closed
6/6/2012	9:33:42 AM	SiCl4 pre valve closed
6/6/2012	9:33:42 AM	SiCl4 post valve closed
6/6/2012	9:33:42 AM	Bypass valve closed
6/6/2012	9:33:42 AM	Bubbler valve closed
6/6/2012	9:33:42 AM	Main Vac valve opened
6/6/2012	9:33:42 AM	Helium MFC set to  0.000000
6/6/2012	9:33:42 AM	H2 MFC set to  0.000000
6/6/2012	9:33:42 AM	BCl3 MFC set to  0.000000
6/6/2012	9:33:42 AM	PH3 MFC set to  0.000000
6/6/2012	9:33:42 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:33:42 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:33:43 AM	Tube furnace set to 0
6/6/2012	9:33:44 AM	Run finished at 9:33 AM
6/6/2012	9:33:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/6/2012	9:37:43 AM	Recipe started at 9:37 AM
6/6/2012	9:37:43 AM	Helium valve closed
6/6/2012	9:37:43 AM	H2 valve closed
6/6/2012	9:37:43 AM	BCl3 valve closed
6/6/2012	9:37:43 AM	PH3 valve closed
6/6/2012	9:37:43 AM	SiCl4 pre valve closed
6/6/2012	9:37:43 AM	SiCl4 post valve closed
6/6/2012	9:37:43 AM	Bypass valve closed
6/6/2012	9:37:43 AM	Bubbler valve closed
6/6/2012	9:37:43 AM	Main Vac valve opened
6/6/2012	9:37:43 AM	Helium MFC set to  0.000000
6/6/2012	9:37:43 AM	H2 MFC set to  0.000000
6/6/2012	9:37:43 AM	BCl3 MFC set to  0.000000
6/6/2012	9:37:43 AM	PH3 MFC set to  0.000000
6/6/2012	9:37:43 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:37:43 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:37:44 AM	Tube furnace set to 0
6/6/2012	9:37:58 AM	H2 valve closed
6/6/2012	9:37:58 AM	BCl3 valve closed
6/6/2012	9:37:58 AM	PH3 valve closed
6/6/2012	9:37:58 AM	SiCl4 pre valve closed
6/6/2012	9:37:58 AM	SiCl4 post valve closed
6/6/2012	9:37:58 AM	Bypass valve closed
6/6/2012	9:37:58 AM	Bubbler valve closed
6/6/2012	9:37:58 AM	Helium valve opened
6/6/2012	9:37:58 AM	Main Vac valve opened
6/6/2012	9:37:58 AM	Helium MFC set to  20.000000
6/6/2012	9:37:58 AM	H2 MFC set to  0.000000
6/6/2012	9:37:58 AM	BCl3 MFC set to  0.000000
6/6/2012	9:37:58 AM	PH3 MFC set to  0.000000
6/6/2012	9:37:58 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:37:58 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:37:59 AM	Tube furnace set to 0
6/6/2012	9:37:59 AM	Helium valve closed
6/6/2012	9:37:59 AM	H2 valve closed
6/6/2012	9:37:59 AM	BCl3 valve closed
6/6/2012	9:37:59 AM	PH3 valve closed
6/6/2012	9:37:59 AM	SiCl4 pre valve closed
6/6/2012	9:37:59 AM	SiCl4 post valve closed
6/6/2012	9:37:59 AM	Bypass valve closed
6/6/2012	9:37:59 AM	Bubbler valve closed
6/6/2012	9:37:59 AM	Main Vac valve opened
6/6/2012	9:37:59 AM	Helium MFC set to  0.000000
6/6/2012	9:37:59 AM	H2 MFC set to  0.000000
6/6/2012	9:37:59 AM	BCl3 MFC set to  0.000000
6/6/2012	9:37:59 AM	PH3 MFC set to  0.000000
6/6/2012	9:37:59 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:37:59 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:37:59 AM	Tube furnace set to 0
6/6/2012	9:38:00 AM	H2 valve closed
6/6/2012	9:38:00 AM	BCl3 valve closed
6/6/2012	9:38:00 AM	PH3 valve closed
6/6/2012	9:38:00 AM	SiCl4 pre valve closed
6/6/2012	9:38:00 AM	SiCl4 post valve closed
6/6/2012	9:38:00 AM	Bypass valve closed
6/6/2012	9:38:00 AM	Bubbler valve closed
6/6/2012	9:38:00 AM	Helium valve opened
6/6/2012	9:38:00 AM	Main Vac valve opened
6/6/2012	9:38:00 AM	Helium MFC set to  20.000000
6/6/2012	9:38:00 AM	H2 MFC set to  0.000000
6/6/2012	9:38:00 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:00 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:00 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:00 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:00 AM	Tube furnace set to 0
6/6/2012	9:38:00 AM	Helium valve closed
6/6/2012	9:38:00 AM	H2 valve closed
6/6/2012	9:38:00 AM	BCl3 valve closed
6/6/2012	9:38:00 AM	PH3 valve closed
6/6/2012	9:38:00 AM	SiCl4 pre valve closed
6/6/2012	9:38:00 AM	SiCl4 post valve closed
6/6/2012	9:38:00 AM	Bypass valve closed
6/6/2012	9:38:00 AM	Bubbler valve closed
6/6/2012	9:38:00 AM	Main Vac valve opened
6/6/2012	9:38:00 AM	Helium MFC set to  0.000000
6/6/2012	9:38:00 AM	H2 MFC set to  0.000000
6/6/2012	9:38:00 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:00 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:00 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:00 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:00 AM	Tube furnace set to 0
6/6/2012	9:38:01 AM	H2 valve closed
6/6/2012	9:38:01 AM	BCl3 valve closed
6/6/2012	9:38:01 AM	PH3 valve closed
6/6/2012	9:38:01 AM	SiCl4 pre valve closed
6/6/2012	9:38:01 AM	SiCl4 post valve closed
6/6/2012	9:38:01 AM	Bypass valve closed
6/6/2012	9:38:01 AM	Bubbler valve closed
6/6/2012	9:38:01 AM	Helium valve opened
6/6/2012	9:38:01 AM	Main Vac valve opened
6/6/2012	9:38:01 AM	Helium MFC set to  20.000000
6/6/2012	9:38:01 AM	H2 MFC set to  0.000000
6/6/2012	9:38:01 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:01 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:01 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:01 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:01 AM	Tube furnace set to 0
6/6/2012	9:38:01 AM	Helium valve closed
6/6/2012	9:38:01 AM	H2 valve closed
6/6/2012	9:38:01 AM	BCl3 valve closed
6/6/2012	9:38:01 AM	PH3 valve closed
6/6/2012	9:38:01 AM	SiCl4 pre valve closed
6/6/2012	9:38:01 AM	SiCl4 post valve closed
6/6/2012	9:38:01 AM	Bypass valve closed
6/6/2012	9:38:01 AM	Bubbler valve closed
6/6/2012	9:38:01 AM	Main Vac valve opened
6/6/2012	9:38:01 AM	Helium MFC set to  0.000000
6/6/2012	9:38:01 AM	H2 MFC set to  0.000000
6/6/2012	9:38:01 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:01 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:01 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:01 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:01 AM	Tube furnace set to 0
6/6/2012	9:38:02 AM	H2 valve closed
6/6/2012	9:38:02 AM	BCl3 valve closed
6/6/2012	9:38:02 AM	PH3 valve closed
6/6/2012	9:38:02 AM	SiCl4 pre valve closed
6/6/2012	9:38:02 AM	SiCl4 post valve closed
6/6/2012	9:38:02 AM	Bypass valve closed
6/6/2012	9:38:02 AM	Bubbler valve closed
6/6/2012	9:38:02 AM	Helium valve opened
6/6/2012	9:38:02 AM	Main Vac valve opened
6/6/2012	9:38:02 AM	Helium MFC set to  20.000000
6/6/2012	9:38:02 AM	H2 MFC set to  0.000000
6/6/2012	9:38:02 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:02 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:02 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:02 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:02 AM	Tube furnace set to 0
6/6/2012	9:38:02 AM	Helium valve closed
6/6/2012	9:38:02 AM	H2 valve closed
6/6/2012	9:38:02 AM	BCl3 valve closed
6/6/2012	9:38:02 AM	PH3 valve closed
6/6/2012	9:38:02 AM	SiCl4 pre valve closed
6/6/2012	9:38:02 AM	SiCl4 post valve closed
6/6/2012	9:38:02 AM	Bypass valve closed
6/6/2012	9:38:02 AM	Bubbler valve closed
6/6/2012	9:38:02 AM	Main Vac valve opened
6/6/2012	9:38:02 AM	Helium MFC set to  0.000000
6/6/2012	9:38:02 AM	H2 MFC set to  0.000000
6/6/2012	9:38:02 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:02 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:02 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:02 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:02 AM	Tube furnace set to 0
6/6/2012	9:38:03 AM	H2 valve closed
6/6/2012	9:38:03 AM	BCl3 valve closed
6/6/2012	9:38:03 AM	PH3 valve closed
6/6/2012	9:38:03 AM	SiCl4 pre valve closed
6/6/2012	9:38:03 AM	SiCl4 post valve closed
6/6/2012	9:38:03 AM	Bypass valve closed
6/6/2012	9:38:03 AM	Bubbler valve closed
6/6/2012	9:38:03 AM	Helium valve opened
6/6/2012	9:38:03 AM	Main Vac valve opened
6/6/2012	9:38:03 AM	Helium MFC set to  20.000000
6/6/2012	9:38:03 AM	H2 MFC set to  0.000000
6/6/2012	9:38:03 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:03 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:03 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:03 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:03 AM	Tube furnace set to 0
6/6/2012	9:38:03 AM	Helium valve closed
6/6/2012	9:38:03 AM	H2 valve closed
6/6/2012	9:38:03 AM	BCl3 valve closed
6/6/2012	9:38:03 AM	PH3 valve closed
6/6/2012	9:38:03 AM	SiCl4 pre valve closed
6/6/2012	9:38:03 AM	SiCl4 post valve closed
6/6/2012	9:38:03 AM	Bypass valve closed
6/6/2012	9:38:03 AM	Bubbler valve closed
6/6/2012	9:38:03 AM	Main Vac valve opened
6/6/2012	9:38:03 AM	Helium MFC set to  0.000000
6/6/2012	9:38:03 AM	H2 MFC set to  0.000000
6/6/2012	9:38:03 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:03 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:03 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:03 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:03 AM	Tube furnace set to 0
6/6/2012	9:38:04 AM	H2 valve closed
6/6/2012	9:38:04 AM	BCl3 valve closed
6/6/2012	9:38:04 AM	PH3 valve closed
6/6/2012	9:38:04 AM	SiCl4 pre valve closed
6/6/2012	9:38:04 AM	SiCl4 post valve closed
6/6/2012	9:38:04 AM	Bypass valve closed
6/6/2012	9:38:04 AM	Bubbler valve closed
6/6/2012	9:38:04 AM	Helium valve opened
6/6/2012	9:38:04 AM	Main Vac valve opened
6/6/2012	9:38:04 AM	Helium MFC set to  20.000000
6/6/2012	9:38:04 AM	H2 MFC set to  0.000000
6/6/2012	9:38:04 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:04 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:04 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:04 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:04 AM	Tube furnace set to 0
6/6/2012	9:38:06 AM	Helium valve closed
6/6/2012	9:38:06 AM	H2 valve closed
6/6/2012	9:38:06 AM	BCl3 valve closed
6/6/2012	9:38:06 AM	PH3 valve closed
6/6/2012	9:38:06 AM	SiCl4 pre valve closed
6/6/2012	9:38:06 AM	SiCl4 post valve closed
6/6/2012	9:38:06 AM	Bypass valve closed
6/6/2012	9:38:06 AM	Bubbler valve closed
6/6/2012	9:38:06 AM	Main Vac valve opened
6/6/2012	9:38:06 AM	Helium MFC set to  0.000000
6/6/2012	9:38:06 AM	H2 MFC set to  0.000000
6/6/2012	9:38:06 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:06 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:06 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:06 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:09 AM	Tube furnace set to 0
6/6/2012	9:38:09 AM	H2 valve closed
6/6/2012	9:38:09 AM	BCl3 valve closed
6/6/2012	9:38:09 AM	PH3 valve closed
6/6/2012	9:38:09 AM	SiCl4 pre valve closed
6/6/2012	9:38:09 AM	SiCl4 post valve closed
6/6/2012	9:38:09 AM	Bypass valve closed
6/6/2012	9:38:09 AM	Bubbler valve closed
6/6/2012	9:38:09 AM	Helium valve opened
6/6/2012	9:38:09 AM	Main Vac valve opened
6/6/2012	9:38:09 AM	Helium MFC set to  20.000000
6/6/2012	9:38:09 AM	H2 MFC set to  0.000000
6/6/2012	9:38:09 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:09 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:09 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:09 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:09 AM	Tube furnace set to 0
6/6/2012	9:38:10 AM	Helium valve closed
6/6/2012	9:38:10 AM	H2 valve closed
6/6/2012	9:38:10 AM	BCl3 valve closed
6/6/2012	9:38:10 AM	PH3 valve closed
6/6/2012	9:38:10 AM	SiCl4 pre valve closed
6/6/2012	9:38:10 AM	SiCl4 post valve closed
6/6/2012	9:38:10 AM	Bypass valve closed
6/6/2012	9:38:10 AM	Bubbler valve closed
6/6/2012	9:38:10 AM	Main Vac valve opened
6/6/2012	9:38:10 AM	Helium MFC set to  0.000000
6/6/2012	9:38:10 AM	H2 MFC set to  0.000000
6/6/2012	9:38:10 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:10 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:10 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:10 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:10 AM	Tube furnace set to 0
6/6/2012	9:38:10 AM	H2 valve closed
6/6/2012	9:38:10 AM	BCl3 valve closed
6/6/2012	9:38:10 AM	PH3 valve closed
6/6/2012	9:38:10 AM	SiCl4 pre valve closed
6/6/2012	9:38:10 AM	SiCl4 post valve closed
6/6/2012	9:38:10 AM	Bypass valve closed
6/6/2012	9:38:10 AM	Bubbler valve closed
6/6/2012	9:38:10 AM	Helium valve opened
6/6/2012	9:38:10 AM	Main Vac valve opened
6/6/2012	9:38:10 AM	Helium MFC set to  20.000000
6/6/2012	9:38:10 AM	H2 MFC set to  0.000000
6/6/2012	9:38:10 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:10 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:10 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:10 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:10 AM	Tube furnace set to 0
6/6/2012	9:38:11 AM	Helium valve closed
6/6/2012	9:38:11 AM	H2 valve closed
6/6/2012	9:38:11 AM	BCl3 valve closed
6/6/2012	9:38:11 AM	PH3 valve closed
6/6/2012	9:38:11 AM	SiCl4 pre valve closed
6/6/2012	9:38:11 AM	SiCl4 post valve closed
6/6/2012	9:38:11 AM	Bypass valve closed
6/6/2012	9:38:11 AM	Bubbler valve closed
6/6/2012	9:38:11 AM	Main Vac valve opened
6/6/2012	9:38:11 AM	Helium MFC set to  0.000000
6/6/2012	9:38:11 AM	H2 MFC set to  0.000000
6/6/2012	9:38:11 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:11 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:11 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:11 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:11 AM	Tube furnace set to 0
6/6/2012	9:38:41 AM	H2 valve closed
6/6/2012	9:38:41 AM	BCl3 valve closed
6/6/2012	9:38:41 AM	PH3 valve closed
6/6/2012	9:38:41 AM	SiCl4 pre valve closed
6/6/2012	9:38:41 AM	SiCl4 post valve closed
6/6/2012	9:38:41 AM	Bypass valve closed
6/6/2012	9:38:41 AM	Bubbler valve closed
6/6/2012	9:38:41 AM	Helium valve opened
6/6/2012	9:38:41 AM	Main Vac valve opened
6/6/2012	9:38:41 AM	Helium MFC set to  20.000000
6/6/2012	9:38:41 AM	H2 MFC set to  0.000000
6/6/2012	9:38:41 AM	BCl3 MFC set to  0.000000
6/6/2012	9:38:41 AM	PH3 MFC set to  0.000000
6/6/2012	9:38:42 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:38:42 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:38:42 AM	Tube furnace set to 0
6/6/2012	9:39:11 AM	Helium valve closed
6/6/2012	9:39:11 AM	H2 valve closed
6/6/2012	9:39:11 AM	BCl3 valve closed
6/6/2012	9:39:11 AM	PH3 valve closed
6/6/2012	9:39:11 AM	SiCl4 pre valve closed
6/6/2012	9:39:11 AM	SiCl4 post valve closed
6/6/2012	9:39:11 AM	Bypass valve closed
6/6/2012	9:39:11 AM	Bubbler valve closed
6/6/2012	9:39:11 AM	Main Vac valve opened
6/6/2012	9:39:11 AM	Helium MFC set to  0.000000
6/6/2012	9:39:11 AM	H2 MFC set to  0.000000
6/6/2012	9:39:11 AM	BCl3 MFC set to  0.000000
6/6/2012	9:39:11 AM	PH3 MFC set to  0.000000
6/6/2012	9:39:11 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:39:11 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:39:12 AM	Tube furnace set to 200
6/6/2012	9:39:42 AM	H2 valve closed
6/6/2012	9:39:42 AM	BCl3 valve closed
6/6/2012	9:39:42 AM	PH3 valve closed
6/6/2012	9:39:42 AM	SiCl4 pre valve closed
6/6/2012	9:39:42 AM	SiCl4 post valve closed
6/6/2012	9:39:42 AM	Bypass valve closed
6/6/2012	9:39:42 AM	Bubbler valve closed
6/6/2012	9:39:42 AM	Helium valve opened
6/6/2012	9:39:42 AM	Main Vac valve opened
6/6/2012	9:39:42 AM	Helium MFC set to  20.000000
6/6/2012	9:39:42 AM	H2 MFC set to  0.000000
6/6/2012	9:39:42 AM	BCl3 MFC set to  0.000000
6/6/2012	9:39:42 AM	PH3 MFC set to  0.000000
6/6/2012	9:39:42 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:39:42 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:39:42 AM	Tube furnace set to 200
6/6/2012	9:40:12 AM	Helium valve closed
6/6/2012	9:40:12 AM	H2 valve closed
6/6/2012	9:40:12 AM	BCl3 valve closed
6/6/2012	9:40:12 AM	PH3 valve closed
6/6/2012	9:40:12 AM	SiCl4 pre valve closed
6/6/2012	9:40:12 AM	SiCl4 post valve closed
6/6/2012	9:40:12 AM	Bypass valve closed
6/6/2012	9:40:12 AM	Bubbler valve closed
6/6/2012	9:40:12 AM	Main Vac valve opened
6/6/2012	9:40:12 AM	Helium MFC set to  0.000000
6/6/2012	9:40:12 AM	H2 MFC set to  0.000000
6/6/2012	9:40:12 AM	BCl3 MFC set to  0.000000
6/6/2012	9:40:12 AM	PH3 MFC set to  0.000000
6/6/2012	9:40:12 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:40:12 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:40:12 AM	Tube furnace set to 200
6/6/2012	9:40:42 AM	H2 valve closed
6/6/2012	9:40:42 AM	BCl3 valve closed
6/6/2012	9:40:42 AM	PH3 valve closed
6/6/2012	9:40:42 AM	SiCl4 pre valve closed
6/6/2012	9:40:42 AM	SiCl4 post valve closed
6/6/2012	9:40:42 AM	Bypass valve closed
6/6/2012	9:40:42 AM	Bubbler valve closed
6/6/2012	9:40:42 AM	Helium valve opened
6/6/2012	9:40:42 AM	Main Vac valve opened
6/6/2012	9:40:42 AM	Helium MFC set to  20.000000
6/6/2012	9:40:42 AM	H2 MFC set to  0.000000
6/6/2012	9:40:42 AM	BCl3 MFC set to  0.000000
6/6/2012	9:40:42 AM	PH3 MFC set to  0.000000
6/6/2012	9:40:42 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:40:42 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:40:42 AM	Tube furnace set to 200
6/6/2012	9:41:12 AM	Helium valve closed
6/6/2012	9:41:12 AM	H2 valve closed
6/6/2012	9:41:12 AM	BCl3 valve closed
6/6/2012	9:41:12 AM	PH3 valve closed
6/6/2012	9:41:12 AM	SiCl4 pre valve closed
6/6/2012	9:41:12 AM	SiCl4 post valve closed
6/6/2012	9:41:12 AM	Bypass valve closed
6/6/2012	9:41:12 AM	Bubbler valve closed
6/6/2012	9:41:12 AM	Main Vac valve opened
6/6/2012	9:41:12 AM	Helium MFC set to  0.000000
6/6/2012	9:41:12 AM	H2 MFC set to  0.000000
6/6/2012	9:41:12 AM	BCl3 MFC set to  0.000000
6/6/2012	9:41:12 AM	PH3 MFC set to  0.000000
6/6/2012	9:41:12 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:41:12 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:41:13 AM	Tube furnace set to 200
6/6/2012	9:41:43 AM	H2 valve closed
6/6/2012	9:41:43 AM	BCl3 valve closed
6/6/2012	9:41:43 AM	PH3 valve closed
6/6/2012	9:41:43 AM	SiCl4 pre valve closed
6/6/2012	9:41:43 AM	SiCl4 post valve closed
6/6/2012	9:41:43 AM	Bypass valve closed
6/6/2012	9:41:43 AM	Bubbler valve closed
6/6/2012	9:41:43 AM	Helium valve opened
6/6/2012	9:41:43 AM	Main Vac valve opened
6/6/2012	9:41:43 AM	Helium MFC set to  20.000000
6/6/2012	9:41:43 AM	H2 MFC set to  0.000000
6/6/2012	9:41:43 AM	BCl3 MFC set to  0.000000
6/6/2012	9:41:43 AM	PH3 MFC set to  0.000000
6/6/2012	9:41:43 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:41:43 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:41:43 AM	Tube furnace set to 200
6/6/2012	9:42:13 AM	Helium valve closed
6/6/2012	9:42:13 AM	H2 valve closed
6/6/2012	9:42:13 AM	BCl3 valve closed
6/6/2012	9:42:13 AM	PH3 valve closed
6/6/2012	9:42:13 AM	SiCl4 pre valve closed
6/6/2012	9:42:13 AM	SiCl4 post valve closed
6/6/2012	9:42:13 AM	Bypass valve closed
6/6/2012	9:42:13 AM	Bubbler valve closed
6/6/2012	9:42:13 AM	Main Vac valve opened
6/6/2012	9:42:13 AM	Helium MFC set to  0.000000
6/6/2012	9:42:13 AM	H2 MFC set to  0.000000
6/6/2012	9:42:13 AM	BCl3 MFC set to  0.000000
6/6/2012	9:42:13 AM	PH3 MFC set to  0.000000
6/6/2012	9:42:13 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:42:13 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:42:13 AM	Tube furnace set to 200
6/6/2012	9:42:43 AM	H2 valve closed
6/6/2012	9:42:43 AM	BCl3 valve closed
6/6/2012	9:42:43 AM	PH3 valve closed
6/6/2012	9:42:43 AM	SiCl4 pre valve closed
6/6/2012	9:42:43 AM	SiCl4 post valve closed
6/6/2012	9:42:43 AM	Bypass valve closed
6/6/2012	9:42:43 AM	Bubbler valve closed
6/6/2012	9:42:43 AM	Helium valve opened
6/6/2012	9:42:43 AM	Main Vac valve opened
6/6/2012	9:42:43 AM	Helium MFC set to  20.000000
6/6/2012	9:42:43 AM	H2 MFC set to  0.000000
6/6/2012	9:42:43 AM	BCl3 MFC set to  0.000000
6/6/2012	9:42:43 AM	PH3 MFC set to  0.000000
6/6/2012	9:42:43 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:42:43 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:42:43 AM	Tube furnace set to 200
6/6/2012	9:43:13 AM	Helium valve closed
6/6/2012	9:43:13 AM	H2 valve closed
6/6/2012	9:43:13 AM	BCl3 valve closed
6/6/2012	9:43:13 AM	PH3 valve closed
6/6/2012	9:43:13 AM	SiCl4 pre valve closed
6/6/2012	9:43:13 AM	SiCl4 post valve closed
6/6/2012	9:43:13 AM	Bypass valve closed
6/6/2012	9:43:13 AM	Bubbler valve closed
6/6/2012	9:43:13 AM	Main Vac valve opened
6/6/2012	9:43:13 AM	Helium MFC set to  0.000000
6/6/2012	9:43:13 AM	H2 MFC set to  0.000000
6/6/2012	9:43:13 AM	BCl3 MFC set to  0.000000
6/6/2012	9:43:13 AM	PH3 MFC set to  0.000000
6/6/2012	9:43:13 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:43:13 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:43:13 AM	Tube furnace set to 200
6/6/2012	9:43:44 AM	H2 valve closed
6/6/2012	9:43:44 AM	BCl3 valve closed
6/6/2012	9:43:44 AM	PH3 valve closed
6/6/2012	9:43:44 AM	SiCl4 pre valve closed
6/6/2012	9:43:44 AM	SiCl4 post valve closed
6/6/2012	9:43:44 AM	Bypass valve closed
6/6/2012	9:43:44 AM	Bubbler valve closed
6/6/2012	9:43:44 AM	Helium valve opened
6/6/2012	9:43:44 AM	Main Vac valve opened
6/6/2012	9:43:44 AM	Helium MFC set to  20.000000
6/6/2012	9:43:44 AM	H2 MFC set to  0.000000
6/6/2012	9:43:44 AM	BCl3 MFC set to  0.000000
6/6/2012	9:43:44 AM	PH3 MFC set to  0.000000
6/6/2012	9:43:44 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:43:44 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:43:44 AM	Tube furnace set to 200
6/6/2012	9:44:14 AM	Helium valve closed
6/6/2012	9:44:14 AM	H2 valve closed
6/6/2012	9:44:14 AM	BCl3 valve closed
6/6/2012	9:44:14 AM	PH3 valve closed
6/6/2012	9:44:14 AM	SiCl4 pre valve closed
6/6/2012	9:44:14 AM	SiCl4 post valve closed
6/6/2012	9:44:14 AM	Bypass valve closed
6/6/2012	9:44:14 AM	Bubbler valve closed
6/6/2012	9:44:14 AM	Main Vac valve opened
6/6/2012	9:44:14 AM	Helium MFC set to  0.000000
6/6/2012	9:44:14 AM	H2 MFC set to  0.000000
6/6/2012	9:44:14 AM	BCl3 MFC set to  0.000000
6/6/2012	9:44:14 AM	PH3 MFC set to  0.000000
6/6/2012	9:44:14 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:44:14 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:44:14 AM	Tube furnace set to 200
6/6/2012	9:44:44 AM	H2 valve closed
6/6/2012	9:44:44 AM	BCl3 valve closed
6/6/2012	9:44:44 AM	PH3 valve closed
6/6/2012	9:44:44 AM	SiCl4 pre valve closed
6/6/2012	9:44:44 AM	SiCl4 post valve closed
6/6/2012	9:44:44 AM	Bypass valve closed
6/6/2012	9:44:44 AM	Bubbler valve closed
6/6/2012	9:44:44 AM	Helium valve opened
6/6/2012	9:44:44 AM	Main Vac valve opened
6/6/2012	9:44:44 AM	Helium MFC set to  20.000000
6/6/2012	9:44:44 AM	H2 MFC set to  0.000000
6/6/2012	9:44:44 AM	BCl3 MFC set to  0.000000
6/6/2012	9:44:44 AM	PH3 MFC set to  0.000000
6/6/2012	9:44:44 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:44:44 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:44:44 AM	Tube furnace set to 200
6/6/2012	9:45:14 AM	Helium valve closed
6/6/2012	9:45:14 AM	H2 valve closed
6/6/2012	9:45:14 AM	BCl3 valve closed
6/6/2012	9:45:14 AM	PH3 valve closed
6/6/2012	9:45:14 AM	SiCl4 pre valve closed
6/6/2012	9:45:14 AM	SiCl4 post valve closed
6/6/2012	9:45:14 AM	Bypass valve closed
6/6/2012	9:45:14 AM	Bubbler valve closed
6/6/2012	9:45:14 AM	Main Vac valve opened
6/6/2012	9:45:14 AM	Helium MFC set to  0.000000
6/6/2012	9:45:14 AM	H2 MFC set to  0.000000
6/6/2012	9:45:14 AM	BCl3 MFC set to  0.000000
6/6/2012	9:45:14 AM	PH3 MFC set to  0.000000
6/6/2012	9:45:14 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:45:14 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:45:14 AM	Tube furnace set to 0
6/6/2012	9:45:15 AM	Run finished at 9:45 AM
6/6/2012	9:52:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2012	9:52:18 AM	Recipe started at 9:52 AM
6/6/2012	9:52:18 AM	Helium valve closed
6/6/2012	9:52:18 AM	H2 valve closed
6/6/2012	9:52:18 AM	BCl3 valve closed
6/6/2012	9:52:18 AM	PH3 valve closed
6/6/2012	9:52:18 AM	SiCl4 pre valve closed
6/6/2012	9:52:18 AM	SiCl4 post valve closed
6/6/2012	9:52:18 AM	Main Vac valve closed
6/6/2012	9:52:18 AM	Bypass valve closed
6/6/2012	9:52:18 AM	Bubbler valve closed
6/6/2012	9:52:18 AM	Helium MFC set to  0.000000
6/6/2012	9:52:18 AM	H2 MFC set to  0.000000
6/6/2012	9:52:18 AM	BCl3 MFC set to  0.000000
6/6/2012	9:52:18 AM	PH3 MFC set to  0.000000
6/6/2012	9:52:18 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:52:18 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:52:18 AM	Tube furnace set to 0
6/6/2012	9:52:21 AM	H2 valve closed
6/6/2012	9:52:21 AM	BCl3 valve closed
6/6/2012	9:52:21 AM	PH3 valve closed
6/6/2012	9:52:21 AM	SiCl4 pre valve closed
6/6/2012	9:52:21 AM	SiCl4 post valve closed
6/6/2012	9:52:21 AM	Main Vac valve closed
6/6/2012	9:52:21 AM	Bypass valve closed
6/6/2012	9:52:21 AM	Bubbler valve closed
6/6/2012	9:52:21 AM	Helium valve opened
6/6/2012	9:52:21 AM	Helium MFC set to  500.000000
6/6/2012	9:52:21 AM	H2 MFC set to  0.000000
6/6/2012	9:52:21 AM	BCl3 MFC set to  0.000000
6/6/2012	9:52:21 AM	PH3 MFC set to  0.000000
6/6/2012	9:52:21 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:52:21 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:52:21 AM	Tube furnace set to 0
6/6/2012	9:53:28 AM	Helium valve closed
6/6/2012	9:53:28 AM	H2 valve closed
6/6/2012	9:53:28 AM	BCl3 valve closed
6/6/2012	9:53:28 AM	PH3 valve closed
6/6/2012	9:53:28 AM	SiCl4 pre valve closed
6/6/2012	9:53:28 AM	SiCl4 post valve closed
6/6/2012	9:53:28 AM	Main Vac valve closed
6/6/2012	9:53:28 AM	Bypass valve closed
6/6/2012	9:53:28 AM	Bubbler valve closed
6/6/2012	9:53:28 AM	Helium MFC set to  0.000000
6/6/2012	9:53:28 AM	H2 MFC set to  0.000000
6/6/2012	9:53:28 AM	BCl3 MFC set to  0.000000
6/6/2012	9:53:28 AM	PH3 MFC set to  0.000000
6/6/2012	9:53:28 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:53:28 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:53:28 AM	Tube furnace set to 0
6/6/2012	9:53:29 AM	Run finished at 9:53 AM
6/6/2012	9:53:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2012	9:56:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/6/2012	9:56:13 AM	Recipe started at 9:56 AM
6/6/2012	9:56:13 AM	Helium valve closed
6/6/2012	9:56:13 AM	H2 valve closed
6/6/2012	9:56:13 AM	BCl3 valve closed
6/6/2012	9:56:13 AM	PH3 valve closed
6/6/2012	9:56:13 AM	SiCl4 pre valve closed
6/6/2012	9:56:13 AM	SiCl4 post valve closed
6/6/2012	9:56:13 AM	Main Vac valve closed
6/6/2012	9:56:13 AM	Bubbler valve closed
6/6/2012	9:56:13 AM	Bypass valve opened
6/6/2012	9:56:13 AM	Helium MFC set to  0.000000
6/6/2012	9:56:13 AM	H2 MFC set to  0.000000
6/6/2012	9:56:13 AM	BCl3 MFC set to  0.000000
6/6/2012	9:56:13 AM	PH3 MFC set to  0.000000
6/6/2012	9:56:13 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:56:13 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:56:13 AM	Tube furnace set to 0
6/6/2012	9:57:19 AM	Helium valve closed
6/6/2012	9:57:19 AM	H2 valve closed
6/6/2012	9:57:19 AM	BCl3 valve closed
6/6/2012	9:57:19 AM	PH3 valve closed
6/6/2012	9:57:19 AM	SiCl4 pre valve closed
6/6/2012	9:57:19 AM	SiCl4 post valve closed
6/6/2012	9:57:19 AM	Main Vac valve closed
6/6/2012	9:57:19 AM	Bubbler valve closed
6/6/2012	9:57:19 AM	Bypass valve opened
6/6/2012	9:57:19 AM	Helium MFC set to  0.000000
6/6/2012	9:57:19 AM	H2 MFC set to  0.000000
6/6/2012	9:57:19 AM	BCl3 MFC set to  0.000000
6/6/2012	9:57:19 AM	PH3 MFC set to  0.000000
6/6/2012	9:57:19 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:57:19 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:57:19 AM	Tube furnace set to 0
6/6/2012	9:58:19 AM	Helium valve closed
6/6/2012	9:58:19 AM	H2 valve closed
6/6/2012	9:58:19 AM	BCl3 valve closed
6/6/2012	9:58:19 AM	PH3 valve closed
6/6/2012	9:58:19 AM	SiCl4 pre valve closed
6/6/2012	9:58:19 AM	SiCl4 post valve closed
6/6/2012	9:58:19 AM	Bypass valve closed
6/6/2012	9:58:19 AM	Bubbler valve closed
6/6/2012	9:58:19 AM	Main Vac valve opened
6/6/2012	9:58:19 AM	Helium MFC set to  0.000000
6/6/2012	9:58:19 AM	H2 MFC set to  0.000000
6/6/2012	9:58:19 AM	BCl3 MFC set to  0.000000
6/6/2012	9:58:19 AM	PH3 MFC set to  0.000000
6/6/2012	9:58:19 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:58:19 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:58:19 AM	Tube furnace set to 0
6/6/2012	9:58:20 AM	Run finished at 9:58 AM
6/6/2012	9:58:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/6/2012	9:59:24 AM	Recipe started at 9:59 AM
6/6/2012	9:59:24 AM	Helium valve closed
6/6/2012	9:59:24 AM	H2 valve closed
6/6/2012	9:59:24 AM	BCl3 valve closed
6/6/2012	9:59:24 AM	PH3 valve closed
6/6/2012	9:59:24 AM	SiCl4 pre valve closed
6/6/2012	9:59:24 AM	SiCl4 post valve closed
6/6/2012	9:59:24 AM	Bypass valve closed
6/6/2012	9:59:24 AM	Bubbler valve closed
6/6/2012	9:59:24 AM	Main Vac valve opened
6/6/2012	9:59:24 AM	Helium MFC set to  0.000000
6/6/2012	9:59:24 AM	H2 MFC set to  0.000000
6/6/2012	9:59:24 AM	BCl3 MFC set to  0.000000
6/6/2012	9:59:24 AM	PH3 MFC set to  0.000000
6/6/2012	9:59:24 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:59:24 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:59:24 AM	Tube furnace set to 0
6/6/2012	9:59:54 AM	H2 valve closed
6/6/2012	9:59:54 AM	BCl3 valve closed
6/6/2012	9:59:54 AM	PH3 valve closed
6/6/2012	9:59:54 AM	SiCl4 pre valve closed
6/6/2012	9:59:54 AM	SiCl4 post valve closed
6/6/2012	9:59:54 AM	Bypass valve closed
6/6/2012	9:59:54 AM	Bubbler valve closed
6/6/2012	9:59:54 AM	Helium valve opened
6/6/2012	9:59:54 AM	Main Vac valve opened
6/6/2012	9:59:54 AM	Helium MFC set to  20.000000
6/6/2012	9:59:54 AM	H2 MFC set to  0.000000
6/6/2012	9:59:54 AM	BCl3 MFC set to  0.000000
6/6/2012	9:59:54 AM	PH3 MFC set to  0.000000
6/6/2012	9:59:54 AM	SiCl4 MFC set to  0.000000
6/6/2012	9:59:54 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:59:55 AM	Tube furnace set to 0
6/6/2012	10:00:25 AM	Helium valve closed
6/6/2012	10:00:25 AM	H2 valve closed
6/6/2012	10:00:25 AM	BCl3 valve closed
6/6/2012	10:00:25 AM	PH3 valve closed
6/6/2012	10:00:25 AM	SiCl4 pre valve closed
6/6/2012	10:00:25 AM	SiCl4 post valve closed
6/6/2012	10:00:25 AM	Bypass valve closed
6/6/2012	10:00:25 AM	Bubbler valve closed
6/6/2012	10:00:25 AM	Main Vac valve opened
6/6/2012	10:00:25 AM	Helium MFC set to  0.000000
6/6/2012	10:00:25 AM	H2 MFC set to  0.000000
6/6/2012	10:00:25 AM	BCl3 MFC set to  0.000000
6/6/2012	10:00:25 AM	PH3 MFC set to  0.000000
6/6/2012	10:00:25 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:00:25 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:00:25 AM	Tube furnace set to 0
6/6/2012	10:00:55 AM	H2 valve closed
6/6/2012	10:00:55 AM	BCl3 valve closed
6/6/2012	10:00:55 AM	PH3 valve closed
6/6/2012	10:00:55 AM	SiCl4 pre valve closed
6/6/2012	10:00:55 AM	SiCl4 post valve closed
6/6/2012	10:00:55 AM	Bypass valve closed
6/6/2012	10:00:55 AM	Bubbler valve closed
6/6/2012	10:00:55 AM	Helium valve opened
6/6/2012	10:00:55 AM	Main Vac valve opened
6/6/2012	10:00:55 AM	Helium MFC set to  20.000000
6/6/2012	10:00:55 AM	H2 MFC set to  0.000000
6/6/2012	10:00:55 AM	BCl3 MFC set to  0.000000
6/6/2012	10:00:55 AM	PH3 MFC set to  0.000000
6/6/2012	10:00:55 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:00:55 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:00:55 AM	Tube furnace set to 0
6/6/2012	10:01:25 AM	Helium valve closed
6/6/2012	10:01:25 AM	H2 valve closed
6/6/2012	10:01:25 AM	BCl3 valve closed
6/6/2012	10:01:25 AM	PH3 valve closed
6/6/2012	10:01:25 AM	SiCl4 pre valve closed
6/6/2012	10:01:25 AM	SiCl4 post valve closed
6/6/2012	10:01:25 AM	Bypass valve closed
6/6/2012	10:01:25 AM	Bubbler valve closed
6/6/2012	10:01:25 AM	Main Vac valve opened
6/6/2012	10:01:25 AM	Helium MFC set to  0.000000
6/6/2012	10:01:25 AM	H2 MFC set to  0.000000
6/6/2012	10:01:25 AM	BCl3 MFC set to  0.000000
6/6/2012	10:01:25 AM	PH3 MFC set to  0.000000
6/6/2012	10:01:25 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:01:25 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:01:25 AM	Tube furnace set to 0
6/6/2012	10:01:55 AM	H2 valve closed
6/6/2012	10:01:55 AM	BCl3 valve closed
6/6/2012	10:01:55 AM	PH3 valve closed
6/6/2012	10:01:55 AM	SiCl4 pre valve closed
6/6/2012	10:01:55 AM	SiCl4 post valve closed
6/6/2012	10:01:55 AM	Bypass valve closed
6/6/2012	10:01:55 AM	Bubbler valve closed
6/6/2012	10:01:55 AM	Helium valve opened
6/6/2012	10:01:55 AM	Main Vac valve opened
6/6/2012	10:01:55 AM	Helium MFC set to  20.000000
6/6/2012	10:01:55 AM	H2 MFC set to  0.000000
6/6/2012	10:01:55 AM	BCl3 MFC set to  0.000000
6/6/2012	10:01:55 AM	PH3 MFC set to  0.000000
6/6/2012	10:01:55 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:01:55 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:01:55 AM	Tube furnace set to 0
6/6/2012	10:02:26 AM	Helium valve closed
6/6/2012	10:02:26 AM	H2 valve closed
6/6/2012	10:02:26 AM	BCl3 valve closed
6/6/2012	10:02:26 AM	PH3 valve closed
6/6/2012	10:02:26 AM	SiCl4 pre valve closed
6/6/2012	10:02:26 AM	SiCl4 post valve closed
6/6/2012	10:02:26 AM	Bypass valve closed
6/6/2012	10:02:26 AM	Bubbler valve closed
6/6/2012	10:02:26 AM	Main Vac valve opened
6/6/2012	10:02:26 AM	Helium MFC set to  0.000000
6/6/2012	10:02:26 AM	H2 MFC set to  0.000000
6/6/2012	10:02:26 AM	BCl3 MFC set to  0.000000
6/6/2012	10:02:26 AM	PH3 MFC set to  0.000000
6/6/2012	10:02:26 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:02:26 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:02:26 AM	Tube furnace set to 0
6/6/2012	10:02:56 AM	H2 valve closed
6/6/2012	10:02:56 AM	BCl3 valve closed
6/6/2012	10:02:56 AM	PH3 valve closed
6/6/2012	10:02:56 AM	SiCl4 pre valve closed
6/6/2012	10:02:56 AM	SiCl4 post valve closed
6/6/2012	10:02:56 AM	Bypass valve closed
6/6/2012	10:02:56 AM	Bubbler valve closed
6/6/2012	10:02:56 AM	Helium valve opened
6/6/2012	10:02:56 AM	Main Vac valve opened
6/6/2012	10:02:56 AM	Helium MFC set to  20.000000
6/6/2012	10:02:56 AM	H2 MFC set to  0.000000
6/6/2012	10:02:56 AM	BCl3 MFC set to  0.000000
6/6/2012	10:02:56 AM	PH3 MFC set to  0.000000
6/6/2012	10:02:56 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:02:56 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:02:56 AM	Tube furnace set to 0
6/6/2012	10:03:26 AM	Helium valve closed
6/6/2012	10:03:26 AM	H2 valve closed
6/6/2012	10:03:26 AM	BCl3 valve closed
6/6/2012	10:03:26 AM	PH3 valve closed
6/6/2012	10:03:26 AM	SiCl4 pre valve closed
6/6/2012	10:03:26 AM	SiCl4 post valve closed
6/6/2012	10:03:26 AM	Bypass valve closed
6/6/2012	10:03:26 AM	Bubbler valve closed
6/6/2012	10:03:26 AM	Main Vac valve opened
6/6/2012	10:03:26 AM	Helium MFC set to  0.000000
6/6/2012	10:03:26 AM	H2 MFC set to  0.000000
6/6/2012	10:03:26 AM	BCl3 MFC set to  0.000000
6/6/2012	10:03:26 AM	PH3 MFC set to  0.000000
6/6/2012	10:03:26 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:03:26 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:03:26 AM	Tube furnace set to 0
6/6/2012	10:03:56 AM	H2 valve closed
6/6/2012	10:03:56 AM	BCl3 valve closed
6/6/2012	10:03:56 AM	PH3 valve closed
6/6/2012	10:03:56 AM	SiCl4 pre valve closed
6/6/2012	10:03:56 AM	SiCl4 post valve closed
6/6/2012	10:03:56 AM	Bypass valve closed
6/6/2012	10:03:56 AM	Bubbler valve closed
6/6/2012	10:03:56 AM	Helium valve opened
6/6/2012	10:03:56 AM	Main Vac valve opened
6/6/2012	10:03:56 AM	Helium MFC set to  20.000000
6/6/2012	10:03:56 AM	H2 MFC set to  0.000000
6/6/2012	10:03:56 AM	BCl3 MFC set to  0.000000
6/6/2012	10:03:56 AM	PH3 MFC set to  0.000000
6/6/2012	10:03:56 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:03:56 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:03:56 AM	Tube furnace set to 0
6/6/2012	10:04:26 AM	Helium valve closed
6/6/2012	10:04:26 AM	H2 valve closed
6/6/2012	10:04:26 AM	BCl3 valve closed
6/6/2012	10:04:26 AM	PH3 valve closed
6/6/2012	10:04:26 AM	SiCl4 pre valve closed
6/6/2012	10:04:26 AM	SiCl4 post valve closed
6/6/2012	10:04:26 AM	Bypass valve closed
6/6/2012	10:04:26 AM	Bubbler valve closed
6/6/2012	10:04:26 AM	Main Vac valve opened
6/6/2012	10:04:26 AM	Helium MFC set to  0.000000
6/6/2012	10:04:26 AM	H2 MFC set to  0.000000
6/6/2012	10:04:26 AM	BCl3 MFC set to  0.000000
6/6/2012	10:04:27 AM	PH3 MFC set to  0.000000
6/6/2012	10:04:27 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:04:27 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:04:27 AM	Tube furnace set to 0
6/6/2012	10:04:57 AM	H2 valve closed
6/6/2012	10:04:57 AM	BCl3 valve closed
6/6/2012	10:04:57 AM	PH3 valve closed
6/6/2012	10:04:57 AM	SiCl4 pre valve closed
6/6/2012	10:04:57 AM	SiCl4 post valve closed
6/6/2012	10:04:57 AM	Bypass valve closed
6/6/2012	10:04:57 AM	Bubbler valve closed
6/6/2012	10:04:57 AM	Helium valve opened
6/6/2012	10:04:57 AM	Main Vac valve opened
6/6/2012	10:04:57 AM	Helium MFC set to  20.000000
6/6/2012	10:04:57 AM	H2 MFC set to  0.000000
6/6/2012	10:04:57 AM	BCl3 MFC set to  0.000000
6/6/2012	10:04:57 AM	PH3 MFC set to  0.000000
6/6/2012	10:04:57 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:04:57 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:04:57 AM	Tube furnace set to 0
6/6/2012	10:05:27 AM	Helium valve closed
6/6/2012	10:05:27 AM	H2 valve closed
6/6/2012	10:05:27 AM	BCl3 valve closed
6/6/2012	10:05:27 AM	PH3 valve closed
6/6/2012	10:05:27 AM	SiCl4 pre valve closed
6/6/2012	10:05:27 AM	SiCl4 post valve closed
6/6/2012	10:05:27 AM	Bypass valve closed
6/6/2012	10:05:27 AM	Bubbler valve closed
6/6/2012	10:05:27 AM	Main Vac valve opened
6/6/2012	10:05:27 AM	Helium MFC set to  0.000000
6/6/2012	10:05:27 AM	H2 MFC set to  0.000000
6/6/2012	10:05:27 AM	BCl3 MFC set to  0.000000
6/6/2012	10:05:27 AM	PH3 MFC set to  0.000000
6/6/2012	10:05:27 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:05:27 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:05:27 AM	Tube furnace set to 0
6/6/2012	10:05:57 AM	H2 valve closed
6/6/2012	10:05:57 AM	BCl3 valve closed
6/6/2012	10:05:57 AM	PH3 valve closed
6/6/2012	10:05:57 AM	SiCl4 pre valve closed
6/6/2012	10:05:57 AM	SiCl4 post valve closed
6/6/2012	10:05:57 AM	Bypass valve closed
6/6/2012	10:05:57 AM	Bubbler valve closed
6/6/2012	10:05:57 AM	Helium valve opened
6/6/2012	10:05:57 AM	Main Vac valve opened
6/6/2012	10:05:57 AM	Helium MFC set to  20.000000
6/6/2012	10:05:57 AM	H2 MFC set to  0.000000
6/6/2012	10:05:57 AM	BCl3 MFC set to  0.000000
6/6/2012	10:05:57 AM	PH3 MFC set to  0.000000
6/6/2012	10:05:57 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:05:57 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:05:57 AM	Tube furnace set to 0
6/6/2012	10:06:27 AM	Helium valve closed
6/6/2012	10:06:27 AM	H2 valve closed
6/6/2012	10:06:27 AM	BCl3 valve closed
6/6/2012	10:06:27 AM	PH3 valve closed
6/6/2012	10:06:27 AM	SiCl4 pre valve closed
6/6/2012	10:06:27 AM	SiCl4 post valve closed
6/6/2012	10:06:27 AM	Bypass valve closed
6/6/2012	10:06:27 AM	Bubbler valve closed
6/6/2012	10:06:27 AM	Main Vac valve opened
6/6/2012	10:06:27 AM	Helium MFC set to  0.000000
6/6/2012	10:06:27 AM	H2 MFC set to  0.000000
6/6/2012	10:06:27 AM	BCl3 MFC set to  0.000000
6/6/2012	10:06:27 AM	PH3 MFC set to  0.000000
6/6/2012	10:06:27 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:06:27 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:06:28 AM	Tube furnace set to 0
6/6/2012	10:06:58 AM	H2 valve closed
6/6/2012	10:06:58 AM	BCl3 valve closed
6/6/2012	10:06:58 AM	PH3 valve closed
6/6/2012	10:06:58 AM	SiCl4 pre valve closed
6/6/2012	10:06:58 AM	SiCl4 post valve closed
6/6/2012	10:06:58 AM	Bypass valve closed
6/6/2012	10:06:58 AM	Bubbler valve closed
6/6/2012	10:06:58 AM	Helium valve opened
6/6/2012	10:06:58 AM	Main Vac valve opened
6/6/2012	10:06:58 AM	Helium MFC set to  20.000000
6/6/2012	10:06:58 AM	H2 MFC set to  0.000000
6/6/2012	10:06:58 AM	BCl3 MFC set to  0.000000
6/6/2012	10:06:58 AM	PH3 MFC set to  0.000000
6/6/2012	10:06:58 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:06:58 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:06:58 AM	Tube furnace set to 0
6/6/2012	10:07:28 AM	Helium valve closed
6/6/2012	10:07:28 AM	H2 valve closed
6/6/2012	10:07:28 AM	BCl3 valve closed
6/6/2012	10:07:28 AM	PH3 valve closed
6/6/2012	10:07:28 AM	SiCl4 pre valve closed
6/6/2012	10:07:28 AM	SiCl4 post valve closed
6/6/2012	10:07:28 AM	Bypass valve closed
6/6/2012	10:07:28 AM	Bubbler valve closed
6/6/2012	10:07:28 AM	Main Vac valve opened
6/6/2012	10:07:28 AM	Helium MFC set to  0.000000
6/6/2012	10:07:28 AM	H2 MFC set to  0.000000
6/6/2012	10:07:28 AM	BCl3 MFC set to  0.000000
6/6/2012	10:07:28 AM	PH3 MFC set to  0.000000
6/6/2012	10:07:28 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:07:28 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:07:28 AM	Tube furnace set to 0
6/6/2012	10:07:58 AM	H2 valve closed
6/6/2012	10:07:58 AM	BCl3 valve closed
6/6/2012	10:07:58 AM	PH3 valve closed
6/6/2012	10:07:58 AM	SiCl4 pre valve closed
6/6/2012	10:07:58 AM	SiCl4 post valve closed
6/6/2012	10:07:58 AM	Bypass valve closed
6/6/2012	10:07:58 AM	Bubbler valve closed
6/6/2012	10:07:58 AM	Helium valve opened
6/6/2012	10:07:58 AM	Main Vac valve opened
6/6/2012	10:07:58 AM	Helium MFC set to  20.000000
6/6/2012	10:07:58 AM	H2 MFC set to  0.000000
6/6/2012	10:07:58 AM	BCl3 MFC set to  0.000000
6/6/2012	10:07:58 AM	PH3 MFC set to  0.000000
6/6/2012	10:07:58 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:07:58 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:07:58 AM	Tube furnace set to 0
6/6/2012	10:08:28 AM	Helium valve closed
6/6/2012	10:08:28 AM	H2 valve closed
6/6/2012	10:08:28 AM	BCl3 valve closed
6/6/2012	10:08:28 AM	PH3 valve closed
6/6/2012	10:08:28 AM	SiCl4 pre valve closed
6/6/2012	10:08:28 AM	SiCl4 post valve closed
6/6/2012	10:08:28 AM	Bypass valve closed
6/6/2012	10:08:28 AM	Bubbler valve closed
6/6/2012	10:08:28 AM	Main Vac valve opened
6/6/2012	10:08:28 AM	Helium MFC set to  0.000000
6/6/2012	10:08:28 AM	H2 MFC set to  0.000000
6/6/2012	10:08:28 AM	BCl3 MFC set to  0.000000
6/6/2012	10:08:28 AM	PH3 MFC set to  0.000000
6/6/2012	10:08:28 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:08:28 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:08:29 AM	Tube furnace set to 200
6/6/2012	10:08:59 AM	H2 valve closed
6/6/2012	10:08:59 AM	BCl3 valve closed
6/6/2012	10:08:59 AM	PH3 valve closed
6/6/2012	10:08:59 AM	SiCl4 pre valve closed
6/6/2012	10:08:59 AM	SiCl4 post valve closed
6/6/2012	10:08:59 AM	Bypass valve closed
6/6/2012	10:08:59 AM	Bubbler valve closed
6/6/2012	10:08:59 AM	Helium valve opened
6/6/2012	10:08:59 AM	Main Vac valve opened
6/6/2012	10:08:59 AM	Helium MFC set to  20.000000
6/6/2012	10:08:59 AM	H2 MFC set to  0.000000
6/6/2012	10:08:59 AM	BCl3 MFC set to  0.000000
6/6/2012	10:08:59 AM	PH3 MFC set to  0.000000
6/6/2012	10:08:59 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:08:59 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:08:59 AM	Tube furnace set to 200
6/6/2012	10:09:29 AM	Helium valve closed
6/6/2012	10:09:29 AM	H2 valve closed
6/6/2012	10:09:29 AM	BCl3 valve closed
6/6/2012	10:09:29 AM	PH3 valve closed
6/6/2012	10:09:29 AM	SiCl4 pre valve closed
6/6/2012	10:09:29 AM	SiCl4 post valve closed
6/6/2012	10:09:29 AM	Bypass valve closed
6/6/2012	10:09:29 AM	Bubbler valve closed
6/6/2012	10:09:29 AM	Main Vac valve opened
6/6/2012	10:09:29 AM	Helium MFC set to  0.000000
6/6/2012	10:09:29 AM	H2 MFC set to  0.000000
6/6/2012	10:09:29 AM	BCl3 MFC set to  0.000000
6/6/2012	10:09:29 AM	PH3 MFC set to  0.000000
6/6/2012	10:09:29 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:09:29 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:09:29 AM	Tube furnace set to 200
6/6/2012	10:09:59 AM	H2 valve closed
6/6/2012	10:09:59 AM	BCl3 valve closed
6/6/2012	10:09:59 AM	PH3 valve closed
6/6/2012	10:09:59 AM	SiCl4 pre valve closed
6/6/2012	10:09:59 AM	SiCl4 post valve closed
6/6/2012	10:09:59 AM	Bypass valve closed
6/6/2012	10:09:59 AM	Bubbler valve closed
6/6/2012	10:09:59 AM	Helium valve opened
6/6/2012	10:09:59 AM	Main Vac valve opened
6/6/2012	10:09:59 AM	Helium MFC set to  20.000000
6/6/2012	10:09:59 AM	H2 MFC set to  0.000000
6/6/2012	10:09:59 AM	BCl3 MFC set to  0.000000
6/6/2012	10:09:59 AM	PH3 MFC set to  0.000000
6/6/2012	10:09:59 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:09:59 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:09:59 AM	Tube furnace set to 200
6/6/2012	10:10:29 AM	Helium valve closed
6/6/2012	10:10:29 AM	H2 valve closed
6/6/2012	10:10:29 AM	BCl3 valve closed
6/6/2012	10:10:29 AM	PH3 valve closed
6/6/2012	10:10:29 AM	SiCl4 pre valve closed
6/6/2012	10:10:29 AM	SiCl4 post valve closed
6/6/2012	10:10:29 AM	Bypass valve closed
6/6/2012	10:10:29 AM	Bubbler valve closed
6/6/2012	10:10:29 AM	Main Vac valve opened
6/6/2012	10:10:29 AM	Helium MFC set to  0.000000
6/6/2012	10:10:29 AM	H2 MFC set to  0.000000
6/6/2012	10:10:29 AM	BCl3 MFC set to  0.000000
6/6/2012	10:10:29 AM	PH3 MFC set to  0.000000
6/6/2012	10:10:29 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:10:29 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:10:29 AM	Tube furnace set to 200
6/6/2012	10:11:00 AM	H2 valve closed
6/6/2012	10:11:00 AM	BCl3 valve closed
6/6/2012	10:11:00 AM	PH3 valve closed
6/6/2012	10:11:00 AM	SiCl4 pre valve closed
6/6/2012	10:11:00 AM	SiCl4 post valve closed
6/6/2012	10:11:00 AM	Bypass valve closed
6/6/2012	10:11:00 AM	Bubbler valve closed
6/6/2012	10:11:00 AM	Helium valve opened
6/6/2012	10:11:00 AM	Main Vac valve opened
6/6/2012	10:11:00 AM	Helium MFC set to  20.000000
6/6/2012	10:11:00 AM	H2 MFC set to  0.000000
6/6/2012	10:11:00 AM	BCl3 MFC set to  0.000000
6/6/2012	10:11:00 AM	PH3 MFC set to  0.000000
6/6/2012	10:11:00 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:11:00 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:11:00 AM	Tube furnace set to 200
6/6/2012	10:11:30 AM	Helium valve closed
6/6/2012	10:11:30 AM	H2 valve closed
6/6/2012	10:11:30 AM	BCl3 valve closed
6/6/2012	10:11:30 AM	PH3 valve closed
6/6/2012	10:11:30 AM	SiCl4 pre valve closed
6/6/2012	10:11:30 AM	SiCl4 post valve closed
6/6/2012	10:11:30 AM	Bypass valve closed
6/6/2012	10:11:30 AM	Bubbler valve closed
6/6/2012	10:11:30 AM	Main Vac valve opened
6/6/2012	10:11:30 AM	Helium MFC set to  0.000000
6/6/2012	10:11:30 AM	H2 MFC set to  0.000000
6/6/2012	10:11:30 AM	BCl3 MFC set to  0.000000
6/6/2012	10:11:30 AM	PH3 MFC set to  0.000000
6/6/2012	10:11:30 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:11:30 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:11:30 AM	Tube furnace set to 200
6/6/2012	10:12:00 AM	H2 valve closed
6/6/2012	10:12:00 AM	BCl3 valve closed
6/6/2012	10:12:00 AM	PH3 valve closed
6/6/2012	10:12:00 AM	SiCl4 pre valve closed
6/6/2012	10:12:00 AM	SiCl4 post valve closed
6/6/2012	10:12:00 AM	Bypass valve closed
6/6/2012	10:12:00 AM	Bubbler valve closed
6/6/2012	10:12:00 AM	Helium valve opened
6/6/2012	10:12:00 AM	Main Vac valve opened
6/6/2012	10:12:00 AM	Helium MFC set to  20.000000
6/6/2012	10:12:00 AM	H2 MFC set to  0.000000
6/6/2012	10:12:00 AM	BCl3 MFC set to  0.000000
6/6/2012	10:12:00 AM	PH3 MFC set to  0.000000
6/6/2012	10:12:00 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:12:00 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:12:00 AM	Tube furnace set to 200
6/6/2012	10:12:30 AM	Helium valve closed
6/6/2012	10:12:30 AM	H2 valve closed
6/6/2012	10:12:30 AM	BCl3 valve closed
6/6/2012	10:12:30 AM	PH3 valve closed
6/6/2012	10:12:30 AM	SiCl4 pre valve closed
6/6/2012	10:12:30 AM	SiCl4 post valve closed
6/6/2012	10:12:30 AM	Bypass valve closed
6/6/2012	10:12:30 AM	Bubbler valve closed
6/6/2012	10:12:30 AM	Main Vac valve opened
6/6/2012	10:12:30 AM	Helium MFC set to  0.000000
6/6/2012	10:12:30 AM	H2 MFC set to  0.000000
6/6/2012	10:12:30 AM	BCl3 MFC set to  0.000000
6/6/2012	10:12:30 AM	PH3 MFC set to  0.000000
6/6/2012	10:12:30 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:12:30 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:12:30 AM	Tube furnace set to 200
6/6/2012	10:13:00 AM	H2 valve closed
6/6/2012	10:13:00 AM	BCl3 valve closed
6/6/2012	10:13:00 AM	PH3 valve closed
6/6/2012	10:13:00 AM	SiCl4 pre valve closed
6/6/2012	10:13:00 AM	SiCl4 post valve closed
6/6/2012	10:13:00 AM	Bypass valve closed
6/6/2012	10:13:00 AM	Bubbler valve closed
6/6/2012	10:13:00 AM	Helium valve opened
6/6/2012	10:13:01 AM	Main Vac valve opened
6/6/2012	10:13:01 AM	Helium MFC set to  20.000000
6/6/2012	10:13:01 AM	H2 MFC set to  0.000000
6/6/2012	10:13:01 AM	BCl3 MFC set to  0.000000
6/6/2012	10:13:01 AM	PH3 MFC set to  0.000000
6/6/2012	10:13:01 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:13:01 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:13:01 AM	Tube furnace set to 200
6/6/2012	10:13:31 AM	Helium valve closed
6/6/2012	10:13:31 AM	H2 valve closed
6/6/2012	10:13:31 AM	BCl3 valve closed
6/6/2012	10:13:31 AM	PH3 valve closed
6/6/2012	10:13:31 AM	SiCl4 pre valve closed
6/6/2012	10:13:31 AM	SiCl4 post valve closed
6/6/2012	10:13:31 AM	Bypass valve closed
6/6/2012	10:13:31 AM	Bubbler valve closed
6/6/2012	10:13:31 AM	Main Vac valve opened
6/6/2012	10:13:31 AM	Helium MFC set to  0.000000
6/6/2012	10:13:31 AM	H2 MFC set to  0.000000
6/6/2012	10:13:31 AM	BCl3 MFC set to  0.000000
6/6/2012	10:13:31 AM	PH3 MFC set to  0.000000
6/6/2012	10:13:31 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:13:31 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:13:31 AM	Tube furnace set to 200
6/6/2012	10:14:01 AM	H2 valve closed
6/6/2012	10:14:01 AM	BCl3 valve closed
6/6/2012	10:14:01 AM	PH3 valve closed
6/6/2012	10:14:01 AM	SiCl4 pre valve closed
6/6/2012	10:14:01 AM	SiCl4 post valve closed
6/6/2012	10:14:01 AM	Bypass valve closed
6/6/2012	10:14:01 AM	Bubbler valve closed
6/6/2012	10:14:01 AM	Helium valve opened
6/6/2012	10:14:01 AM	Main Vac valve opened
6/6/2012	10:14:01 AM	Helium MFC set to  20.000000
6/6/2012	10:14:01 AM	H2 MFC set to  0.000000
6/6/2012	10:14:01 AM	BCl3 MFC set to  0.000000
6/6/2012	10:14:01 AM	PH3 MFC set to  0.000000
6/6/2012	10:14:01 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:14:01 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:14:01 AM	Tube furnace set to 200
6/6/2012	10:14:31 AM	Helium valve closed
6/6/2012	10:14:31 AM	H2 valve closed
6/6/2012	10:14:31 AM	BCl3 valve closed
6/6/2012	10:14:31 AM	PH3 valve closed
6/6/2012	10:14:31 AM	SiCl4 pre valve closed
6/6/2012	10:14:31 AM	SiCl4 post valve closed
6/6/2012	10:14:31 AM	Bypass valve closed
6/6/2012	10:14:31 AM	Bubbler valve closed
6/6/2012	10:14:31 AM	Main Vac valve opened
6/6/2012	10:14:31 AM	Helium MFC set to  0.000000
6/6/2012	10:14:31 AM	H2 MFC set to  0.000000
6/6/2012	10:14:31 AM	BCl3 MFC set to  0.000000
6/6/2012	10:14:31 AM	PH3 MFC set to  0.000000
6/6/2012	10:14:31 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:14:31 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:14:31 AM	Tube furnace set to 0
6/6/2012	10:14:32 AM	Run finished at 10:14 AM
6/6/2012	10:40:31 AM	Main Vac valve closed
6/6/2012	10:40:50 AM	Main Vac valve opened
6/6/2012	10:41:44 AM	Recipe started at 10:41 AM
6/6/2012	10:41:44 AM	Helium valve closed
6/6/2012	10:41:44 AM	H2 valve closed
6/6/2012	10:41:44 AM	BCl3 valve closed
6/6/2012	10:41:44 AM	PH3 valve closed
6/6/2012	10:41:44 AM	SiCl4 pre valve closed
6/6/2012	10:41:44 AM	SiCl4 post valve closed
6/6/2012	10:41:44 AM	Main Vac valve closed
6/6/2012	10:41:44 AM	Bypass valve closed
6/6/2012	10:41:44 AM	Bubbler valve closed
6/6/2012	10:41:44 AM	Helium MFC set to  0.000000
6/6/2012	10:41:44 AM	H2 MFC set to  0.000000
6/6/2012	10:41:44 AM	BCl3 MFC set to  0.000000
6/6/2012	10:41:44 AM	PH3 MFC set to  0.000000
6/6/2012	10:41:44 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:41:44 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:41:45 AM	Tube furnace set to 0
6/6/2012	10:41:48 AM	Helium valve closed
6/6/2012	10:41:48 AM	BCl3 valve closed
6/6/2012	10:41:48 AM	PH3 valve closed
6/6/2012	10:41:48 AM	SiCl4 pre valve closed
6/6/2012	10:41:48 AM	SiCl4 post valve closed
6/6/2012	10:41:48 AM	Main Vac valve closed
6/6/2012	10:41:48 AM	Bypass valve closed
6/6/2012	10:41:48 AM	Bubbler valve closed
6/6/2012	10:41:48 AM	H2 valve opened
6/6/2012	10:41:48 AM	Helium MFC set to  0.000000
6/6/2012	10:41:48 AM	H2 MFC set to  500.000000
6/6/2012	10:41:48 AM	BCl3 MFC set to  0.000000
6/6/2012	10:41:48 AM	PH3 MFC set to  0.000000
6/6/2012	10:41:48 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:41:48 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:41:48 AM	Tube furnace set to 0
6/6/2012	10:43:01 AM	Helium valve closed
6/6/2012	10:43:01 AM	BCl3 valve closed
6/6/2012	10:43:01 AM	PH3 valve closed
6/6/2012	10:43:01 AM	SiCl4 pre valve closed
6/6/2012	10:43:01 AM	SiCl4 post valve closed
6/6/2012	10:43:01 AM	Main Vac valve closed
6/6/2012	10:43:01 AM	Bypass valve closed
6/6/2012	10:43:01 AM	H2 valve opened
6/6/2012	10:43:01 AM	Bubbler valve opened
6/6/2012	10:43:01 AM	Helium MFC set to  0.000000
6/6/2012	10:43:01 AM	H2 MFC set to  500.000000
6/6/2012	10:43:01 AM	BCl3 MFC set to  0.000000
6/6/2012	10:43:01 AM	PH3 MFC set to  0.000000
6/6/2012	10:43:01 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:43:01 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:43:01 AM	Tube furnace set to 0
6/6/2012	10:43:02 AM	Helium valve closed
6/6/2012	10:43:02 AM	BCl3 valve closed
6/6/2012	10:43:02 AM	PH3 valve closed
6/6/2012	10:43:02 AM	SiCl4 pre valve closed
6/6/2012	10:43:02 AM	SiCl4 post valve closed
6/6/2012	10:43:02 AM	Main Vac valve closed
6/6/2012	10:43:02 AM	Bypass valve closed
6/6/2012	10:43:02 AM	H2 valve opened
6/6/2012	10:43:02 AM	Bubbler valve opened
6/6/2012	10:43:02 AM	Helium MFC set to  0.000000
6/6/2012	10:43:02 AM	H2 MFC set to  500.000000
6/6/2012	10:43:02 AM	BCl3 MFC set to  0.000000
6/6/2012	10:43:02 AM	PH3 MFC set to  0.000000
6/6/2012	10:43:02 AM	SiCl4 MFC set to  0.000000
6/6/2012	10:43:02 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:43:02 AM	Tube furnace set to 1000
6/6/2012	11:03:02 AM	Helium valve closed
6/6/2012	11:03:02 AM	BCl3 valve closed
6/6/2012	11:03:02 AM	PH3 valve closed
6/6/2012	11:03:02 AM	Main Vac valve closed
6/6/2012	11:03:02 AM	Bypass valve closed
6/6/2012	11:03:02 AM	H2 valve opened
6/6/2012	11:03:02 AM	SiCl4 pre valve opened
6/6/2012	11:03:02 AM	SiCl4 post valve opened
6/6/2012	11:03:02 AM	Bubbler valve opened
6/6/2012	11:03:02 AM	Helium MFC set to  0.000000
6/6/2012	11:03:02 AM	H2 MFC set to  500.000000
6/6/2012	11:03:02 AM	BCl3 MFC set to  0.000000
6/6/2012	11:03:02 AM	PH3 MFC set to  0.000000
6/6/2012	11:03:02 AM	SiCl4 MFC set to  25.000000
6/6/2012	11:03:02 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	11:03:02 AM	Tube furnace set to 1000
6/6/2012	11:18:02 AM	Helium valve closed
6/6/2012	11:18:02 AM	BCl3 valve closed
6/6/2012	11:18:02 AM	PH3 valve closed
6/6/2012	11:18:02 AM	SiCl4 pre valve closed
6/6/2012	11:18:02 AM	SiCl4 post valve closed
6/6/2012	11:18:02 AM	Main Vac valve closed
6/6/2012	11:18:02 AM	Bypass valve closed
6/6/2012	11:18:02 AM	H2 valve opened
6/6/2012	11:18:02 AM	Bubbler valve opened
6/6/2012	11:18:02 AM	Helium MFC set to  0.000000
6/6/2012	11:18:02 AM	H2 MFC set to  500.000000
6/6/2012	11:18:02 AM	BCl3 MFC set to  0.000000
6/6/2012	11:18:02 AM	PH3 MFC set to  0.000000
6/6/2012	11:18:02 AM	SiCl4 MFC set to  0.000000
6/6/2012	11:18:02 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	11:18:02 AM	Tube furnace set to 950
6/6/2012	11:20:02 AM	Helium valve closed
6/6/2012	11:20:02 AM	BCl3 valve closed
6/6/2012	11:20:02 AM	PH3 valve closed
6/6/2012	11:20:02 AM	SiCl4 pre valve closed
6/6/2012	11:20:02 AM	SiCl4 post valve closed
6/6/2012	11:20:02 AM	Main Vac valve closed
6/6/2012	11:20:02 AM	Bypass valve closed
6/6/2012	11:20:02 AM	H2 valve opened
6/6/2012	11:20:02 AM	Bubbler valve opened
6/6/2012	11:20:02 AM	Helium MFC set to  0.000000
6/6/2012	11:20:02 AM	H2 MFC set to  500.000000
6/6/2012	11:20:02 AM	BCl3 MFC set to  0.000000
6/6/2012	11:20:02 AM	PH3 MFC set to  0.000000
6/6/2012	11:20:02 AM	SiCl4 MFC set to  0.000000
6/6/2012	11:20:02 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	11:20:02 AM	Tube furnace set to 900
6/6/2012	11:22:02 AM	Helium valve closed
6/6/2012	11:22:02 AM	BCl3 valve closed
6/6/2012	11:22:02 AM	PH3 valve closed
6/6/2012	11:22:03 AM	SiCl4 pre valve closed
6/6/2012	11:22:03 AM	SiCl4 post valve closed
6/6/2012	11:22:03 AM	Main Vac valve closed
6/6/2012	11:22:03 AM	Bypass valve closed
6/6/2012	11:22:03 AM	H2 valve opened
6/6/2012	11:22:03 AM	Bubbler valve opened
6/6/2012	11:22:03 AM	Helium MFC set to  0.000000
6/6/2012	11:22:03 AM	H2 MFC set to  500.000000
6/6/2012	11:22:03 AM	BCl3 MFC set to  0.000000
6/6/2012	11:22:03 AM	PH3 MFC set to  0.000000
6/6/2012	11:22:03 AM	SiCl4 MFC set to  0.000000
6/6/2012	11:22:03 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	11:22:03 AM	Tube furnace set to 850
6/6/2012	11:24:03 AM	H2 valve closed
6/6/2012	11:24:03 AM	BCl3 valve closed
6/6/2012	11:24:03 AM	PH3 valve closed
6/6/2012	11:24:03 AM	SiCl4 pre valve closed
6/6/2012	11:24:03 AM	SiCl4 post valve closed
6/6/2012	11:24:03 AM	Main Vac valve closed
6/6/2012	11:24:03 AM	Bypass valve closed
6/6/2012	11:24:03 AM	Helium valve opened
6/6/2012	11:24:03 AM	Bubbler valve opened
6/6/2012	11:24:03 AM	Helium MFC set to  500.000000
6/6/2012	11:24:03 AM	H2 MFC set to  0.000000
6/6/2012	11:24:03 AM	BCl3 MFC set to  0.000000
6/6/2012	11:24:03 AM	PH3 MFC set to  0.000000
6/6/2012	11:24:03 AM	SiCl4 MFC set to  0.000000
6/6/2012	11:24:03 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	11:24:03 AM	Tube furnace set to 800
6/6/2012	11:26:03 AM	H2 valve closed
6/6/2012	11:26:03 AM	BCl3 valve closed
6/6/2012	11:26:03 AM	PH3 valve closed
6/6/2012	11:26:03 AM	SiCl4 pre valve closed
6/6/2012	11:26:03 AM	SiCl4 post valve closed
6/6/2012	11:26:03 AM	Main Vac valve closed
6/6/2012	11:26:03 AM	Bypass valve closed
6/6/2012	11:26:03 AM	Helium valve opened
6/6/2012	11:26:03 AM	Bubbler valve opened
6/6/2012	11:26:03 AM	Helium MFC set to  500.000000
6/6/2012	11:26:03 AM	H2 MFC set to  0.000000
6/6/2012	11:26:03 AM	BCl3 MFC set to  0.000000
6/6/2012	11:26:03 AM	PH3 MFC set to  0.000000
6/6/2012	11:26:03 AM	SiCl4 MFC set to  0.000000
6/6/2012	11:26:03 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	11:26:03 AM	Tube furnace set to 750
6/6/2012	11:28:03 AM	H2 valve closed
6/6/2012	11:28:03 AM	BCl3 valve closed
6/6/2012	11:28:03 AM	PH3 valve closed
6/6/2012	11:28:03 AM	SiCl4 pre valve closed
6/6/2012	11:28:03 AM	SiCl4 post valve closed
6/6/2012	11:28:03 AM	Main Vac valve closed
6/6/2012	11:28:03 AM	Bypass valve closed
6/6/2012	11:28:03 AM	Helium valve opened
6/6/2012	11:28:03 AM	Bubbler valve opened
6/6/2012	11:28:03 AM	Helium MFC set to  500.000000
6/6/2012	11:28:03 AM	H2 MFC set to  0.000000
6/6/2012	11:28:03 AM	BCl3 MFC set to  0.000000
6/6/2012	11:28:03 AM	PH3 MFC set to  0.000000
6/6/2012	11:28:03 AM	SiCl4 MFC set to  0.000000
6/6/2012	11:28:03 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	11:28:03 AM	Tube furnace set to 0
6/6/2012	11:48:03 AM	Helium valve closed
6/6/2012	11:48:03 AM	H2 valve closed
6/6/2012	11:48:04 AM	BCl3 valve closed
6/6/2012	11:48:04 AM	PH3 valve closed
6/6/2012	11:48:04 AM	SiCl4 pre valve closed
6/6/2012	11:48:04 AM	SiCl4 post valve closed
6/6/2012	11:48:04 AM	Main Vac valve closed
6/6/2012	11:48:04 AM	Bypass valve closed
6/6/2012	11:48:04 AM	Bubbler valve closed
6/6/2012	11:48:04 AM	Helium MFC set to  0.000000
6/6/2012	11:48:04 AM	H2 MFC set to  0.000000
6/6/2012	11:48:04 AM	BCl3 MFC set to  0.000000
6/6/2012	11:48:04 AM	PH3 MFC set to  0.000000
6/6/2012	11:48:04 AM	SiCl4 MFC set to  0.000000
6/6/2012	11:48:04 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	11:48:04 AM	Tube furnace set to 0
6/6/2012	11:48:05 AM	Run finished at 11:48 AM
6/6/2012	11:57:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2012	11:57:16 AM	Recipe started at 11:57 AM
6/6/2012	11:57:16 AM	Helium valve closed
6/6/2012	11:57:16 AM	H2 valve closed
6/6/2012	11:57:16 AM	BCl3 valve closed
6/6/2012	11:57:16 AM	PH3 valve closed
6/6/2012	11:57:16 AM	SiCl4 pre valve closed
6/6/2012	11:57:16 AM	SiCl4 post valve closed
6/6/2012	11:57:16 AM	Main Vac valve closed
6/6/2012	11:57:16 AM	Bypass valve closed
6/6/2012	11:57:16 AM	Bubbler valve closed
6/6/2012	11:57:16 AM	Helium MFC set to  0.000000
6/6/2012	11:57:16 AM	H2 MFC set to  0.000000
6/6/2012	11:57:16 AM	BCl3 MFC set to  0.000000
6/6/2012	11:57:16 AM	PH3 MFC set to  0.000000
6/6/2012	11:57:16 AM	SiCl4 MFC set to  0.000000
6/6/2012	11:57:16 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	11:57:17 AM	Tube furnace set to 0
6/6/2012	11:57:20 AM	H2 valve closed
6/6/2012	11:57:20 AM	BCl3 valve closed
6/6/2012	11:57:20 AM	PH3 valve closed
6/6/2012	11:57:20 AM	SiCl4 pre valve closed
6/6/2012	11:57:20 AM	SiCl4 post valve closed
6/6/2012	11:57:20 AM	Main Vac valve closed
6/6/2012	11:57:20 AM	Bypass valve closed
6/6/2012	11:57:20 AM	Bubbler valve closed
6/6/2012	11:57:20 AM	Helium valve opened
6/6/2012	11:57:20 AM	Helium MFC set to  500.000000
6/6/2012	11:57:20 AM	H2 MFC set to  0.000000
6/6/2012	11:57:20 AM	BCl3 MFC set to  0.000000
6/6/2012	11:57:20 AM	PH3 MFC set to  0.000000
6/6/2012	11:57:20 AM	SiCl4 MFC set to  0.000000
6/6/2012	11:57:20 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	11:57:20 AM	Tube furnace set to 0
6/6/2012	11:57:21 AM	Helium valve closed
6/6/2012	11:57:21 AM	H2 valve closed
6/6/2012	11:57:21 AM	BCl3 valve closed
6/6/2012	11:57:21 AM	PH3 valve closed
6/6/2012	11:57:21 AM	SiCl4 pre valve closed
6/6/2012	11:57:21 AM	SiCl4 post valve closed
6/6/2012	11:57:21 AM	Main Vac valve closed
6/6/2012	11:57:21 AM	Bypass valve closed
6/6/2012	11:57:21 AM	Bubbler valve closed
6/6/2012	11:57:21 AM	Helium MFC set to  0.000000
6/6/2012	11:57:21 AM	H2 MFC set to  0.000000
6/6/2012	11:57:21 AM	BCl3 MFC set to  0.000000
6/6/2012	11:57:21 AM	PH3 MFC set to  0.000000
6/6/2012	11:57:21 AM	SiCl4 MFC set to  0.000000
6/6/2012	11:57:21 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	11:57:21 AM	Tube furnace set to 0
6/6/2012	11:57:22 AM	Run finished at 11:57 AM
6/6/2012	11:57:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2012	11:59:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/6/2012	11:59:45 AM	Recipe started at 11:59 AM
6/6/2012	11:59:45 AM	Helium valve closed
6/6/2012	11:59:45 AM	H2 valve closed
6/6/2012	11:59:45 AM	BCl3 valve closed
6/6/2012	11:59:45 AM	PH3 valve closed
6/6/2012	11:59:45 AM	SiCl4 pre valve closed
6/6/2012	11:59:45 AM	SiCl4 post valve closed
6/6/2012	11:59:45 AM	Main Vac valve closed
6/6/2012	11:59:45 AM	Bubbler valve closed
6/6/2012	11:59:45 AM	Bypass valve opened
6/6/2012	11:59:45 AM	Helium MFC set to  0.000000
6/6/2012	11:59:45 AM	H2 MFC set to  0.000000
6/6/2012	11:59:45 AM	BCl3 MFC set to  0.000000
6/6/2012	11:59:45 AM	PH3 MFC set to  0.000000
6/6/2012	11:59:45 AM	SiCl4 MFC set to  0.000000
6/6/2012	11:59:45 AM	Bypass solenoid MFC set to  0.000000
6/6/2012	11:59:45 AM	Tube furnace set to 0
6/6/2012	12:00:49 PM	Helium valve closed
6/6/2012	12:00:49 PM	H2 valve closed
6/6/2012	12:00:49 PM	BCl3 valve closed
6/6/2012	12:00:49 PM	PH3 valve closed
6/6/2012	12:00:49 PM	SiCl4 pre valve closed
6/6/2012	12:00:49 PM	SiCl4 post valve closed
6/6/2012	12:00:49 PM	Main Vac valve closed
6/6/2012	12:00:49 PM	Bubbler valve closed
6/6/2012	12:00:50 PM	Bypass valve opened
6/6/2012	12:00:50 PM	Helium MFC set to  0.000000
6/6/2012	12:00:50 PM	H2 MFC set to  0.000000
6/6/2012	12:00:50 PM	BCl3 MFC set to  0.000000
6/6/2012	12:00:50 PM	PH3 MFC set to  0.000000
6/6/2012	12:00:50 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:00:50 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:00:50 PM	Tube furnace set to 0
6/6/2012	12:01:50 PM	Helium valve closed
6/6/2012	12:01:50 PM	H2 valve closed
6/6/2012	12:01:50 PM	BCl3 valve closed
6/6/2012	12:01:50 PM	PH3 valve closed
6/6/2012	12:01:50 PM	SiCl4 pre valve closed
6/6/2012	12:01:50 PM	SiCl4 post valve closed
6/6/2012	12:01:50 PM	Bypass valve closed
6/6/2012	12:01:50 PM	Bubbler valve closed
6/6/2012	12:01:50 PM	Main Vac valve opened
6/6/2012	12:01:50 PM	Helium MFC set to  0.000000
6/6/2012	12:01:50 PM	H2 MFC set to  0.000000
6/6/2012	12:01:50 PM	BCl3 MFC set to  0.000000
6/6/2012	12:01:50 PM	PH3 MFC set to  0.000000
6/6/2012	12:01:50 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:01:50 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:01:50 PM	Tube furnace set to 0
6/6/2012	12:01:51 PM	Run finished at 12:01 PM
6/6/2012	12:01:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/6/2012	12:08:21 PM	Recipe started at 12:08 PM
6/6/2012	12:08:21 PM	Helium valve closed
6/6/2012	12:08:21 PM	H2 valve closed
6/6/2012	12:08:21 PM	BCl3 valve closed
6/6/2012	12:08:21 PM	PH3 valve closed
6/6/2012	12:08:21 PM	SiCl4 pre valve closed
6/6/2012	12:08:21 PM	SiCl4 post valve closed
6/6/2012	12:08:21 PM	Bypass valve closed
6/6/2012	12:08:21 PM	Bubbler valve closed
6/6/2012	12:08:21 PM	Main Vac valve opened
6/6/2012	12:08:21 PM	Helium MFC set to  0.000000
6/6/2012	12:08:21 PM	H2 MFC set to  0.000000
6/6/2012	12:08:21 PM	BCl3 MFC set to  0.000000
6/6/2012	12:08:21 PM	PH3 MFC set to  0.000000
6/6/2012	12:08:21 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:08:21 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:08:21 PM	Tube furnace set to 0
6/6/2012	12:08:51 PM	H2 valve closed
6/6/2012	12:08:51 PM	BCl3 valve closed
6/6/2012	12:08:51 PM	PH3 valve closed
6/6/2012	12:08:51 PM	SiCl4 pre valve closed
6/6/2012	12:08:51 PM	SiCl4 post valve closed
6/6/2012	12:08:51 PM	Bypass valve closed
6/6/2012	12:08:51 PM	Bubbler valve closed
6/6/2012	12:08:51 PM	Helium valve opened
6/6/2012	12:08:51 PM	Main Vac valve opened
6/6/2012	12:08:51 PM	Helium MFC set to  20.000000
6/6/2012	12:08:51 PM	H2 MFC set to  0.000000
6/6/2012	12:08:51 PM	BCl3 MFC set to  0.000000
6/6/2012	12:08:51 PM	PH3 MFC set to  0.000000
6/6/2012	12:08:51 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:08:51 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:08:51 PM	Tube furnace set to 0
6/6/2012	12:09:22 PM	Helium valve closed
6/6/2012	12:09:22 PM	H2 valve closed
6/6/2012	12:09:22 PM	BCl3 valve closed
6/6/2012	12:09:22 PM	PH3 valve closed
6/6/2012	12:09:22 PM	SiCl4 pre valve closed
6/6/2012	12:09:22 PM	SiCl4 post valve closed
6/6/2012	12:09:22 PM	Bypass valve closed
6/6/2012	12:09:22 PM	Bubbler valve closed
6/6/2012	12:09:22 PM	Main Vac valve opened
6/6/2012	12:09:22 PM	Helium MFC set to  0.000000
6/6/2012	12:09:22 PM	H2 MFC set to  0.000000
6/6/2012	12:09:22 PM	BCl3 MFC set to  0.000000
6/6/2012	12:09:22 PM	PH3 MFC set to  0.000000
6/6/2012	12:09:22 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:09:22 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:09:22 PM	Tube furnace set to 0
6/6/2012	12:09:52 PM	H2 valve closed
6/6/2012	12:09:52 PM	BCl3 valve closed
6/6/2012	12:09:52 PM	PH3 valve closed
6/6/2012	12:09:52 PM	SiCl4 pre valve closed
6/6/2012	12:09:52 PM	SiCl4 post valve closed
6/6/2012	12:09:52 PM	Bypass valve closed
6/6/2012	12:09:52 PM	Bubbler valve closed
6/6/2012	12:09:52 PM	Helium valve opened
6/6/2012	12:09:52 PM	Main Vac valve opened
6/6/2012	12:09:52 PM	Helium MFC set to  20.000000
6/6/2012	12:09:52 PM	H2 MFC set to  0.000000
6/6/2012	12:09:52 PM	BCl3 MFC set to  0.000000
6/6/2012	12:09:52 PM	PH3 MFC set to  0.000000
6/6/2012	12:09:52 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:09:52 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:09:52 PM	Tube furnace set to 0
6/6/2012	12:10:22 PM	Helium valve closed
6/6/2012	12:10:22 PM	H2 valve closed
6/6/2012	12:10:22 PM	BCl3 valve closed
6/6/2012	12:10:22 PM	PH3 valve closed
6/6/2012	12:10:22 PM	SiCl4 pre valve closed
6/6/2012	12:10:22 PM	SiCl4 post valve closed
6/6/2012	12:10:22 PM	Bypass valve closed
6/6/2012	12:10:22 PM	Bubbler valve closed
6/6/2012	12:10:22 PM	Main Vac valve opened
6/6/2012	12:10:22 PM	Helium MFC set to  0.000000
6/6/2012	12:10:22 PM	H2 MFC set to  0.000000
6/6/2012	12:10:22 PM	BCl3 MFC set to  0.000000
6/6/2012	12:10:22 PM	PH3 MFC set to  0.000000
6/6/2012	12:10:22 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:10:22 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:10:22 PM	Tube furnace set to 0
6/6/2012	12:10:52 PM	H2 valve closed
6/6/2012	12:10:52 PM	BCl3 valve closed
6/6/2012	12:10:52 PM	PH3 valve closed
6/6/2012	12:10:52 PM	SiCl4 pre valve closed
6/6/2012	12:10:52 PM	SiCl4 post valve closed
6/6/2012	12:10:52 PM	Bypass valve closed
6/6/2012	12:10:52 PM	Bubbler valve closed
6/6/2012	12:10:52 PM	Helium valve opened
6/6/2012	12:10:52 PM	Main Vac valve opened
6/6/2012	12:10:52 PM	Helium MFC set to  20.000000
6/6/2012	12:10:52 PM	H2 MFC set to  0.000000
6/6/2012	12:10:52 PM	BCl3 MFC set to  0.000000
6/6/2012	12:10:52 PM	PH3 MFC set to  0.000000
6/6/2012	12:10:52 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:10:52 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:10:52 PM	Tube furnace set to 0
6/6/2012	12:11:22 PM	Helium valve closed
6/6/2012	12:11:22 PM	H2 valve closed
6/6/2012	12:11:22 PM	BCl3 valve closed
6/6/2012	12:11:22 PM	PH3 valve closed
6/6/2012	12:11:22 PM	SiCl4 pre valve closed
6/6/2012	12:11:22 PM	SiCl4 post valve closed
6/6/2012	12:11:22 PM	Bypass valve closed
6/6/2012	12:11:22 PM	Bubbler valve closed
6/6/2012	12:11:22 PM	Main Vac valve opened
6/6/2012	12:11:23 PM	Helium MFC set to  0.000000
6/6/2012	12:11:23 PM	H2 MFC set to  0.000000
6/6/2012	12:11:23 PM	BCl3 MFC set to  0.000000
6/6/2012	12:11:23 PM	PH3 MFC set to  0.000000
6/6/2012	12:11:23 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:11:23 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:11:23 PM	Tube furnace set to 0
6/6/2012	12:11:53 PM	H2 valve closed
6/6/2012	12:11:53 PM	BCl3 valve closed
6/6/2012	12:11:53 PM	PH3 valve closed
6/6/2012	12:11:53 PM	SiCl4 pre valve closed
6/6/2012	12:11:53 PM	SiCl4 post valve closed
6/6/2012	12:11:53 PM	Bypass valve closed
6/6/2012	12:11:53 PM	Bubbler valve closed
6/6/2012	12:11:53 PM	Helium valve opened
6/6/2012	12:11:53 PM	Main Vac valve opened
6/6/2012	12:11:53 PM	Helium MFC set to  20.000000
6/6/2012	12:11:53 PM	H2 MFC set to  0.000000
6/6/2012	12:11:53 PM	BCl3 MFC set to  0.000000
6/6/2012	12:11:53 PM	PH3 MFC set to  0.000000
6/6/2012	12:11:53 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:11:53 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:11:53 PM	Tube furnace set to 0
6/6/2012	12:12:23 PM	Helium valve closed
6/6/2012	12:12:23 PM	H2 valve closed
6/6/2012	12:12:23 PM	BCl3 valve closed
6/6/2012	12:12:23 PM	PH3 valve closed
6/6/2012	12:12:23 PM	SiCl4 pre valve closed
6/6/2012	12:12:23 PM	SiCl4 post valve closed
6/6/2012	12:12:23 PM	Bypass valve closed
6/6/2012	12:12:23 PM	Bubbler valve closed
6/6/2012	12:12:23 PM	Main Vac valve opened
6/6/2012	12:12:23 PM	Helium MFC set to  0.000000
6/6/2012	12:12:23 PM	H2 MFC set to  0.000000
6/6/2012	12:12:23 PM	BCl3 MFC set to  0.000000
6/6/2012	12:12:23 PM	PH3 MFC set to  0.000000
6/6/2012	12:12:23 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:12:23 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:12:23 PM	Tube furnace set to 0
6/6/2012	12:12:53 PM	H2 valve closed
6/6/2012	12:12:53 PM	BCl3 valve closed
6/6/2012	12:12:53 PM	PH3 valve closed
6/6/2012	12:12:53 PM	SiCl4 pre valve closed
6/6/2012	12:12:53 PM	SiCl4 post valve closed
6/6/2012	12:12:53 PM	Bypass valve closed
6/6/2012	12:12:53 PM	Bubbler valve closed
6/6/2012	12:12:53 PM	Helium valve opened
6/6/2012	12:12:53 PM	Main Vac valve opened
6/6/2012	12:12:53 PM	Helium MFC set to  20.000000
6/6/2012	12:12:53 PM	H2 MFC set to  0.000000
6/6/2012	12:12:53 PM	BCl3 MFC set to  0.000000
6/6/2012	12:12:53 PM	PH3 MFC set to  0.000000
6/6/2012	12:12:53 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:12:53 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:12:53 PM	Tube furnace set to 0
6/6/2012	12:13:23 PM	Helium valve closed
6/6/2012	12:13:23 PM	H2 valve closed
6/6/2012	12:13:23 PM	BCl3 valve closed
6/6/2012	12:13:23 PM	PH3 valve closed
6/6/2012	12:13:23 PM	SiCl4 pre valve closed
6/6/2012	12:13:23 PM	SiCl4 post valve closed
6/6/2012	12:13:23 PM	Bypass valve closed
6/6/2012	12:13:23 PM	Bubbler valve closed
6/6/2012	12:13:23 PM	Main Vac valve opened
6/6/2012	12:13:23 PM	Helium MFC set to  0.000000
6/6/2012	12:13:23 PM	H2 MFC set to  0.000000
6/6/2012	12:13:23 PM	BCl3 MFC set to  0.000000
6/6/2012	12:13:23 PM	PH3 MFC set to  0.000000
6/6/2012	12:13:23 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:13:23 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:13:24 PM	Tube furnace set to 0
6/6/2012	12:13:54 PM	H2 valve closed
6/6/2012	12:13:54 PM	BCl3 valve closed
6/6/2012	12:13:54 PM	PH3 valve closed
6/6/2012	12:13:54 PM	SiCl4 pre valve closed
6/6/2012	12:13:54 PM	SiCl4 post valve closed
6/6/2012	12:13:54 PM	Bypass valve closed
6/6/2012	12:13:54 PM	Bubbler valve closed
6/6/2012	12:13:54 PM	Helium valve opened
6/6/2012	12:13:54 PM	Main Vac valve opened
6/6/2012	12:13:54 PM	Helium MFC set to  20.000000
6/6/2012	12:13:54 PM	H2 MFC set to  0.000000
6/6/2012	12:13:54 PM	BCl3 MFC set to  0.000000
6/6/2012	12:13:54 PM	PH3 MFC set to  0.000000
6/6/2012	12:13:54 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:13:54 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:13:54 PM	Tube furnace set to 0
6/6/2012	12:14:24 PM	Helium valve closed
6/6/2012	12:14:24 PM	H2 valve closed
6/6/2012	12:14:24 PM	BCl3 valve closed
6/6/2012	12:14:24 PM	PH3 valve closed
6/6/2012	12:14:24 PM	SiCl4 pre valve closed
6/6/2012	12:14:24 PM	SiCl4 post valve closed
6/6/2012	12:14:24 PM	Bypass valve closed
6/6/2012	12:14:24 PM	Bubbler valve closed
6/6/2012	12:14:24 PM	Main Vac valve opened
6/6/2012	12:14:24 PM	Helium MFC set to  0.000000
6/6/2012	12:14:24 PM	H2 MFC set to  0.000000
6/6/2012	12:14:24 PM	BCl3 MFC set to  0.000000
6/6/2012	12:14:24 PM	PH3 MFC set to  0.000000
6/6/2012	12:14:24 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:14:24 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:14:24 PM	Tube furnace set to 0
6/6/2012	12:14:54 PM	H2 valve closed
6/6/2012	12:14:54 PM	BCl3 valve closed
6/6/2012	12:14:54 PM	PH3 valve closed
6/6/2012	12:14:54 PM	SiCl4 pre valve closed
6/6/2012	12:14:54 PM	SiCl4 post valve closed
6/6/2012	12:14:54 PM	Bypass valve closed
6/6/2012	12:14:54 PM	Bubbler valve closed
6/6/2012	12:14:54 PM	Helium valve opened
6/6/2012	12:14:54 PM	Main Vac valve opened
6/6/2012	12:14:54 PM	Helium MFC set to  20.000000
6/6/2012	12:14:54 PM	H2 MFC set to  0.000000
6/6/2012	12:14:54 PM	BCl3 MFC set to  0.000000
6/6/2012	12:14:54 PM	PH3 MFC set to  0.000000
6/6/2012	12:14:54 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:14:54 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:14:54 PM	Tube furnace set to 0
6/6/2012	12:15:24 PM	Helium valve closed
6/6/2012	12:15:24 PM	H2 valve closed
6/6/2012	12:15:24 PM	BCl3 valve closed
6/6/2012	12:15:24 PM	PH3 valve closed
6/6/2012	12:15:24 PM	SiCl4 pre valve closed
6/6/2012	12:15:24 PM	SiCl4 post valve closed
6/6/2012	12:15:24 PM	Bypass valve closed
6/6/2012	12:15:24 PM	Bubbler valve closed
6/6/2012	12:15:24 PM	Main Vac valve opened
6/6/2012	12:15:24 PM	Helium MFC set to  0.000000
6/6/2012	12:15:24 PM	H2 MFC set to  0.000000
6/6/2012	12:15:24 PM	BCl3 MFC set to  0.000000
6/6/2012	12:15:24 PM	PH3 MFC set to  0.000000
6/6/2012	12:15:24 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:15:24 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:15:25 PM	Tube furnace set to 0
6/6/2012	12:15:55 PM	H2 valve closed
6/6/2012	12:15:55 PM	BCl3 valve closed
6/6/2012	12:15:55 PM	PH3 valve closed
6/6/2012	12:15:55 PM	SiCl4 pre valve closed
6/6/2012	12:15:55 PM	SiCl4 post valve closed
6/6/2012	12:15:55 PM	Bypass valve closed
6/6/2012	12:15:55 PM	Bubbler valve closed
6/6/2012	12:15:55 PM	Helium valve opened
6/6/2012	12:15:55 PM	Main Vac valve opened
6/6/2012	12:15:55 PM	Helium MFC set to  20.000000
6/6/2012	12:15:55 PM	H2 MFC set to  0.000000
6/6/2012	12:15:55 PM	BCl3 MFC set to  0.000000
6/6/2012	12:15:55 PM	PH3 MFC set to  0.000000
6/6/2012	12:15:55 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:15:55 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:15:55 PM	Tube furnace set to 0
6/6/2012	12:16:25 PM	Helium valve closed
6/6/2012	12:16:25 PM	H2 valve closed
6/6/2012	12:16:25 PM	BCl3 valve closed
6/6/2012	12:16:25 PM	PH3 valve closed
6/6/2012	12:16:25 PM	SiCl4 pre valve closed
6/6/2012	12:16:25 PM	SiCl4 post valve closed
6/6/2012	12:16:25 PM	Bypass valve closed
6/6/2012	12:16:25 PM	Bubbler valve closed
6/6/2012	12:16:25 PM	Main Vac valve opened
6/6/2012	12:16:25 PM	Helium MFC set to  0.000000
6/6/2012	12:16:25 PM	H2 MFC set to  0.000000
6/6/2012	12:16:25 PM	BCl3 MFC set to  0.000000
6/6/2012	12:16:25 PM	PH3 MFC set to  0.000000
6/6/2012	12:16:25 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:16:25 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:16:25 PM	Tube furnace set to 0
6/6/2012	12:16:55 PM	H2 valve closed
6/6/2012	12:16:55 PM	BCl3 valve closed
6/6/2012	12:16:55 PM	PH3 valve closed
6/6/2012	12:16:55 PM	SiCl4 pre valve closed
6/6/2012	12:16:55 PM	SiCl4 post valve closed
6/6/2012	12:16:55 PM	Bypass valve closed
6/6/2012	12:16:55 PM	Bubbler valve closed
6/6/2012	12:16:55 PM	Helium valve opened
6/6/2012	12:16:55 PM	Main Vac valve opened
6/6/2012	12:16:55 PM	Helium MFC set to  20.000000
6/6/2012	12:16:55 PM	H2 MFC set to  0.000000
6/6/2012	12:16:55 PM	BCl3 MFC set to  0.000000
6/6/2012	12:16:55 PM	PH3 MFC set to  0.000000
6/6/2012	12:16:55 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:16:55 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:16:55 PM	Tube furnace set to 0
6/6/2012	12:17:25 PM	Helium valve closed
6/6/2012	12:17:25 PM	H2 valve closed
6/6/2012	12:17:25 PM	BCl3 valve closed
6/6/2012	12:17:25 PM	PH3 valve closed
6/6/2012	12:17:25 PM	SiCl4 pre valve closed
6/6/2012	12:17:25 PM	SiCl4 post valve closed
6/6/2012	12:17:25 PM	Bypass valve closed
6/6/2012	12:17:25 PM	Bubbler valve closed
6/6/2012	12:17:25 PM	Main Vac valve opened
6/6/2012	12:17:25 PM	Helium MFC set to  0.000000
6/6/2012	12:17:25 PM	H2 MFC set to  0.000000
6/6/2012	12:17:25 PM	BCl3 MFC set to  0.000000
6/6/2012	12:17:25 PM	PH3 MFC set to  0.000000
6/6/2012	12:17:25 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:17:25 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:17:26 PM	Tube furnace set to 200
6/6/2012	12:17:56 PM	H2 valve closed
6/6/2012	12:17:56 PM	BCl3 valve closed
6/6/2012	12:17:56 PM	PH3 valve closed
6/6/2012	12:17:56 PM	SiCl4 pre valve closed
6/6/2012	12:17:56 PM	SiCl4 post valve closed
6/6/2012	12:17:56 PM	Bypass valve closed
6/6/2012	12:17:56 PM	Bubbler valve closed
6/6/2012	12:17:56 PM	Helium valve opened
6/6/2012	12:17:56 PM	Main Vac valve opened
6/6/2012	12:17:56 PM	Helium MFC set to  20.000000
6/6/2012	12:17:56 PM	H2 MFC set to  0.000000
6/6/2012	12:17:56 PM	BCl3 MFC set to  0.000000
6/6/2012	12:17:56 PM	PH3 MFC set to  0.000000
6/6/2012	12:17:56 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:17:56 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:17:56 PM	Tube furnace set to 200
6/6/2012	12:18:26 PM	Helium valve closed
6/6/2012	12:18:26 PM	H2 valve closed
6/6/2012	12:18:26 PM	BCl3 valve closed
6/6/2012	12:18:26 PM	PH3 valve closed
6/6/2012	12:18:26 PM	SiCl4 pre valve closed
6/6/2012	12:18:26 PM	SiCl4 post valve closed
6/6/2012	12:18:26 PM	Bypass valve closed
6/6/2012	12:18:26 PM	Bubbler valve closed
6/6/2012	12:18:26 PM	Main Vac valve opened
6/6/2012	12:18:26 PM	Helium MFC set to  0.000000
6/6/2012	12:18:26 PM	H2 MFC set to  0.000000
6/6/2012	12:18:26 PM	BCl3 MFC set to  0.000000
6/6/2012	12:18:26 PM	PH3 MFC set to  0.000000
6/6/2012	12:18:26 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:18:26 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:18:26 PM	Tube furnace set to 200
6/6/2012	12:18:56 PM	H2 valve closed
6/6/2012	12:18:56 PM	BCl3 valve closed
6/6/2012	12:18:56 PM	PH3 valve closed
6/6/2012	12:18:56 PM	SiCl4 pre valve closed
6/6/2012	12:18:56 PM	SiCl4 post valve closed
6/6/2012	12:18:56 PM	Bypass valve closed
6/6/2012	12:18:56 PM	Bubbler valve closed
6/6/2012	12:18:56 PM	Helium valve opened
6/6/2012	12:18:56 PM	Main Vac valve opened
6/6/2012	12:18:56 PM	Helium MFC set to  20.000000
6/6/2012	12:18:56 PM	H2 MFC set to  0.000000
6/6/2012	12:18:56 PM	BCl3 MFC set to  0.000000
6/6/2012	12:18:56 PM	PH3 MFC set to  0.000000
6/6/2012	12:18:56 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:18:56 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:18:56 PM	Tube furnace set to 200
6/6/2012	12:19:26 PM	Helium valve closed
6/6/2012	12:19:26 PM	H2 valve closed
6/6/2012	12:19:26 PM	BCl3 valve closed
6/6/2012	12:19:26 PM	PH3 valve closed
6/6/2012	12:19:26 PM	SiCl4 pre valve closed
6/6/2012	12:19:26 PM	SiCl4 post valve closed
6/6/2012	12:19:26 PM	Bypass valve closed
6/6/2012	12:19:26 PM	Bubbler valve closed
6/6/2012	12:19:26 PM	Main Vac valve opened
6/6/2012	12:19:26 PM	Helium MFC set to  0.000000
6/6/2012	12:19:26 PM	H2 MFC set to  0.000000
6/6/2012	12:19:26 PM	BCl3 MFC set to  0.000000
6/6/2012	12:19:26 PM	PH3 MFC set to  0.000000
6/6/2012	12:19:26 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:19:26 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:19:26 PM	Tube furnace set to 200
6/6/2012	12:19:56 PM	H2 valve closed
6/6/2012	12:19:56 PM	BCl3 valve closed
6/6/2012	12:19:56 PM	PH3 valve closed
6/6/2012	12:19:56 PM	SiCl4 pre valve closed
6/6/2012	12:19:56 PM	SiCl4 post valve closed
6/6/2012	12:19:56 PM	Bypass valve closed
6/6/2012	12:19:56 PM	Bubbler valve closed
6/6/2012	12:19:57 PM	Helium valve opened
6/6/2012	12:19:57 PM	Main Vac valve opened
6/6/2012	12:19:57 PM	Helium MFC set to  20.000000
6/6/2012	12:19:57 PM	H2 MFC set to  0.000000
6/6/2012	12:19:57 PM	BCl3 MFC set to  0.000000
6/6/2012	12:19:57 PM	PH3 MFC set to  0.000000
6/6/2012	12:19:57 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:19:57 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:19:57 PM	Tube furnace set to 200
6/6/2012	12:20:27 PM	Helium valve closed
6/6/2012	12:20:27 PM	H2 valve closed
6/6/2012	12:20:27 PM	BCl3 valve closed
6/6/2012	12:20:27 PM	PH3 valve closed
6/6/2012	12:20:27 PM	SiCl4 pre valve closed
6/6/2012	12:20:27 PM	SiCl4 post valve closed
6/6/2012	12:20:27 PM	Bypass valve closed
6/6/2012	12:20:27 PM	Bubbler valve closed
6/6/2012	12:20:27 PM	Main Vac valve opened
6/6/2012	12:20:27 PM	Helium MFC set to  0.000000
6/6/2012	12:20:27 PM	H2 MFC set to  0.000000
6/6/2012	12:20:27 PM	BCl3 MFC set to  0.000000
6/6/2012	12:20:27 PM	PH3 MFC set to  0.000000
6/6/2012	12:20:27 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:20:27 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:20:27 PM	Tube furnace set to 200
6/6/2012	12:20:57 PM	H2 valve closed
6/6/2012	12:20:57 PM	BCl3 valve closed
6/6/2012	12:20:57 PM	PH3 valve closed
6/6/2012	12:20:57 PM	SiCl4 pre valve closed
6/6/2012	12:20:57 PM	SiCl4 post valve closed
6/6/2012	12:20:57 PM	Bypass valve closed
6/6/2012	12:20:57 PM	Bubbler valve closed
6/6/2012	12:20:57 PM	Helium valve opened
6/6/2012	12:20:57 PM	Main Vac valve opened
6/6/2012	12:20:57 PM	Helium MFC set to  20.000000
6/6/2012	12:20:57 PM	H2 MFC set to  0.000000
6/6/2012	12:20:57 PM	BCl3 MFC set to  0.000000
6/6/2012	12:20:57 PM	PH3 MFC set to  0.000000
6/6/2012	12:20:57 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:20:57 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:20:57 PM	Tube furnace set to 200
6/6/2012	12:21:27 PM	Helium valve closed
6/6/2012	12:21:27 PM	H2 valve closed
6/6/2012	12:21:27 PM	BCl3 valve closed
6/6/2012	12:21:27 PM	PH3 valve closed
6/6/2012	12:21:27 PM	SiCl4 pre valve closed
6/6/2012	12:21:27 PM	SiCl4 post valve closed
6/6/2012	12:21:27 PM	Bypass valve closed
6/6/2012	12:21:27 PM	Bubbler valve closed
6/6/2012	12:21:27 PM	Main Vac valve opened
6/6/2012	12:21:27 PM	Helium MFC set to  0.000000
6/6/2012	12:21:27 PM	H2 MFC set to  0.000000
6/6/2012	12:21:27 PM	BCl3 MFC set to  0.000000
6/6/2012	12:21:27 PM	PH3 MFC set to  0.000000
6/6/2012	12:21:27 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:21:27 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:21:27 PM	Tube furnace set to 200
6/6/2012	12:21:57 PM	H2 valve closed
6/6/2012	12:21:57 PM	BCl3 valve closed
6/6/2012	12:21:57 PM	PH3 valve closed
6/6/2012	12:21:57 PM	SiCl4 pre valve closed
6/6/2012	12:21:57 PM	SiCl4 post valve closed
6/6/2012	12:21:57 PM	Bypass valve closed
6/6/2012	12:21:57 PM	Bubbler valve closed
6/6/2012	12:21:57 PM	Helium valve opened
6/6/2012	12:21:57 PM	Main Vac valve opened
6/6/2012	12:21:57 PM	Helium MFC set to  20.000000
6/6/2012	12:21:57 PM	H2 MFC set to  0.000000
6/6/2012	12:21:57 PM	BCl3 MFC set to  0.000000
6/6/2012	12:21:57 PM	PH3 MFC set to  0.000000
6/6/2012	12:21:57 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:21:57 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:21:58 PM	Tube furnace set to 200
6/6/2012	12:22:28 PM	Helium valve closed
6/6/2012	12:22:28 PM	H2 valve closed
6/6/2012	12:22:28 PM	BCl3 valve closed
6/6/2012	12:22:28 PM	PH3 valve closed
6/6/2012	12:22:28 PM	SiCl4 pre valve closed
6/6/2012	12:22:28 PM	SiCl4 post valve closed
6/6/2012	12:22:28 PM	Bypass valve closed
6/6/2012	12:22:28 PM	Bubbler valve closed
6/6/2012	12:22:28 PM	Main Vac valve opened
6/6/2012	12:22:28 PM	Helium MFC set to  0.000000
6/6/2012	12:22:28 PM	H2 MFC set to  0.000000
6/6/2012	12:22:28 PM	BCl3 MFC set to  0.000000
6/6/2012	12:22:28 PM	PH3 MFC set to  0.000000
6/6/2012	12:22:28 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:22:28 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:22:28 PM	Tube furnace set to 200
6/6/2012	12:22:58 PM	H2 valve closed
6/6/2012	12:22:58 PM	BCl3 valve closed
6/6/2012	12:22:58 PM	PH3 valve closed
6/6/2012	12:22:58 PM	SiCl4 pre valve closed
6/6/2012	12:22:58 PM	SiCl4 post valve closed
6/6/2012	12:22:58 PM	Bypass valve closed
6/6/2012	12:22:58 PM	Bubbler valve closed
6/6/2012	12:22:58 PM	Helium valve opened
6/6/2012	12:22:58 PM	Main Vac valve opened
6/6/2012	12:22:58 PM	Helium MFC set to  20.000000
6/6/2012	12:22:58 PM	H2 MFC set to  0.000000
6/6/2012	12:22:58 PM	BCl3 MFC set to  0.000000
6/6/2012	12:22:58 PM	PH3 MFC set to  0.000000
6/6/2012	12:22:58 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:22:58 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:22:58 PM	Tube furnace set to 200
6/6/2012	12:23:28 PM	Helium valve closed
6/6/2012	12:23:28 PM	H2 valve closed
6/6/2012	12:23:28 PM	BCl3 valve closed
6/6/2012	12:23:28 PM	PH3 valve closed
6/6/2012	12:23:28 PM	SiCl4 pre valve closed
6/6/2012	12:23:28 PM	SiCl4 post valve closed
6/6/2012	12:23:28 PM	Bypass valve closed
6/6/2012	12:23:28 PM	Bubbler valve closed
6/6/2012	12:23:28 PM	Main Vac valve opened
6/6/2012	12:23:28 PM	Helium MFC set to  0.000000
6/6/2012	12:23:28 PM	H2 MFC set to  0.000000
6/6/2012	12:23:28 PM	BCl3 MFC set to  0.000000
6/6/2012	12:23:28 PM	PH3 MFC set to  0.000000
6/6/2012	12:23:28 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:23:28 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:23:28 PM	Tube furnace set to 0
6/6/2012	12:23:29 PM	Run finished at 12:23 PM
6/6/2012	12:35:35 PM	Recipe started at 12:35 PM
6/6/2012	12:35:35 PM	Helium valve closed
6/6/2012	12:35:35 PM	H2 valve closed
6/6/2012	12:35:35 PM	BCl3 valve closed
6/6/2012	12:35:35 PM	PH3 valve closed
6/6/2012	12:35:35 PM	SiCl4 pre valve closed
6/6/2012	12:35:35 PM	SiCl4 post valve closed
6/6/2012	12:35:35 PM	Bypass valve closed
6/6/2012	12:35:35 PM	Bubbler valve closed
6/6/2012	12:35:35 PM	Main Vac valve opened
6/6/2012	12:35:35 PM	Helium MFC set to  0.000000
6/6/2012	12:35:35 PM	H2 MFC set to  0.000000
6/6/2012	12:35:35 PM	BCl3 MFC set to  0.000000
6/6/2012	12:35:35 PM	PH3 MFC set to  0.000000
6/6/2012	12:35:35 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:35:35 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:35:35 PM	Tube furnace set to 0
6/6/2012	12:36:05 PM	H2 valve closed
6/6/2012	12:36:05 PM	BCl3 valve closed
6/6/2012	12:36:05 PM	PH3 valve closed
6/6/2012	12:36:05 PM	SiCl4 pre valve closed
6/6/2012	12:36:05 PM	SiCl4 post valve closed
6/6/2012	12:36:05 PM	Bypass valve closed
6/6/2012	12:36:05 PM	Bubbler valve closed
6/6/2012	12:36:05 PM	Helium valve opened
6/6/2012	12:36:05 PM	Main Vac valve opened
6/6/2012	12:36:05 PM	Helium MFC set to  20.000000
6/6/2012	12:36:05 PM	H2 MFC set to  0.000000
6/6/2012	12:36:05 PM	BCl3 MFC set to  0.000000
6/6/2012	12:36:05 PM	PH3 MFC set to  0.000000
6/6/2012	12:36:05 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:36:05 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:36:06 PM	Tube furnace set to 0
6/6/2012	12:36:36 PM	Helium valve closed
6/6/2012	12:36:36 PM	H2 valve closed
6/6/2012	12:36:36 PM	BCl3 valve closed
6/6/2012	12:36:36 PM	PH3 valve closed
6/6/2012	12:36:36 PM	SiCl4 pre valve closed
6/6/2012	12:36:36 PM	SiCl4 post valve closed
6/6/2012	12:36:36 PM	Bypass valve closed
6/6/2012	12:36:36 PM	Bubbler valve closed
6/6/2012	12:36:36 PM	Main Vac valve opened
6/6/2012	12:36:36 PM	Helium MFC set to  0.000000
6/6/2012	12:36:36 PM	H2 MFC set to  0.000000
6/6/2012	12:36:36 PM	BCl3 MFC set to  0.000000
6/6/2012	12:36:36 PM	PH3 MFC set to  0.000000
6/6/2012	12:36:36 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:36:36 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:36:36 PM	Tube furnace set to 0
6/6/2012	12:37:06 PM	H2 valve closed
6/6/2012	12:37:06 PM	BCl3 valve closed
6/6/2012	12:37:06 PM	PH3 valve closed
6/6/2012	12:37:06 PM	SiCl4 pre valve closed
6/6/2012	12:37:06 PM	SiCl4 post valve closed
6/6/2012	12:37:06 PM	Bypass valve closed
6/6/2012	12:37:06 PM	Bubbler valve closed
6/6/2012	12:37:06 PM	Helium valve opened
6/6/2012	12:37:06 PM	Main Vac valve opened
6/6/2012	12:37:06 PM	Helium MFC set to  20.000000
6/6/2012	12:37:06 PM	H2 MFC set to  0.000000
6/6/2012	12:37:06 PM	BCl3 MFC set to  0.000000
6/6/2012	12:37:06 PM	PH3 MFC set to  0.000000
6/6/2012	12:37:06 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:37:06 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:37:06 PM	Tube furnace set to 0
6/6/2012	12:37:36 PM	Helium valve closed
6/6/2012	12:37:36 PM	H2 valve closed
6/6/2012	12:37:36 PM	BCl3 valve closed
6/6/2012	12:37:36 PM	PH3 valve closed
6/6/2012	12:37:36 PM	SiCl4 pre valve closed
6/6/2012	12:37:36 PM	SiCl4 post valve closed
6/6/2012	12:37:36 PM	Bypass valve closed
6/6/2012	12:37:36 PM	Bubbler valve closed
6/6/2012	12:37:36 PM	Main Vac valve opened
6/6/2012	12:37:36 PM	Helium MFC set to  0.000000
6/6/2012	12:37:36 PM	H2 MFC set to  0.000000
6/6/2012	12:37:36 PM	BCl3 MFC set to  0.000000
6/6/2012	12:37:36 PM	PH3 MFC set to  0.000000
6/6/2012	12:37:36 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:37:36 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:37:36 PM	Tube furnace set to 0
6/6/2012	12:38:06 PM	H2 valve closed
6/6/2012	12:38:06 PM	BCl3 valve closed
6/6/2012	12:38:06 PM	PH3 valve closed
6/6/2012	12:38:06 PM	SiCl4 pre valve closed
6/6/2012	12:38:06 PM	SiCl4 post valve closed
6/6/2012	12:38:06 PM	Bypass valve closed
6/6/2012	12:38:06 PM	Bubbler valve closed
6/6/2012	12:38:06 PM	Helium valve opened
6/6/2012	12:38:06 PM	Main Vac valve opened
6/6/2012	12:38:06 PM	Helium MFC set to  20.000000
6/6/2012	12:38:06 PM	H2 MFC set to  0.000000
6/6/2012	12:38:06 PM	BCl3 MFC set to  0.000000
6/6/2012	12:38:06 PM	PH3 MFC set to  0.000000
6/6/2012	12:38:06 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:38:06 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:38:07 PM	Tube furnace set to 0
6/6/2012	12:38:37 PM	Helium valve closed
6/6/2012	12:38:37 PM	H2 valve closed
6/6/2012	12:38:37 PM	BCl3 valve closed
6/6/2012	12:38:37 PM	PH3 valve closed
6/6/2012	12:38:37 PM	SiCl4 pre valve closed
6/6/2012	12:38:37 PM	SiCl4 post valve closed
6/6/2012	12:38:37 PM	Bypass valve closed
6/6/2012	12:38:37 PM	Bubbler valve closed
6/6/2012	12:38:37 PM	Main Vac valve opened
6/6/2012	12:38:37 PM	Helium MFC set to  0.000000
6/6/2012	12:38:37 PM	H2 MFC set to  0.000000
6/6/2012	12:38:37 PM	BCl3 MFC set to  0.000000
6/6/2012	12:38:37 PM	PH3 MFC set to  0.000000
6/6/2012	12:38:37 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:38:37 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:38:37 PM	Tube furnace set to 0
6/6/2012	12:39:07 PM	H2 valve closed
6/6/2012	12:39:07 PM	BCl3 valve closed
6/6/2012	12:39:07 PM	PH3 valve closed
6/6/2012	12:39:07 PM	SiCl4 pre valve closed
6/6/2012	12:39:07 PM	SiCl4 post valve closed
6/6/2012	12:39:07 PM	Bypass valve closed
6/6/2012	12:39:07 PM	Bubbler valve closed
6/6/2012	12:39:07 PM	Helium valve opened
6/6/2012	12:39:07 PM	Main Vac valve opened
6/6/2012	12:39:07 PM	Helium MFC set to  20.000000
6/6/2012	12:39:07 PM	H2 MFC set to  0.000000
6/6/2012	12:39:07 PM	BCl3 MFC set to  0.000000
6/6/2012	12:39:07 PM	PH3 MFC set to  0.000000
6/6/2012	12:39:07 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:39:07 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:39:07 PM	Tube furnace set to 0
6/6/2012	12:39:37 PM	Helium valve closed
6/6/2012	12:39:37 PM	H2 valve closed
6/6/2012	12:39:37 PM	BCl3 valve closed
6/6/2012	12:39:37 PM	PH3 valve closed
6/6/2012	12:39:37 PM	SiCl4 pre valve closed
6/6/2012	12:39:37 PM	SiCl4 post valve closed
6/6/2012	12:39:37 PM	Bypass valve closed
6/6/2012	12:39:37 PM	Bubbler valve closed
6/6/2012	12:39:37 PM	Main Vac valve opened
6/6/2012	12:39:37 PM	Helium MFC set to  0.000000
6/6/2012	12:39:37 PM	H2 MFC set to  0.000000
6/6/2012	12:39:37 PM	BCl3 MFC set to  0.000000
6/6/2012	12:39:37 PM	PH3 MFC set to  0.000000
6/6/2012	12:39:37 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:39:37 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:39:37 PM	Tube furnace set to 0
6/6/2012	12:40:07 PM	H2 valve closed
6/6/2012	12:40:07 PM	BCl3 valve closed
6/6/2012	12:40:07 PM	PH3 valve closed
6/6/2012	12:40:07 PM	SiCl4 pre valve closed
6/6/2012	12:40:07 PM	SiCl4 post valve closed
6/6/2012	12:40:07 PM	Bypass valve closed
6/6/2012	12:40:07 PM	Bubbler valve closed
6/6/2012	12:40:07 PM	Helium valve opened
6/6/2012	12:40:07 PM	Main Vac valve opened
6/6/2012	12:40:07 PM	Helium MFC set to  20.000000
6/6/2012	12:40:07 PM	H2 MFC set to  0.000000
6/6/2012	12:40:07 PM	BCl3 MFC set to  0.000000
6/6/2012	12:40:07 PM	PH3 MFC set to  0.000000
6/6/2012	12:40:07 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:40:07 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:40:08 PM	Tube furnace set to 0
6/6/2012	12:40:38 PM	Helium valve closed
6/6/2012	12:40:38 PM	H2 valve closed
6/6/2012	12:40:38 PM	BCl3 valve closed
6/6/2012	12:40:38 PM	PH3 valve closed
6/6/2012	12:40:38 PM	SiCl4 pre valve closed
6/6/2012	12:40:38 PM	SiCl4 post valve closed
6/6/2012	12:40:38 PM	Bypass valve closed
6/6/2012	12:40:38 PM	Bubbler valve closed
6/6/2012	12:40:38 PM	Main Vac valve opened
6/6/2012	12:40:38 PM	Helium MFC set to  0.000000
6/6/2012	12:40:38 PM	H2 MFC set to  0.000000
6/6/2012	12:40:38 PM	BCl3 MFC set to  0.000000
6/6/2012	12:40:38 PM	PH3 MFC set to  0.000000
6/6/2012	12:40:38 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:40:38 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:40:38 PM	Tube furnace set to 0
6/6/2012	12:41:08 PM	H2 valve closed
6/6/2012	12:41:08 PM	BCl3 valve closed
6/6/2012	12:41:08 PM	PH3 valve closed
6/6/2012	12:41:08 PM	SiCl4 pre valve closed
6/6/2012	12:41:08 PM	SiCl4 post valve closed
6/6/2012	12:41:08 PM	Bypass valve closed
6/6/2012	12:41:08 PM	Bubbler valve closed
6/6/2012	12:41:08 PM	Helium valve opened
6/6/2012	12:41:08 PM	Main Vac valve opened
6/6/2012	12:41:08 PM	Helium MFC set to  20.000000
6/6/2012	12:41:08 PM	H2 MFC set to  0.000000
6/6/2012	12:41:08 PM	BCl3 MFC set to  0.000000
6/6/2012	12:41:08 PM	PH3 MFC set to  0.000000
6/6/2012	12:41:08 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:41:08 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:41:08 PM	Tube furnace set to 0
6/6/2012	12:41:38 PM	Helium valve closed
6/6/2012	12:41:38 PM	H2 valve closed
6/6/2012	12:41:38 PM	BCl3 valve closed
6/6/2012	12:41:38 PM	PH3 valve closed
6/6/2012	12:41:38 PM	SiCl4 pre valve closed
6/6/2012	12:41:38 PM	SiCl4 post valve closed
6/6/2012	12:41:38 PM	Bypass valve closed
6/6/2012	12:41:38 PM	Bubbler valve closed
6/6/2012	12:41:38 PM	Main Vac valve opened
6/6/2012	12:41:38 PM	Helium MFC set to  0.000000
6/6/2012	12:41:38 PM	H2 MFC set to  0.000000
6/6/2012	12:41:38 PM	BCl3 MFC set to  0.000000
6/6/2012	12:41:38 PM	PH3 MFC set to  0.000000
6/6/2012	12:41:38 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:41:38 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:41:38 PM	Tube furnace set to 0
6/6/2012	12:42:08 PM	H2 valve closed
6/6/2012	12:42:08 PM	BCl3 valve closed
6/6/2012	12:42:08 PM	PH3 valve closed
6/6/2012	12:42:08 PM	SiCl4 pre valve closed
6/6/2012	12:42:08 PM	SiCl4 post valve closed
6/6/2012	12:42:08 PM	Bypass valve closed
6/6/2012	12:42:08 PM	Bubbler valve closed
6/6/2012	12:42:08 PM	Helium valve opened
6/6/2012	12:42:08 PM	Main Vac valve opened
6/6/2012	12:42:08 PM	Helium MFC set to  20.000000
6/6/2012	12:42:08 PM	H2 MFC set to  0.000000
6/6/2012	12:42:08 PM	BCl3 MFC set to  0.000000
6/6/2012	12:42:08 PM	PH3 MFC set to  0.000000
6/6/2012	12:42:08 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:42:08 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:42:08 PM	Tube furnace set to 0
6/6/2012	12:42:38 PM	Helium valve closed
6/6/2012	12:42:38 PM	H2 valve closed
6/6/2012	12:42:39 PM	BCl3 valve closed
6/6/2012	12:42:39 PM	PH3 valve closed
6/6/2012	12:42:39 PM	SiCl4 pre valve closed
6/6/2012	12:42:39 PM	SiCl4 post valve closed
6/6/2012	12:42:39 PM	Bypass valve closed
6/6/2012	12:42:39 PM	Bubbler valve closed
6/6/2012	12:42:39 PM	Main Vac valve opened
6/6/2012	12:42:39 PM	Helium MFC set to  0.000000
6/6/2012	12:42:39 PM	H2 MFC set to  0.000000
6/6/2012	12:42:39 PM	BCl3 MFC set to  0.000000
6/6/2012	12:42:39 PM	PH3 MFC set to  0.000000
6/6/2012	12:42:39 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:42:39 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:42:39 PM	Tube furnace set to 0
6/6/2012	12:43:09 PM	H2 valve closed
6/6/2012	12:43:09 PM	BCl3 valve closed
6/6/2012	12:43:09 PM	PH3 valve closed
6/6/2012	12:43:09 PM	SiCl4 pre valve closed
6/6/2012	12:43:09 PM	SiCl4 post valve closed
6/6/2012	12:43:09 PM	Bypass valve closed
6/6/2012	12:43:09 PM	Bubbler valve closed
6/6/2012	12:43:09 PM	Helium valve opened
6/6/2012	12:43:09 PM	Main Vac valve opened
6/6/2012	12:43:09 PM	Helium MFC set to  20.000000
6/6/2012	12:43:09 PM	H2 MFC set to  0.000000
6/6/2012	12:43:09 PM	BCl3 MFC set to  0.000000
6/6/2012	12:43:09 PM	PH3 MFC set to  0.000000
6/6/2012	12:43:09 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:43:09 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:43:09 PM	Tube furnace set to 0
6/6/2012	12:43:39 PM	Helium valve closed
6/6/2012	12:43:39 PM	H2 valve closed
6/6/2012	12:43:39 PM	BCl3 valve closed
6/6/2012	12:43:39 PM	PH3 valve closed
6/6/2012	12:43:39 PM	SiCl4 pre valve closed
6/6/2012	12:43:39 PM	SiCl4 post valve closed
6/6/2012	12:43:39 PM	Bypass valve closed
6/6/2012	12:43:39 PM	Bubbler valve closed
6/6/2012	12:43:39 PM	Main Vac valve opened
6/6/2012	12:43:39 PM	Helium MFC set to  0.000000
6/6/2012	12:43:39 PM	H2 MFC set to  0.000000
6/6/2012	12:43:39 PM	BCl3 MFC set to  0.000000
6/6/2012	12:43:39 PM	PH3 MFC set to  0.000000
6/6/2012	12:43:39 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:43:39 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:43:39 PM	Tube furnace set to 0
6/6/2012	12:44:09 PM	H2 valve closed
6/6/2012	12:44:09 PM	BCl3 valve closed
6/6/2012	12:44:09 PM	PH3 valve closed
6/6/2012	12:44:09 PM	SiCl4 pre valve closed
6/6/2012	12:44:09 PM	SiCl4 post valve closed
6/6/2012	12:44:09 PM	Bypass valve closed
6/6/2012	12:44:09 PM	Bubbler valve closed
6/6/2012	12:44:09 PM	Helium valve opened
6/6/2012	12:44:09 PM	Main Vac valve opened
6/6/2012	12:44:09 PM	Helium MFC set to  20.000000
6/6/2012	12:44:09 PM	H2 MFC set to  0.000000
6/6/2012	12:44:09 PM	BCl3 MFC set to  0.000000
6/6/2012	12:44:09 PM	PH3 MFC set to  0.000000
6/6/2012	12:44:09 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:44:09 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:44:09 PM	Tube furnace set to 0
6/6/2012	12:44:39 PM	Helium valve closed
6/6/2012	12:44:39 PM	H2 valve closed
6/6/2012	12:44:39 PM	BCl3 valve closed
6/6/2012	12:44:39 PM	PH3 valve closed
6/6/2012	12:44:39 PM	SiCl4 pre valve closed
6/6/2012	12:44:39 PM	SiCl4 post valve closed
6/6/2012	12:44:39 PM	Bypass valve closed
6/6/2012	12:44:39 PM	Bubbler valve closed
6/6/2012	12:44:39 PM	Main Vac valve opened
6/6/2012	12:44:39 PM	Helium MFC set to  0.000000
6/6/2012	12:44:39 PM	H2 MFC set to  0.000000
6/6/2012	12:44:39 PM	BCl3 MFC set to  0.000000
6/6/2012	12:44:39 PM	PH3 MFC set to  0.000000
6/6/2012	12:44:39 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:44:39 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:44:40 PM	Tube furnace set to 200
6/6/2012	12:45:10 PM	H2 valve closed
6/6/2012	12:45:10 PM	BCl3 valve closed
6/6/2012	12:45:10 PM	PH3 valve closed
6/6/2012	12:45:10 PM	SiCl4 pre valve closed
6/6/2012	12:45:10 PM	SiCl4 post valve closed
6/6/2012	12:45:10 PM	Bypass valve closed
6/6/2012	12:45:10 PM	Bubbler valve closed
6/6/2012	12:45:10 PM	Helium valve opened
6/6/2012	12:45:10 PM	Main Vac valve opened
6/6/2012	12:45:10 PM	Helium MFC set to  20.000000
6/6/2012	12:45:10 PM	H2 MFC set to  0.000000
6/6/2012	12:45:10 PM	BCl3 MFC set to  0.000000
6/6/2012	12:45:10 PM	PH3 MFC set to  0.000000
6/6/2012	12:45:10 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:45:10 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:45:10 PM	Tube furnace set to 200
6/6/2012	12:45:36 PM	Helium valve closed
6/6/2012	12:45:36 PM	H2 valve closed
6/6/2012	12:45:36 PM	BCl3 valve closed
6/6/2012	12:45:36 PM	PH3 valve closed
6/6/2012	12:45:36 PM	SiCl4 pre valve closed
6/6/2012	12:45:36 PM	SiCl4 post valve closed
6/6/2012	12:45:36 PM	Bypass valve closed
6/6/2012	12:45:36 PM	Bubbler valve closed
6/6/2012	12:45:36 PM	Main Vac valve opened
6/6/2012	12:45:36 PM	Helium MFC set to  0.000000
6/6/2012	12:45:36 PM	H2 MFC set to  0.000000
6/6/2012	12:45:36 PM	BCl3 MFC set to  0.000000
6/6/2012	12:45:36 PM	PH3 MFC set to  0.000000
6/6/2012	12:45:36 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:45:36 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:45:37 PM	Tube furnace set to 200
6/6/2012	12:45:37 PM	H2 valve closed
6/6/2012	12:45:37 PM	BCl3 valve closed
6/6/2012	12:45:37 PM	PH3 valve closed
6/6/2012	12:45:37 PM	SiCl4 pre valve closed
6/6/2012	12:45:37 PM	SiCl4 post valve closed
6/6/2012	12:45:37 PM	Bypass valve closed
6/6/2012	12:45:37 PM	Bubbler valve closed
6/6/2012	12:45:37 PM	Helium valve opened
6/6/2012	12:45:37 PM	Main Vac valve opened
6/6/2012	12:45:37 PM	Helium MFC set to  20.000000
6/6/2012	12:45:37 PM	H2 MFC set to  0.000000
6/6/2012	12:45:37 PM	BCl3 MFC set to  0.000000
6/6/2012	12:45:37 PM	PH3 MFC set to  0.000000
6/6/2012	12:45:37 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:45:37 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:45:37 PM	Tube furnace set to 200
6/6/2012	12:46:07 PM	Helium valve closed
6/6/2012	12:46:07 PM	H2 valve closed
6/6/2012	12:46:07 PM	BCl3 valve closed
6/6/2012	12:46:07 PM	PH3 valve closed
6/6/2012	12:46:07 PM	SiCl4 pre valve closed
6/6/2012	12:46:07 PM	SiCl4 post valve closed
6/6/2012	12:46:07 PM	Bypass valve closed
6/6/2012	12:46:07 PM	Bubbler valve closed
6/6/2012	12:46:07 PM	Main Vac valve opened
6/6/2012	12:46:07 PM	Helium MFC set to  0.000000
6/6/2012	12:46:07 PM	H2 MFC set to  0.000000
6/6/2012	12:46:07 PM	BCl3 MFC set to  0.000000
6/6/2012	12:46:07 PM	PH3 MFC set to  0.000000
6/6/2012	12:46:07 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:46:07 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:46:08 PM	Tube furnace set to 200
6/6/2012	12:46:29 PM	H2 valve closed
6/6/2012	12:46:29 PM	BCl3 valve closed
6/6/2012	12:46:29 PM	PH3 valve closed
6/6/2012	12:46:29 PM	SiCl4 pre valve closed
6/6/2012	12:46:29 PM	SiCl4 post valve closed
6/6/2012	12:46:29 PM	Bypass valve closed
6/6/2012	12:46:29 PM	Bubbler valve closed
6/6/2012	12:46:29 PM	Helium valve opened
6/6/2012	12:46:29 PM	Main Vac valve opened
6/6/2012	12:46:29 PM	Helium MFC set to  20.000000
6/6/2012	12:46:29 PM	H2 MFC set to  0.000000
6/6/2012	12:46:29 PM	BCl3 MFC set to  0.000000
6/6/2012	12:46:29 PM	PH3 MFC set to  0.000000
6/6/2012	12:46:29 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:46:29 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:46:29 PM	Tube furnace set to 200
6/6/2012	12:46:30 PM	Helium valve closed
6/6/2012	12:46:30 PM	H2 valve closed
6/6/2012	12:46:30 PM	BCl3 valve closed
6/6/2012	12:46:30 PM	PH3 valve closed
6/6/2012	12:46:30 PM	SiCl4 pre valve closed
6/6/2012	12:46:30 PM	SiCl4 post valve closed
6/6/2012	12:46:30 PM	Bypass valve closed
6/6/2012	12:46:30 PM	Bubbler valve closed
6/6/2012	12:46:30 PM	Main Vac valve opened
6/6/2012	12:46:30 PM	Helium MFC set to  0.000000
6/6/2012	12:46:30 PM	H2 MFC set to  0.000000
6/6/2012	12:46:30 PM	BCl3 MFC set to  0.000000
6/6/2012	12:46:30 PM	PH3 MFC set to  0.000000
6/6/2012	12:46:30 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:46:30 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:46:30 PM	Tube furnace set to 200
6/6/2012	12:47:00 PM	H2 valve closed
6/6/2012	12:47:00 PM	BCl3 valve closed
6/6/2012	12:47:00 PM	PH3 valve closed
6/6/2012	12:47:00 PM	SiCl4 pre valve closed
6/6/2012	12:47:00 PM	SiCl4 post valve closed
6/6/2012	12:47:00 PM	Bypass valve closed
6/6/2012	12:47:00 PM	Bubbler valve closed
6/6/2012	12:47:00 PM	Helium valve opened
6/6/2012	12:47:00 PM	Main Vac valve opened
6/6/2012	12:47:00 PM	Helium MFC set to  20.000000
6/6/2012	12:47:00 PM	H2 MFC set to  0.000000
6/6/2012	12:47:00 PM	BCl3 MFC set to  0.000000
6/6/2012	12:47:00 PM	PH3 MFC set to  0.000000
6/6/2012	12:47:00 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:47:00 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:47:00 PM	Tube furnace set to 200
6/6/2012	12:47:30 PM	Helium valve closed
6/6/2012	12:47:30 PM	H2 valve closed
6/6/2012	12:47:30 PM	BCl3 valve closed
6/6/2012	12:47:30 PM	PH3 valve closed
6/6/2012	12:47:30 PM	SiCl4 pre valve closed
6/6/2012	12:47:30 PM	SiCl4 post valve closed
6/6/2012	12:47:30 PM	Bypass valve closed
6/6/2012	12:47:30 PM	Bubbler valve closed
6/6/2012	12:47:30 PM	Main Vac valve opened
6/6/2012	12:47:30 PM	Helium MFC set to  0.000000
6/6/2012	12:47:30 PM	H2 MFC set to  0.000000
6/6/2012	12:47:30 PM	BCl3 MFC set to  0.000000
6/6/2012	12:47:30 PM	PH3 MFC set to  0.000000
6/6/2012	12:47:30 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:47:30 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:47:31 PM	Tube furnace set to 200
6/6/2012	12:48:01 PM	H2 valve closed
6/6/2012	12:48:01 PM	BCl3 valve closed
6/6/2012	12:48:01 PM	PH3 valve closed
6/6/2012	12:48:01 PM	SiCl4 pre valve closed
6/6/2012	12:48:01 PM	SiCl4 post valve closed
6/6/2012	12:48:01 PM	Bypass valve closed
6/6/2012	12:48:01 PM	Bubbler valve closed
6/6/2012	12:48:01 PM	Helium valve opened
6/6/2012	12:48:01 PM	Main Vac valve opened
6/6/2012	12:48:01 PM	Helium MFC set to  20.000000
6/6/2012	12:48:01 PM	H2 MFC set to  0.000000
6/6/2012	12:48:01 PM	BCl3 MFC set to  0.000000
6/6/2012	12:48:01 PM	PH3 MFC set to  0.000000
6/6/2012	12:48:01 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:48:01 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:48:01 PM	Tube furnace set to 200
6/6/2012	12:48:31 PM	Helium valve closed
6/6/2012	12:48:31 PM	H2 valve closed
6/6/2012	12:48:31 PM	BCl3 valve closed
6/6/2012	12:48:31 PM	PH3 valve closed
6/6/2012	12:48:31 PM	SiCl4 pre valve closed
6/6/2012	12:48:31 PM	SiCl4 post valve closed
6/6/2012	12:48:31 PM	Bypass valve closed
6/6/2012	12:48:31 PM	Bubbler valve closed
6/6/2012	12:48:31 PM	Main Vac valve opened
6/6/2012	12:48:31 PM	Helium MFC set to  0.000000
6/6/2012	12:48:31 PM	H2 MFC set to  0.000000
6/6/2012	12:48:31 PM	BCl3 MFC set to  0.000000
6/6/2012	12:48:31 PM	PH3 MFC set to  0.000000
6/6/2012	12:48:31 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:48:31 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:48:31 PM	Tube furnace set to 200
6/6/2012	12:49:01 PM	H2 valve closed
6/6/2012	12:49:01 PM	BCl3 valve closed
6/6/2012	12:49:01 PM	PH3 valve closed
6/6/2012	12:49:01 PM	SiCl4 pre valve closed
6/6/2012	12:49:01 PM	SiCl4 post valve closed
6/6/2012	12:49:01 PM	Bypass valve closed
6/6/2012	12:49:01 PM	Bubbler valve closed
6/6/2012	12:49:01 PM	Helium valve opened
6/6/2012	12:49:01 PM	Main Vac valve opened
6/6/2012	12:49:01 PM	Helium MFC set to  20.000000
6/6/2012	12:49:01 PM	H2 MFC set to  0.000000
6/6/2012	12:49:01 PM	BCl3 MFC set to  0.000000
6/6/2012	12:49:01 PM	PH3 MFC set to  0.000000
6/6/2012	12:49:01 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:49:01 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:49:01 PM	Tube furnace set to 200
6/6/2012	12:49:31 PM	Helium valve closed
6/6/2012	12:49:31 PM	H2 valve closed
6/6/2012	12:49:31 PM	BCl3 valve closed
6/6/2012	12:49:31 PM	PH3 valve closed
6/6/2012	12:49:31 PM	SiCl4 pre valve closed
6/6/2012	12:49:31 PM	SiCl4 post valve closed
6/6/2012	12:49:31 PM	Bypass valve closed
6/6/2012	12:49:31 PM	Bubbler valve closed
6/6/2012	12:49:31 PM	Main Vac valve opened
6/6/2012	12:49:31 PM	Helium MFC set to  0.000000
6/6/2012	12:49:31 PM	H2 MFC set to  0.000000
6/6/2012	12:49:31 PM	BCl3 MFC set to  0.000000
6/6/2012	12:49:31 PM	PH3 MFC set to  0.000000
6/6/2012	12:49:31 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:49:31 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:49:31 PM	Tube furnace set to 0
6/6/2012	12:49:32 PM	Run finished at 12:49 PM
6/6/2012	12:52:04 PM	Main Vac valve closed
6/6/2012	12:52:20 PM	Main Vac valve opened
6/6/2012	12:53:36 PM	Recipe started at 12:53 PM
6/6/2012	12:53:36 PM	Helium valve closed
6/6/2012	12:53:36 PM	H2 valve closed
6/6/2012	12:53:36 PM	BCl3 valve closed
6/6/2012	12:53:36 PM	PH3 valve closed
6/6/2012	12:53:36 PM	SiCl4 pre valve closed
6/6/2012	12:53:36 PM	SiCl4 post valve closed
6/6/2012	12:53:36 PM	Main Vac valve closed
6/6/2012	12:53:36 PM	Bypass valve closed
6/6/2012	12:53:36 PM	Bubbler valve closed
6/6/2012	12:53:36 PM	Helium MFC set to  0.000000
6/6/2012	12:53:36 PM	H2 MFC set to  0.000000
6/6/2012	12:53:36 PM	BCl3 MFC set to  0.000000
6/6/2012	12:53:36 PM	PH3 MFC set to  0.000000
6/6/2012	12:53:36 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:53:36 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:53:37 PM	Tube furnace set to 0
6/6/2012	12:53:40 PM	Helium valve closed
6/6/2012	12:53:40 PM	BCl3 valve closed
6/6/2012	12:53:40 PM	PH3 valve closed
6/6/2012	12:53:40 PM	SiCl4 pre valve closed
6/6/2012	12:53:40 PM	SiCl4 post valve closed
6/6/2012	12:53:40 PM	Main Vac valve closed
6/6/2012	12:53:40 PM	Bypass valve closed
6/6/2012	12:53:40 PM	Bubbler valve closed
6/6/2012	12:53:40 PM	H2 valve opened
6/6/2012	12:53:40 PM	Helium MFC set to  0.000000
6/6/2012	12:53:40 PM	H2 MFC set to  500.000000
6/6/2012	12:53:40 PM	BCl3 MFC set to  0.000000
6/6/2012	12:53:40 PM	PH3 MFC set to  0.000000
6/6/2012	12:53:40 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:53:40 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:53:40 PM	Tube furnace set to 0
6/6/2012	12:54:52 PM	Helium valve closed
6/6/2012	12:54:52 PM	BCl3 valve closed
6/6/2012	12:54:52 PM	PH3 valve closed
6/6/2012	12:54:52 PM	SiCl4 pre valve closed
6/6/2012	12:54:52 PM	SiCl4 post valve closed
6/6/2012	12:54:52 PM	Main Vac valve closed
6/6/2012	12:54:52 PM	Bypass valve closed
6/6/2012	12:54:52 PM	H2 valve opened
6/6/2012	12:54:52 PM	Bubbler valve opened
6/6/2012	12:54:52 PM	Helium MFC set to  0.000000
6/6/2012	12:54:52 PM	H2 MFC set to  500.000000
6/6/2012	12:54:52 PM	BCl3 MFC set to  0.000000
6/6/2012	12:54:52 PM	PH3 MFC set to  0.000000
6/6/2012	12:54:52 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:54:52 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:54:52 PM	Tube furnace set to 0
6/6/2012	12:54:53 PM	Helium valve closed
6/6/2012	12:54:53 PM	BCl3 valve closed
6/6/2012	12:54:53 PM	PH3 valve closed
6/6/2012	12:54:53 PM	SiCl4 pre valve closed
6/6/2012	12:54:53 PM	SiCl4 post valve closed
6/6/2012	12:54:53 PM	Main Vac valve closed
6/6/2012	12:54:53 PM	Bypass valve closed
6/6/2012	12:54:53 PM	H2 valve opened
6/6/2012	12:54:53 PM	Bubbler valve opened
6/6/2012	12:54:53 PM	Helium MFC set to  0.000000
6/6/2012	12:54:53 PM	H2 MFC set to  500.000000
6/6/2012	12:54:53 PM	BCl3 MFC set to  0.000000
6/6/2012	12:54:53 PM	PH3 MFC set to  0.000000
6/6/2012	12:54:53 PM	SiCl4 MFC set to  0.000000
6/6/2012	12:54:53 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	12:54:53 PM	Tube furnace set to 1000
6/6/2012	1:14:53 PM	Helium valve closed
6/6/2012	1:14:53 PM	BCl3 valve closed
6/6/2012	1:14:53 PM	Main Vac valve closed
6/6/2012	1:14:53 PM	Bypass valve closed
6/6/2012	1:14:53 PM	H2 valve opened
6/6/2012	1:14:53 PM	PH3 valve opened
6/6/2012	1:14:53 PM	SiCl4 pre valve opened
6/6/2012	1:14:53 PM	SiCl4 post valve opened
6/6/2012	1:14:53 PM	Bubbler valve opened
6/6/2012	1:14:53 PM	Helium MFC set to  0.000000
6/6/2012	1:14:53 PM	H2 MFC set to  500.000000
6/6/2012	1:14:53 PM	BCl3 MFC set to  0.000000
6/6/2012	1:14:53 PM	PH3 MFC set to  20.000000
6/6/2012	1:14:53 PM	SiCl4 MFC set to  25.000000
6/6/2012	1:14:53 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	1:14:53 PM	Tube furnace set to 1000
6/6/2012	1:16:53 PM	Helium valve closed
6/6/2012	1:16:53 PM	BCl3 valve closed
6/6/2012	1:16:53 PM	PH3 valve closed
6/6/2012	1:16:53 PM	SiCl4 pre valve closed
6/6/2012	1:16:53 PM	SiCl4 post valve closed
6/6/2012	1:16:53 PM	Main Vac valve closed
6/6/2012	1:16:53 PM	Bypass valve closed
6/6/2012	1:16:53 PM	H2 valve opened
6/6/2012	1:16:53 PM	Bubbler valve opened
6/6/2012	1:16:53 PM	Helium MFC set to  0.000000
6/6/2012	1:16:53 PM	H2 MFC set to  500.000000
6/6/2012	1:16:53 PM	BCl3 MFC set to  0.000000
6/6/2012	1:16:53 PM	PH3 MFC set to  0.000000
6/6/2012	1:16:53 PM	SiCl4 MFC set to  0.000000
6/6/2012	1:16:53 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	1:16:54 PM	Tube furnace set to 950
6/6/2012	1:18:54 PM	Helium valve closed
6/6/2012	1:18:54 PM	BCl3 valve closed
6/6/2012	1:18:54 PM	PH3 valve closed
6/6/2012	1:18:54 PM	SiCl4 pre valve closed
6/6/2012	1:18:54 PM	SiCl4 post valve closed
6/6/2012	1:18:54 PM	Main Vac valve closed
6/6/2012	1:18:54 PM	Bypass valve closed
6/6/2012	1:18:54 PM	H2 valve opened
6/6/2012	1:18:54 PM	Bubbler valve opened
6/6/2012	1:18:54 PM	Helium MFC set to  0.000000
6/6/2012	1:18:54 PM	H2 MFC set to  500.000000
6/6/2012	1:18:54 PM	BCl3 MFC set to  0.000000
6/6/2012	1:18:54 PM	PH3 MFC set to  0.000000
6/6/2012	1:18:54 PM	SiCl4 MFC set to  0.000000
6/6/2012	1:18:54 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	1:18:54 PM	Tube furnace set to 900
6/6/2012	1:20:54 PM	Helium valve closed
6/6/2012	1:20:54 PM	BCl3 valve closed
6/6/2012	1:20:54 PM	PH3 valve closed
6/6/2012	1:20:54 PM	SiCl4 pre valve closed
6/6/2012	1:20:54 PM	SiCl4 post valve closed
6/6/2012	1:20:54 PM	Main Vac valve closed
6/6/2012	1:20:54 PM	Bypass valve closed
6/6/2012	1:20:54 PM	H2 valve opened
6/6/2012	1:20:54 PM	Bubbler valve opened
6/6/2012	1:20:54 PM	Helium MFC set to  0.000000
6/6/2012	1:20:54 PM	H2 MFC set to  500.000000
6/6/2012	1:20:54 PM	BCl3 MFC set to  0.000000
6/6/2012	1:20:54 PM	PH3 MFC set to  0.000000
6/6/2012	1:20:54 PM	SiCl4 MFC set to  0.000000
6/6/2012	1:20:54 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	1:20:54 PM	Tube furnace set to 850
6/6/2012	1:22:54 PM	H2 valve closed
6/6/2012	1:22:54 PM	BCl3 valve closed
6/6/2012	1:22:54 PM	PH3 valve closed
6/6/2012	1:22:54 PM	SiCl4 pre valve closed
6/6/2012	1:22:54 PM	SiCl4 post valve closed
6/6/2012	1:22:54 PM	Main Vac valve closed
6/6/2012	1:22:54 PM	Bypass valve closed
6/6/2012	1:22:54 PM	Helium valve opened
6/6/2012	1:22:54 PM	Bubbler valve opened
6/6/2012	1:22:54 PM	Helium MFC set to  500.000000
6/6/2012	1:22:54 PM	H2 MFC set to  0.000000
6/6/2012	1:22:54 PM	BCl3 MFC set to  0.000000
6/6/2012	1:22:54 PM	PH3 MFC set to  0.000000
6/6/2012	1:22:54 PM	SiCl4 MFC set to  0.000000
6/6/2012	1:22:54 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	1:22:54 PM	Tube furnace set to 800
6/6/2012	1:24:54 PM	H2 valve closed
6/6/2012	1:24:54 PM	BCl3 valve closed
6/6/2012	1:24:54 PM	PH3 valve closed
6/6/2012	1:24:54 PM	SiCl4 pre valve closed
6/6/2012	1:24:54 PM	SiCl4 post valve closed
6/6/2012	1:24:54 PM	Main Vac valve closed
6/6/2012	1:24:54 PM	Bypass valve closed
6/6/2012	1:24:54 PM	Helium valve opened
6/6/2012	1:24:54 PM	Bubbler valve opened
6/6/2012	1:24:54 PM	Helium MFC set to  500.000000
6/6/2012	1:24:54 PM	H2 MFC set to  0.000000
6/6/2012	1:24:54 PM	BCl3 MFC set to  0.000000
6/6/2012	1:24:54 PM	PH3 MFC set to  0.000000
6/6/2012	1:24:54 PM	SiCl4 MFC set to  0.000000
6/6/2012	1:24:54 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	1:24:55 PM	Tube furnace set to 750
6/6/2012	1:26:55 PM	H2 valve closed
6/6/2012	1:26:55 PM	BCl3 valve closed
6/6/2012	1:26:55 PM	PH3 valve closed
6/6/2012	1:26:55 PM	SiCl4 pre valve closed
6/6/2012	1:26:55 PM	SiCl4 post valve closed
6/6/2012	1:26:55 PM	Main Vac valve closed
6/6/2012	1:26:55 PM	Bypass valve closed
6/6/2012	1:26:55 PM	Helium valve opened
6/6/2012	1:26:55 PM	Bubbler valve opened
6/6/2012	1:26:55 PM	Helium MFC set to  500.000000
6/6/2012	1:26:55 PM	H2 MFC set to  0.000000
6/6/2012	1:26:55 PM	BCl3 MFC set to  0.000000
6/6/2012	1:26:55 PM	PH3 MFC set to  0.000000
6/6/2012	1:26:55 PM	SiCl4 MFC set to  0.000000
6/6/2012	1:26:55 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	1:26:55 PM	Tube furnace set to 0
6/6/2012	1:46:55 PM	Helium valve closed
6/6/2012	1:46:55 PM	H2 valve closed
6/6/2012	1:46:55 PM	BCl3 valve closed
6/6/2012	1:46:55 PM	PH3 valve closed
6/6/2012	1:46:55 PM	SiCl4 pre valve closed
6/6/2012	1:46:55 PM	SiCl4 post valve closed
6/6/2012	1:46:55 PM	Main Vac valve closed
6/6/2012	1:46:55 PM	Bypass valve closed
6/6/2012	1:46:55 PM	Bubbler valve closed
6/6/2012	1:46:55 PM	Helium MFC set to  0.000000
6/6/2012	1:46:55 PM	H2 MFC set to  0.000000
6/6/2012	1:46:55 PM	BCl3 MFC set to  0.000000
6/6/2012	1:46:55 PM	PH3 MFC set to  0.000000
6/6/2012	1:46:55 PM	SiCl4 MFC set to  0.000000
6/6/2012	1:46:55 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	1:46:55 PM	Tube furnace set to 0
6/6/2012	1:46:56 PM	Run finished at 1:46 PM
6/6/2012	2:20:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2012	2:20:55 PM	Recipe started at 2:20 PM
6/6/2012	2:20:55 PM	Helium valve closed
6/6/2012	2:20:55 PM	H2 valve closed
6/6/2012	2:20:55 PM	BCl3 valve closed
6/6/2012	2:20:55 PM	PH3 valve closed
6/6/2012	2:20:56 PM	SiCl4 pre valve closed
6/6/2012	2:20:56 PM	SiCl4 post valve closed
6/6/2012	2:20:56 PM	Main Vac valve closed
6/6/2012	2:20:56 PM	Bypass valve closed
6/6/2012	2:20:56 PM	Bubbler valve closed
6/6/2012	2:20:56 PM	Helium MFC set to  0.000000
6/6/2012	2:20:56 PM	H2 MFC set to  0.000000
6/6/2012	2:20:56 PM	BCl3 MFC set to  0.000000
6/6/2012	2:20:56 PM	PH3 MFC set to  0.000000
6/6/2012	2:20:56 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:20:56 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:20:56 PM	Tube furnace set to 0
6/6/2012	2:20:59 PM	H2 valve closed
6/6/2012	2:20:59 PM	BCl3 valve closed
6/6/2012	2:20:59 PM	PH3 valve closed
6/6/2012	2:20:59 PM	SiCl4 pre valve closed
6/6/2012	2:20:59 PM	SiCl4 post valve closed
6/6/2012	2:20:59 PM	Main Vac valve closed
6/6/2012	2:20:59 PM	Bypass valve closed
6/6/2012	2:20:59 PM	Bubbler valve closed
6/6/2012	2:20:59 PM	Helium valve opened
6/6/2012	2:20:59 PM	Helium MFC set to  500.000000
6/6/2012	2:20:59 PM	H2 MFC set to  0.000000
6/6/2012	2:20:59 PM	BCl3 MFC set to  0.000000
6/6/2012	2:20:59 PM	PH3 MFC set to  0.000000
6/6/2012	2:20:59 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:20:59 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:20:59 PM	Tube furnace set to 0
6/6/2012	2:21:06 PM	Helium valve closed
6/6/2012	2:21:06 PM	H2 valve closed
6/6/2012	2:21:06 PM	BCl3 valve closed
6/6/2012	2:21:06 PM	PH3 valve closed
6/6/2012	2:21:06 PM	SiCl4 pre valve closed
6/6/2012	2:21:06 PM	SiCl4 post valve closed
6/6/2012	2:21:06 PM	Main Vac valve closed
6/6/2012	2:21:06 PM	Bypass valve closed
6/6/2012	2:21:06 PM	Bubbler valve closed
6/6/2012	2:21:06 PM	Helium MFC set to  0.000000
6/6/2012	2:21:06 PM	H2 MFC set to  0.000000
6/6/2012	2:21:06 PM	BCl3 MFC set to  0.000000
6/6/2012	2:21:06 PM	PH3 MFC set to  0.000000
6/6/2012	2:21:06 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:21:06 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:21:06 PM	Tube furnace set to 0
6/6/2012	2:21:07 PM	Run finished at 2:21 PM
6/6/2012	2:21:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2012	2:22:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/6/2012	2:22:48 PM	Recipe started at 2:22 PM
6/6/2012	2:22:48 PM	Helium valve closed
6/6/2012	2:22:48 PM	H2 valve closed
6/6/2012	2:22:48 PM	BCl3 valve closed
6/6/2012	2:22:48 PM	PH3 valve closed
6/6/2012	2:22:48 PM	SiCl4 pre valve closed
6/6/2012	2:22:48 PM	SiCl4 post valve closed
6/6/2012	2:22:48 PM	Main Vac valve closed
6/6/2012	2:22:48 PM	Bubbler valve closed
6/6/2012	2:22:48 PM	Bypass valve opened
6/6/2012	2:22:48 PM	Helium MFC set to  0.000000
6/6/2012	2:22:48 PM	H2 MFC set to  0.000000
6/6/2012	2:22:48 PM	BCl3 MFC set to  0.000000
6/6/2012	2:22:48 PM	PH3 MFC set to  0.000000
6/6/2012	2:22:48 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:22:48 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:22:48 PM	Tube furnace set to 0
6/6/2012	2:23:53 PM	Helium valve closed
6/6/2012	2:23:53 PM	H2 valve closed
6/6/2012	2:23:53 PM	BCl3 valve closed
6/6/2012	2:23:53 PM	PH3 valve closed
6/6/2012	2:23:53 PM	SiCl4 pre valve closed
6/6/2012	2:23:53 PM	SiCl4 post valve closed
6/6/2012	2:23:53 PM	Main Vac valve closed
6/6/2012	2:23:53 PM	Bubbler valve closed
6/6/2012	2:23:53 PM	Bypass valve opened
6/6/2012	2:23:53 PM	Helium MFC set to  0.000000
6/6/2012	2:23:53 PM	H2 MFC set to  0.000000
6/6/2012	2:23:53 PM	BCl3 MFC set to  0.000000
6/6/2012	2:23:53 PM	PH3 MFC set to  0.000000
6/6/2012	2:23:53 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:23:53 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:23:53 PM	Tube furnace set to 0
6/6/2012	2:24:53 PM	Helium valve closed
6/6/2012	2:24:53 PM	H2 valve closed
6/6/2012	2:24:53 PM	BCl3 valve closed
6/6/2012	2:24:53 PM	PH3 valve closed
6/6/2012	2:24:53 PM	SiCl4 pre valve closed
6/6/2012	2:24:53 PM	SiCl4 post valve closed
6/6/2012	2:24:53 PM	Bypass valve closed
6/6/2012	2:24:53 PM	Bubbler valve closed
6/6/2012	2:24:53 PM	Main Vac valve opened
6/6/2012	2:24:53 PM	Helium MFC set to  0.000000
6/6/2012	2:24:53 PM	H2 MFC set to  0.000000
6/6/2012	2:24:53 PM	BCl3 MFC set to  0.000000
6/6/2012	2:24:53 PM	PH3 MFC set to  0.000000
6/6/2012	2:24:53 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:24:53 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:24:53 PM	Tube furnace set to 0
6/6/2012	2:24:54 PM	Run finished at 2:24 PM
6/6/2012	2:24:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/6/2012	2:29:25 PM	Recipe started at 2:29 PM
6/6/2012	2:29:25 PM	Helium valve closed
6/6/2012	2:29:25 PM	H2 valve closed
6/6/2012	2:29:25 PM	BCl3 valve closed
6/6/2012	2:29:25 PM	PH3 valve closed
6/6/2012	2:29:25 PM	SiCl4 pre valve closed
6/6/2012	2:29:25 PM	SiCl4 post valve closed
6/6/2012	2:29:25 PM	Bypass valve closed
6/6/2012	2:29:25 PM	Bubbler valve closed
6/6/2012	2:29:25 PM	Main Vac valve opened
6/6/2012	2:29:25 PM	Helium MFC set to  0.000000
6/6/2012	2:29:25 PM	H2 MFC set to  0.000000
6/6/2012	2:29:25 PM	BCl3 MFC set to  0.000000
6/6/2012	2:29:25 PM	PH3 MFC set to  0.000000
6/6/2012	2:29:25 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:29:25 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:29:25 PM	Tube furnace set to 0
6/6/2012	2:29:55 PM	H2 valve closed
6/6/2012	2:29:55 PM	BCl3 valve closed
6/6/2012	2:29:55 PM	PH3 valve closed
6/6/2012	2:29:55 PM	SiCl4 pre valve closed
6/6/2012	2:29:55 PM	SiCl4 post valve closed
6/6/2012	2:29:55 PM	Bypass valve closed
6/6/2012	2:29:55 PM	Bubbler valve closed
6/6/2012	2:29:55 PM	Helium valve opened
6/6/2012	2:29:55 PM	Main Vac valve opened
6/6/2012	2:29:55 PM	Helium MFC set to  20.000000
6/6/2012	2:29:55 PM	H2 MFC set to  0.000000
6/6/2012	2:29:55 PM	BCl3 MFC set to  0.000000
6/6/2012	2:29:55 PM	PH3 MFC set to  0.000000
6/6/2012	2:29:55 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:29:55 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:29:55 PM	Tube furnace set to 0
6/6/2012	2:30:25 PM	Helium valve closed
6/6/2012	2:30:25 PM	H2 valve closed
6/6/2012	2:30:25 PM	BCl3 valve closed
6/6/2012	2:30:25 PM	PH3 valve closed
6/6/2012	2:30:25 PM	SiCl4 pre valve closed
6/6/2012	2:30:25 PM	SiCl4 post valve closed
6/6/2012	2:30:25 PM	Bypass valve closed
6/6/2012	2:30:25 PM	Bubbler valve closed
6/6/2012	2:30:25 PM	Main Vac valve opened
6/6/2012	2:30:25 PM	Helium MFC set to  0.000000
6/6/2012	2:30:25 PM	H2 MFC set to  0.000000
6/6/2012	2:30:25 PM	BCl3 MFC set to  0.000000
6/6/2012	2:30:25 PM	PH3 MFC set to  0.000000
6/6/2012	2:30:25 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:30:25 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:30:25 PM	Tube furnace set to 0
6/6/2012	2:30:55 PM	H2 valve closed
6/6/2012	2:30:55 PM	BCl3 valve closed
6/6/2012	2:30:55 PM	PH3 valve closed
6/6/2012	2:30:55 PM	SiCl4 pre valve closed
6/6/2012	2:30:55 PM	SiCl4 post valve closed
6/6/2012	2:30:55 PM	Bypass valve closed
6/6/2012	2:30:55 PM	Bubbler valve closed
6/6/2012	2:30:55 PM	Helium valve opened
6/6/2012	2:30:55 PM	Main Vac valve opened
6/6/2012	2:30:55 PM	Helium MFC set to  20.000000
6/6/2012	2:30:55 PM	H2 MFC set to  0.000000
6/6/2012	2:30:55 PM	BCl3 MFC set to  0.000000
6/6/2012	2:30:55 PM	PH3 MFC set to  0.000000
6/6/2012	2:30:55 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:30:55 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:30:56 PM	Tube furnace set to 0
6/6/2012	2:31:26 PM	Helium valve closed
6/6/2012	2:31:26 PM	H2 valve closed
6/6/2012	2:31:26 PM	BCl3 valve closed
6/6/2012	2:31:26 PM	PH3 valve closed
6/6/2012	2:31:26 PM	SiCl4 pre valve closed
6/6/2012	2:31:26 PM	SiCl4 post valve closed
6/6/2012	2:31:26 PM	Bypass valve closed
6/6/2012	2:31:26 PM	Bubbler valve closed
6/6/2012	2:31:26 PM	Main Vac valve opened
6/6/2012	2:31:26 PM	Helium MFC set to  0.000000
6/6/2012	2:31:26 PM	H2 MFC set to  0.000000
6/6/2012	2:31:26 PM	BCl3 MFC set to  0.000000
6/6/2012	2:31:26 PM	PH3 MFC set to  0.000000
6/6/2012	2:31:26 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:31:26 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:31:26 PM	Tube furnace set to 0
6/6/2012	2:31:56 PM	H2 valve closed
6/6/2012	2:31:56 PM	BCl3 valve closed
6/6/2012	2:31:56 PM	PH3 valve closed
6/6/2012	2:31:56 PM	SiCl4 pre valve closed
6/6/2012	2:31:56 PM	SiCl4 post valve closed
6/6/2012	2:31:56 PM	Bypass valve closed
6/6/2012	2:31:56 PM	Bubbler valve closed
6/6/2012	2:31:56 PM	Helium valve opened
6/6/2012	2:31:56 PM	Main Vac valve opened
6/6/2012	2:31:56 PM	Helium MFC set to  20.000000
6/6/2012	2:31:56 PM	H2 MFC set to  0.000000
6/6/2012	2:31:56 PM	BCl3 MFC set to  0.000000
6/6/2012	2:31:56 PM	PH3 MFC set to  0.000000
6/6/2012	2:31:56 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:31:56 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:31:56 PM	Tube furnace set to 0
6/6/2012	2:32:26 PM	Helium valve closed
6/6/2012	2:32:26 PM	H2 valve closed
6/6/2012	2:32:26 PM	BCl3 valve closed
6/6/2012	2:32:26 PM	PH3 valve closed
6/6/2012	2:32:26 PM	SiCl4 pre valve closed
6/6/2012	2:32:26 PM	SiCl4 post valve closed
6/6/2012	2:32:26 PM	Bypass valve closed
6/6/2012	2:32:26 PM	Bubbler valve closed
6/6/2012	2:32:26 PM	Main Vac valve opened
6/6/2012	2:32:26 PM	Helium MFC set to  0.000000
6/6/2012	2:32:26 PM	H2 MFC set to  0.000000
6/6/2012	2:32:26 PM	BCl3 MFC set to  0.000000
6/6/2012	2:32:26 PM	PH3 MFC set to  0.000000
6/6/2012	2:32:26 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:32:26 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:32:26 PM	Tube furnace set to 0
6/6/2012	2:32:56 PM	H2 valve closed
6/6/2012	2:32:56 PM	BCl3 valve closed
6/6/2012	2:32:56 PM	PH3 valve closed
6/6/2012	2:32:56 PM	SiCl4 pre valve closed
6/6/2012	2:32:56 PM	SiCl4 post valve closed
6/6/2012	2:32:56 PM	Bypass valve closed
6/6/2012	2:32:56 PM	Bubbler valve closed
6/6/2012	2:32:56 PM	Helium valve opened
6/6/2012	2:32:56 PM	Main Vac valve opened
6/6/2012	2:32:56 PM	Helium MFC set to  20.000000
6/6/2012	2:32:56 PM	H2 MFC set to  0.000000
6/6/2012	2:32:56 PM	BCl3 MFC set to  0.000000
6/6/2012	2:32:56 PM	PH3 MFC set to  0.000000
6/6/2012	2:32:56 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:32:56 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:32:56 PM	Tube furnace set to 0
6/6/2012	2:33:26 PM	Helium valve closed
6/6/2012	2:33:26 PM	H2 valve closed
6/6/2012	2:33:26 PM	BCl3 valve closed
6/6/2012	2:33:26 PM	PH3 valve closed
6/6/2012	2:33:26 PM	SiCl4 pre valve closed
6/6/2012	2:33:27 PM	SiCl4 post valve closed
6/6/2012	2:33:27 PM	Bypass valve closed
6/6/2012	2:33:27 PM	Bubbler valve closed
6/6/2012	2:33:27 PM	Main Vac valve opened
6/6/2012	2:33:27 PM	Helium MFC set to  0.000000
6/6/2012	2:33:27 PM	H2 MFC set to  0.000000
6/6/2012	2:33:27 PM	BCl3 MFC set to  0.000000
6/6/2012	2:33:27 PM	PH3 MFC set to  0.000000
6/6/2012	2:33:27 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:33:27 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:33:27 PM	Tube furnace set to 0
6/6/2012	2:33:57 PM	H2 valve closed
6/6/2012	2:33:57 PM	BCl3 valve closed
6/6/2012	2:33:57 PM	PH3 valve closed
6/6/2012	2:33:57 PM	SiCl4 pre valve closed
6/6/2012	2:33:57 PM	SiCl4 post valve closed
6/6/2012	2:33:57 PM	Bypass valve closed
6/6/2012	2:33:57 PM	Bubbler valve closed
6/6/2012	2:33:57 PM	Helium valve opened
6/6/2012	2:33:57 PM	Main Vac valve opened
6/6/2012	2:33:57 PM	Helium MFC set to  20.000000
6/6/2012	2:33:57 PM	H2 MFC set to  0.000000
6/6/2012	2:33:57 PM	BCl3 MFC set to  0.000000
6/6/2012	2:33:57 PM	PH3 MFC set to  0.000000
6/6/2012	2:33:57 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:33:57 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:33:57 PM	Tube furnace set to 0
6/6/2012	2:34:27 PM	Helium valve closed
6/6/2012	2:34:27 PM	H2 valve closed
6/6/2012	2:34:27 PM	BCl3 valve closed
6/6/2012	2:34:27 PM	PH3 valve closed
6/6/2012	2:34:27 PM	SiCl4 pre valve closed
6/6/2012	2:34:27 PM	SiCl4 post valve closed
6/6/2012	2:34:27 PM	Bypass valve closed
6/6/2012	2:34:27 PM	Bubbler valve closed
6/6/2012	2:34:27 PM	Main Vac valve opened
6/6/2012	2:34:27 PM	Helium MFC set to  0.000000
6/6/2012	2:34:27 PM	H2 MFC set to  0.000000
6/6/2012	2:34:27 PM	BCl3 MFC set to  0.000000
6/6/2012	2:34:27 PM	PH3 MFC set to  0.000000
6/6/2012	2:34:27 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:34:27 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:34:27 PM	Tube furnace set to 0
6/6/2012	2:34:57 PM	H2 valve closed
6/6/2012	2:34:57 PM	BCl3 valve closed
6/6/2012	2:34:57 PM	PH3 valve closed
6/6/2012	2:34:57 PM	SiCl4 pre valve closed
6/6/2012	2:34:57 PM	SiCl4 post valve closed
6/6/2012	2:34:57 PM	Bypass valve closed
6/6/2012	2:34:57 PM	Bubbler valve closed
6/6/2012	2:34:57 PM	Helium valve opened
6/6/2012	2:34:57 PM	Main Vac valve opened
6/6/2012	2:34:57 PM	Helium MFC set to  20.000000
6/6/2012	2:34:57 PM	H2 MFC set to  0.000000
6/6/2012	2:34:57 PM	BCl3 MFC set to  0.000000
6/6/2012	2:34:57 PM	PH3 MFC set to  0.000000
6/6/2012	2:34:57 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:34:57 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:34:57 PM	Tube furnace set to 0
6/6/2012	2:35:27 PM	Helium valve closed
6/6/2012	2:35:27 PM	H2 valve closed
6/6/2012	2:35:27 PM	BCl3 valve closed
6/6/2012	2:35:27 PM	PH3 valve closed
6/6/2012	2:35:27 PM	SiCl4 pre valve closed
6/6/2012	2:35:27 PM	SiCl4 post valve closed
6/6/2012	2:35:27 PM	Bypass valve closed
6/6/2012	2:35:27 PM	Bubbler valve closed
6/6/2012	2:35:27 PM	Main Vac valve opened
6/6/2012	2:35:27 PM	Helium MFC set to  0.000000
6/6/2012	2:35:27 PM	H2 MFC set to  0.000000
6/6/2012	2:35:27 PM	BCl3 MFC set to  0.000000
6/6/2012	2:35:27 PM	PH3 MFC set to  0.000000
6/6/2012	2:35:27 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:35:27 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:35:28 PM	Tube furnace set to 0
6/6/2012	2:35:58 PM	H2 valve closed
6/6/2012	2:35:58 PM	BCl3 valve closed
6/6/2012	2:35:58 PM	PH3 valve closed
6/6/2012	2:35:58 PM	SiCl4 pre valve closed
6/6/2012	2:35:58 PM	SiCl4 post valve closed
6/6/2012	2:35:58 PM	Bypass valve closed
6/6/2012	2:35:58 PM	Bubbler valve closed
6/6/2012	2:35:58 PM	Helium valve opened
6/6/2012	2:35:58 PM	Main Vac valve opened
6/6/2012	2:35:58 PM	Helium MFC set to  20.000000
6/6/2012	2:35:58 PM	H2 MFC set to  0.000000
6/6/2012	2:35:58 PM	BCl3 MFC set to  0.000000
6/6/2012	2:35:58 PM	PH3 MFC set to  0.000000
6/6/2012	2:35:58 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:35:58 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:35:58 PM	Tube furnace set to 0
6/6/2012	2:36:28 PM	Helium valve closed
6/6/2012	2:36:28 PM	H2 valve closed
6/6/2012	2:36:28 PM	BCl3 valve closed
6/6/2012	2:36:28 PM	PH3 valve closed
6/6/2012	2:36:28 PM	SiCl4 pre valve closed
6/6/2012	2:36:28 PM	SiCl4 post valve closed
6/6/2012	2:36:28 PM	Bypass valve closed
6/6/2012	2:36:28 PM	Bubbler valve closed
6/6/2012	2:36:28 PM	Main Vac valve opened
6/6/2012	2:36:28 PM	Helium MFC set to  0.000000
6/6/2012	2:36:28 PM	H2 MFC set to  0.000000
6/6/2012	2:36:28 PM	BCl3 MFC set to  0.000000
6/6/2012	2:36:28 PM	PH3 MFC set to  0.000000
6/6/2012	2:36:28 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:36:28 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:36:28 PM	Tube furnace set to 0
6/6/2012	2:36:58 PM	H2 valve closed
6/6/2012	2:36:58 PM	BCl3 valve closed
6/6/2012	2:36:58 PM	PH3 valve closed
6/6/2012	2:36:58 PM	SiCl4 pre valve closed
6/6/2012	2:36:58 PM	SiCl4 post valve closed
6/6/2012	2:36:58 PM	Bypass valve closed
6/6/2012	2:36:58 PM	Bubbler valve closed
6/6/2012	2:36:58 PM	Helium valve opened
6/6/2012	2:36:58 PM	Main Vac valve opened
6/6/2012	2:36:58 PM	Helium MFC set to  20.000000
6/6/2012	2:36:58 PM	H2 MFC set to  0.000000
6/6/2012	2:36:58 PM	BCl3 MFC set to  0.000000
6/6/2012	2:36:58 PM	PH3 MFC set to  0.000000
6/6/2012	2:36:58 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:36:58 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:36:58 PM	Tube furnace set to 0
6/6/2012	2:37:28 PM	Helium valve closed
6/6/2012	2:37:28 PM	H2 valve closed
6/6/2012	2:37:28 PM	BCl3 valve closed
6/6/2012	2:37:28 PM	PH3 valve closed
6/6/2012	2:37:28 PM	SiCl4 pre valve closed
6/6/2012	2:37:28 PM	SiCl4 post valve closed
6/6/2012	2:37:28 PM	Bypass valve closed
6/6/2012	2:37:28 PM	Bubbler valve closed
6/6/2012	2:37:28 PM	Main Vac valve opened
6/6/2012	2:37:28 PM	Helium MFC set to  0.000000
6/6/2012	2:37:28 PM	H2 MFC set to  0.000000
6/6/2012	2:37:28 PM	BCl3 MFC set to  0.000000
6/6/2012	2:37:28 PM	PH3 MFC set to  0.000000
6/6/2012	2:37:28 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:37:28 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:37:29 PM	Tube furnace set to 0
6/6/2012	2:37:59 PM	H2 valve closed
6/6/2012	2:37:59 PM	BCl3 valve closed
6/6/2012	2:37:59 PM	PH3 valve closed
6/6/2012	2:37:59 PM	SiCl4 pre valve closed
6/6/2012	2:37:59 PM	SiCl4 post valve closed
6/6/2012	2:37:59 PM	Bypass valve closed
6/6/2012	2:37:59 PM	Bubbler valve closed
6/6/2012	2:37:59 PM	Helium valve opened
6/6/2012	2:37:59 PM	Main Vac valve opened
6/6/2012	2:37:59 PM	Helium MFC set to  20.000000
6/6/2012	2:37:59 PM	H2 MFC set to  0.000000
6/6/2012	2:37:59 PM	BCl3 MFC set to  0.000000
6/6/2012	2:37:59 PM	PH3 MFC set to  0.000000
6/6/2012	2:37:59 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:37:59 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:37:59 PM	Tube furnace set to 0
6/6/2012	2:38:29 PM	Helium valve closed
6/6/2012	2:38:29 PM	H2 valve closed
6/6/2012	2:38:29 PM	BCl3 valve closed
6/6/2012	2:38:29 PM	PH3 valve closed
6/6/2012	2:38:29 PM	SiCl4 pre valve closed
6/6/2012	2:38:29 PM	SiCl4 post valve closed
6/6/2012	2:38:29 PM	Bypass valve closed
6/6/2012	2:38:29 PM	Bubbler valve closed
6/6/2012	2:38:29 PM	Main Vac valve opened
6/6/2012	2:38:29 PM	Helium MFC set to  0.000000
6/6/2012	2:38:29 PM	H2 MFC set to  0.000000
6/6/2012	2:38:29 PM	BCl3 MFC set to  0.000000
6/6/2012	2:38:29 PM	PH3 MFC set to  0.000000
6/6/2012	2:38:29 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:38:29 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:38:29 PM	Tube furnace set to 200
6/6/2012	2:38:59 PM	H2 valve closed
6/6/2012	2:38:59 PM	BCl3 valve closed
6/6/2012	2:38:59 PM	PH3 valve closed
6/6/2012	2:38:59 PM	SiCl4 pre valve closed
6/6/2012	2:38:59 PM	SiCl4 post valve closed
6/6/2012	2:38:59 PM	Bypass valve closed
6/6/2012	2:38:59 PM	Bubbler valve closed
6/6/2012	2:38:59 PM	Helium valve opened
6/6/2012	2:38:59 PM	Main Vac valve opened
6/6/2012	2:38:59 PM	Helium MFC set to  20.000000
6/6/2012	2:38:59 PM	H2 MFC set to  0.000000
6/6/2012	2:38:59 PM	BCl3 MFC set to  0.000000
6/6/2012	2:38:59 PM	PH3 MFC set to  0.000000
6/6/2012	2:38:59 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:38:59 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:38:59 PM	Tube furnace set to 200
6/6/2012	2:39:29 PM	Helium valve closed
6/6/2012	2:39:29 PM	H2 valve closed
6/6/2012	2:39:29 PM	BCl3 valve closed
6/6/2012	2:39:29 PM	PH3 valve closed
6/6/2012	2:39:29 PM	SiCl4 pre valve closed
6/6/2012	2:39:29 PM	SiCl4 post valve closed
6/6/2012	2:39:29 PM	Bypass valve closed
6/6/2012	2:39:29 PM	Bubbler valve closed
6/6/2012	2:39:29 PM	Main Vac valve opened
6/6/2012	2:39:29 PM	Helium MFC set to  0.000000
6/6/2012	2:39:29 PM	H2 MFC set to  0.000000
6/6/2012	2:39:29 PM	BCl3 MFC set to  0.000000
6/6/2012	2:39:29 PM	PH3 MFC set to  0.000000
6/6/2012	2:39:29 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:39:29 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:39:30 PM	Tube furnace set to 200
6/6/2012	2:40:00 PM	H2 valve closed
6/6/2012	2:40:00 PM	BCl3 valve closed
6/6/2012	2:40:00 PM	PH3 valve closed
6/6/2012	2:40:00 PM	SiCl4 pre valve closed
6/6/2012	2:40:00 PM	SiCl4 post valve closed
6/6/2012	2:40:00 PM	Bypass valve closed
6/6/2012	2:40:00 PM	Bubbler valve closed
6/6/2012	2:40:00 PM	Helium valve opened
6/6/2012	2:40:00 PM	Main Vac valve opened
6/6/2012	2:40:00 PM	Helium MFC set to  20.000000
6/6/2012	2:40:00 PM	H2 MFC set to  0.000000
6/6/2012	2:40:00 PM	BCl3 MFC set to  0.000000
6/6/2012	2:40:00 PM	PH3 MFC set to  0.000000
6/6/2012	2:40:00 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:40:00 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:40:00 PM	Tube furnace set to 200
6/6/2012	2:40:30 PM	Helium valve closed
6/6/2012	2:40:30 PM	H2 valve closed
6/6/2012	2:40:30 PM	BCl3 valve closed
6/6/2012	2:40:30 PM	PH3 valve closed
6/6/2012	2:40:30 PM	SiCl4 pre valve closed
6/6/2012	2:40:30 PM	SiCl4 post valve closed
6/6/2012	2:40:30 PM	Bypass valve closed
6/6/2012	2:40:30 PM	Bubbler valve closed
6/6/2012	2:40:30 PM	Main Vac valve opened
6/6/2012	2:40:30 PM	Helium MFC set to  0.000000
6/6/2012	2:40:30 PM	H2 MFC set to  0.000000
6/6/2012	2:40:30 PM	BCl3 MFC set to  0.000000
6/6/2012	2:40:30 PM	PH3 MFC set to  0.000000
6/6/2012	2:40:30 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:40:30 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:40:30 PM	Tube furnace set to 200
6/6/2012	2:41:00 PM	H2 valve closed
6/6/2012	2:41:00 PM	BCl3 valve closed
6/6/2012	2:41:00 PM	PH3 valve closed
6/6/2012	2:41:00 PM	SiCl4 pre valve closed
6/6/2012	2:41:00 PM	SiCl4 post valve closed
6/6/2012	2:41:00 PM	Bypass valve closed
6/6/2012	2:41:00 PM	Bubbler valve closed
6/6/2012	2:41:00 PM	Helium valve opened
6/6/2012	2:41:00 PM	Main Vac valve opened
6/6/2012	2:41:00 PM	Helium MFC set to  20.000000
6/6/2012	2:41:00 PM	H2 MFC set to  0.000000
6/6/2012	2:41:00 PM	BCl3 MFC set to  0.000000
6/6/2012	2:41:00 PM	PH3 MFC set to  0.000000
6/6/2012	2:41:00 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:41:00 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:41:00 PM	Tube furnace set to 200
6/6/2012	2:41:30 PM	Helium valve closed
6/6/2012	2:41:30 PM	H2 valve closed
6/6/2012	2:41:30 PM	BCl3 valve closed
6/6/2012	2:41:30 PM	PH3 valve closed
6/6/2012	2:41:30 PM	SiCl4 pre valve closed
6/6/2012	2:41:30 PM	SiCl4 post valve closed
6/6/2012	2:41:30 PM	Bypass valve closed
6/6/2012	2:41:30 PM	Bubbler valve closed
6/6/2012	2:41:30 PM	Main Vac valve opened
6/6/2012	2:41:30 PM	Helium MFC set to  0.000000
6/6/2012	2:41:30 PM	H2 MFC set to  0.000000
6/6/2012	2:41:30 PM	BCl3 MFC set to  0.000000
6/6/2012	2:41:30 PM	PH3 MFC set to  0.000000
6/6/2012	2:41:30 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:41:30 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:41:30 PM	Tube furnace set to 200
6/6/2012	2:42:00 PM	H2 valve closed
6/6/2012	2:42:01 PM	BCl3 valve closed
6/6/2012	2:42:01 PM	PH3 valve closed
6/6/2012	2:42:01 PM	SiCl4 pre valve closed
6/6/2012	2:42:01 PM	SiCl4 post valve closed
6/6/2012	2:42:01 PM	Bypass valve closed
6/6/2012	2:42:01 PM	Bubbler valve closed
6/6/2012	2:42:01 PM	Helium valve opened
6/6/2012	2:42:01 PM	Main Vac valve opened
6/6/2012	2:42:01 PM	Helium MFC set to  20.000000
6/6/2012	2:42:01 PM	H2 MFC set to  0.000000
6/6/2012	2:42:01 PM	BCl3 MFC set to  0.000000
6/6/2012	2:42:01 PM	PH3 MFC set to  0.000000
6/6/2012	2:42:01 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:42:01 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:42:01 PM	Tube furnace set to 200
6/6/2012	2:42:31 PM	Helium valve closed
6/6/2012	2:42:31 PM	H2 valve closed
6/6/2012	2:42:31 PM	BCl3 valve closed
6/6/2012	2:42:31 PM	PH3 valve closed
6/6/2012	2:42:31 PM	SiCl4 pre valve closed
6/6/2012	2:42:31 PM	SiCl4 post valve closed
6/6/2012	2:42:31 PM	Bypass valve closed
6/6/2012	2:42:31 PM	Bubbler valve closed
6/6/2012	2:42:31 PM	Main Vac valve opened
6/6/2012	2:42:31 PM	Helium MFC set to  0.000000
6/6/2012	2:42:31 PM	H2 MFC set to  0.000000
6/6/2012	2:42:31 PM	BCl3 MFC set to  0.000000
6/6/2012	2:42:31 PM	PH3 MFC set to  0.000000
6/6/2012	2:42:31 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:42:31 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:42:31 PM	Tube furnace set to 200
6/6/2012	2:43:01 PM	H2 valve closed
6/6/2012	2:43:01 PM	BCl3 valve closed
6/6/2012	2:43:01 PM	PH3 valve closed
6/6/2012	2:43:01 PM	SiCl4 pre valve closed
6/6/2012	2:43:01 PM	SiCl4 post valve closed
6/6/2012	2:43:01 PM	Bypass valve closed
6/6/2012	2:43:01 PM	Bubbler valve closed
6/6/2012	2:43:01 PM	Helium valve opened
6/6/2012	2:43:01 PM	Main Vac valve opened
6/6/2012	2:43:01 PM	Helium MFC set to  20.000000
6/6/2012	2:43:01 PM	H2 MFC set to  0.000000
6/6/2012	2:43:01 PM	BCl3 MFC set to  0.000000
6/6/2012	2:43:01 PM	PH3 MFC set to  0.000000
6/6/2012	2:43:01 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:43:01 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:43:01 PM	Tube furnace set to 200
6/6/2012	2:43:31 PM	Helium valve closed
6/6/2012	2:43:31 PM	H2 valve closed
6/6/2012	2:43:31 PM	BCl3 valve closed
6/6/2012	2:43:31 PM	PH3 valve closed
6/6/2012	2:43:31 PM	SiCl4 pre valve closed
6/6/2012	2:43:31 PM	SiCl4 post valve closed
6/6/2012	2:43:31 PM	Bypass valve closed
6/6/2012	2:43:31 PM	Bubbler valve closed
6/6/2012	2:43:31 PM	Main Vac valve opened
6/6/2012	2:43:31 PM	Helium MFC set to  0.000000
6/6/2012	2:43:31 PM	H2 MFC set to  0.000000
6/6/2012	2:43:31 PM	BCl3 MFC set to  0.000000
6/6/2012	2:43:31 PM	PH3 MFC set to  0.000000
6/6/2012	2:43:31 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:43:31 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:43:31 PM	Tube furnace set to 200
6/6/2012	2:44:01 PM	H2 valve closed
6/6/2012	2:44:01 PM	BCl3 valve closed
6/6/2012	2:44:01 PM	PH3 valve closed
6/6/2012	2:44:01 PM	SiCl4 pre valve closed
6/6/2012	2:44:01 PM	SiCl4 post valve closed
6/6/2012	2:44:01 PM	Bypass valve closed
6/6/2012	2:44:01 PM	Bubbler valve closed
6/6/2012	2:44:01 PM	Helium valve opened
6/6/2012	2:44:01 PM	Main Vac valve opened
6/6/2012	2:44:01 PM	Helium MFC set to  20.000000
6/6/2012	2:44:01 PM	H2 MFC set to  0.000000
6/6/2012	2:44:01 PM	BCl3 MFC set to  0.000000
6/6/2012	2:44:01 PM	PH3 MFC set to  0.000000
6/6/2012	2:44:02 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:44:02 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:44:02 PM	Tube furnace set to 200
6/6/2012	2:44:32 PM	Helium valve closed
6/6/2012	2:44:32 PM	H2 valve closed
6/6/2012	2:44:32 PM	BCl3 valve closed
6/6/2012	2:44:32 PM	PH3 valve closed
6/6/2012	2:44:32 PM	SiCl4 pre valve closed
6/6/2012	2:44:32 PM	SiCl4 post valve closed
6/6/2012	2:44:32 PM	Bypass valve closed
6/6/2012	2:44:32 PM	Bubbler valve closed
6/6/2012	2:44:32 PM	Main Vac valve opened
6/6/2012	2:44:32 PM	Helium MFC set to  0.000000
6/6/2012	2:44:32 PM	H2 MFC set to  0.000000
6/6/2012	2:44:32 PM	BCl3 MFC set to  0.000000
6/6/2012	2:44:32 PM	PH3 MFC set to  0.000000
6/6/2012	2:44:32 PM	SiCl4 MFC set to  0.000000
6/6/2012	2:44:32 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	2:44:32 PM	Tube furnace set to 0
6/6/2012	2:44:33 PM	Run finished at 2:44 PM
6/6/2012	3:20:01 PM	Recipe started at 3:19 PM
6/6/2012	3:20:01 PM	Helium valve closed
6/6/2012	3:20:01 PM	H2 valve closed
6/6/2012	3:20:01 PM	BCl3 valve closed
6/6/2012	3:20:01 PM	PH3 valve closed
6/6/2012	3:20:01 PM	SiCl4 pre valve closed
6/6/2012	3:20:01 PM	SiCl4 post valve closed
6/6/2012	3:20:01 PM	Bypass valve closed
6/6/2012	3:20:01 PM	Bubbler valve closed
6/6/2012	3:20:01 PM	Main Vac valve opened
6/6/2012	3:20:01 PM	Helium MFC set to  0.000000
6/6/2012	3:20:01 PM	H2 MFC set to  0.000000
6/6/2012	3:20:01 PM	BCl3 MFC set to  0.000000
6/6/2012	3:20:01 PM	PH3 MFC set to  0.000000
6/6/2012	3:20:01 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:20:01 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:20:01 PM	Tube furnace set to 0
6/6/2012	3:20:03 PM	H2 valve closed
6/6/2012	3:20:03 PM	BCl3 valve closed
6/6/2012	3:20:03 PM	PH3 valve closed
6/6/2012	3:20:03 PM	SiCl4 pre valve closed
6/6/2012	3:20:03 PM	SiCl4 post valve closed
6/6/2012	3:20:03 PM	Bypass valve closed
6/6/2012	3:20:03 PM	Bubbler valve closed
6/6/2012	3:20:03 PM	Helium valve opened
6/6/2012	3:20:03 PM	Main Vac valve opened
6/6/2012	3:20:03 PM	Helium MFC set to  20.000000
6/6/2012	3:20:03 PM	H2 MFC set to  0.000000
6/6/2012	3:20:03 PM	BCl3 MFC set to  0.000000
6/6/2012	3:20:03 PM	PH3 MFC set to  0.000000
6/6/2012	3:20:03 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:20:03 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:20:03 PM	Tube furnace set to 0
6/6/2012	3:20:33 PM	Helium valve closed
6/6/2012	3:20:33 PM	H2 valve closed
6/6/2012	3:20:33 PM	BCl3 valve closed
6/6/2012	3:20:33 PM	PH3 valve closed
6/6/2012	3:20:33 PM	SiCl4 pre valve closed
6/6/2012	3:20:33 PM	SiCl4 post valve closed
6/6/2012	3:20:33 PM	Bypass valve closed
6/6/2012	3:20:33 PM	Bubbler valve closed
6/6/2012	3:20:33 PM	Main Vac valve opened
6/6/2012	3:20:33 PM	Helium MFC set to  0.000000
6/6/2012	3:20:33 PM	H2 MFC set to  0.000000
6/6/2012	3:20:33 PM	BCl3 MFC set to  0.000000
6/6/2012	3:20:33 PM	PH3 MFC set to  0.000000
6/6/2012	3:20:33 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:20:33 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:20:33 PM	Tube furnace set to 0
6/6/2012	3:21:03 PM	H2 valve closed
6/6/2012	3:21:03 PM	BCl3 valve closed
6/6/2012	3:21:03 PM	PH3 valve closed
6/6/2012	3:21:03 PM	SiCl4 pre valve closed
6/6/2012	3:21:03 PM	SiCl4 post valve closed
6/6/2012	3:21:03 PM	Bypass valve closed
6/6/2012	3:21:03 PM	Bubbler valve closed
6/6/2012	3:21:03 PM	Helium valve opened
6/6/2012	3:21:03 PM	Main Vac valve opened
6/6/2012	3:21:03 PM	Helium MFC set to  20.000000
6/6/2012	3:21:03 PM	H2 MFC set to  0.000000
6/6/2012	3:21:03 PM	BCl3 MFC set to  0.000000
6/6/2012	3:21:03 PM	PH3 MFC set to  0.000000
6/6/2012	3:21:03 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:21:03 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:21:03 PM	Tube furnace set to 0
6/6/2012	3:21:33 PM	Helium valve closed
6/6/2012	3:21:33 PM	H2 valve closed
6/6/2012	3:21:33 PM	BCl3 valve closed
6/6/2012	3:21:33 PM	PH3 valve closed
6/6/2012	3:21:33 PM	SiCl4 pre valve closed
6/6/2012	3:21:33 PM	SiCl4 post valve closed
6/6/2012	3:21:33 PM	Bypass valve closed
6/6/2012	3:21:33 PM	Bubbler valve closed
6/6/2012	3:21:33 PM	Main Vac valve opened
6/6/2012	3:21:33 PM	Helium MFC set to  0.000000
6/6/2012	3:21:33 PM	H2 MFC set to  0.000000
6/6/2012	3:21:33 PM	BCl3 MFC set to  0.000000
6/6/2012	3:21:33 PM	PH3 MFC set to  0.000000
6/6/2012	3:21:33 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:21:33 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:21:33 PM	Tube furnace set to 0
6/6/2012	3:22:03 PM	H2 valve closed
6/6/2012	3:22:03 PM	BCl3 valve closed
6/6/2012	3:22:03 PM	PH3 valve closed
6/6/2012	3:22:03 PM	SiCl4 pre valve closed
6/6/2012	3:22:03 PM	SiCl4 post valve closed
6/6/2012	3:22:03 PM	Bypass valve closed
6/6/2012	3:22:03 PM	Bubbler valve closed
6/6/2012	3:22:03 PM	Helium valve opened
6/6/2012	3:22:03 PM	Main Vac valve opened
6/6/2012	3:22:03 PM	Helium MFC set to  20.000000
6/6/2012	3:22:03 PM	H2 MFC set to  0.000000
6/6/2012	3:22:03 PM	BCl3 MFC set to  0.000000
6/6/2012	3:22:04 PM	PH3 MFC set to  0.000000
6/6/2012	3:22:04 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:22:04 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:22:04 PM	Tube furnace set to 0
6/6/2012	3:22:34 PM	Helium valve closed
6/6/2012	3:22:34 PM	H2 valve closed
6/6/2012	3:22:34 PM	BCl3 valve closed
6/6/2012	3:22:34 PM	PH3 valve closed
6/6/2012	3:22:34 PM	SiCl4 pre valve closed
6/6/2012	3:22:34 PM	SiCl4 post valve closed
6/6/2012	3:22:34 PM	Bypass valve closed
6/6/2012	3:22:34 PM	Bubbler valve closed
6/6/2012	3:22:34 PM	Main Vac valve opened
6/6/2012	3:22:34 PM	Helium MFC set to  0.000000
6/6/2012	3:22:34 PM	H2 MFC set to  0.000000
6/6/2012	3:22:34 PM	BCl3 MFC set to  0.000000
6/6/2012	3:22:34 PM	PH3 MFC set to  0.000000
6/6/2012	3:22:34 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:22:34 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:22:34 PM	Tube furnace set to 0
6/6/2012	3:23:04 PM	H2 valve closed
6/6/2012	3:23:04 PM	BCl3 valve closed
6/6/2012	3:23:04 PM	PH3 valve closed
6/6/2012	3:23:04 PM	SiCl4 pre valve closed
6/6/2012	3:23:04 PM	SiCl4 post valve closed
6/6/2012	3:23:04 PM	Bypass valve closed
6/6/2012	3:23:04 PM	Bubbler valve closed
6/6/2012	3:23:04 PM	Helium valve opened
6/6/2012	3:23:04 PM	Main Vac valve opened
6/6/2012	3:23:04 PM	Helium MFC set to  20.000000
6/6/2012	3:23:04 PM	H2 MFC set to  0.000000
6/6/2012	3:23:04 PM	BCl3 MFC set to  0.000000
6/6/2012	3:23:04 PM	PH3 MFC set to  0.000000
6/6/2012	3:23:04 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:23:04 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:23:04 PM	Tube furnace set to 0
6/6/2012	3:23:34 PM	Helium valve closed
6/6/2012	3:23:34 PM	H2 valve closed
6/6/2012	3:23:34 PM	BCl3 valve closed
6/6/2012	3:23:34 PM	PH3 valve closed
6/6/2012	3:23:34 PM	SiCl4 pre valve closed
6/6/2012	3:23:34 PM	SiCl4 post valve closed
6/6/2012	3:23:34 PM	Bypass valve closed
6/6/2012	3:23:34 PM	Bubbler valve closed
6/6/2012	3:23:34 PM	Main Vac valve opened
6/6/2012	3:23:34 PM	Helium MFC set to  0.000000
6/6/2012	3:23:34 PM	H2 MFC set to  0.000000
6/6/2012	3:23:34 PM	BCl3 MFC set to  0.000000
6/6/2012	3:23:34 PM	PH3 MFC set to  0.000000
6/6/2012	3:23:34 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:23:34 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:23:34 PM	Tube furnace set to 0
6/6/2012	3:24:04 PM	H2 valve closed
6/6/2012	3:24:04 PM	BCl3 valve closed
6/6/2012	3:24:04 PM	PH3 valve closed
6/6/2012	3:24:04 PM	SiCl4 pre valve closed
6/6/2012	3:24:04 PM	SiCl4 post valve closed
6/6/2012	3:24:04 PM	Bypass valve closed
6/6/2012	3:24:04 PM	Bubbler valve closed
6/6/2012	3:24:04 PM	Helium valve opened
6/6/2012	3:24:04 PM	Main Vac valve opened
6/6/2012	3:24:04 PM	Helium MFC set to  20.000000
6/6/2012	3:24:04 PM	H2 MFC set to  0.000000
6/6/2012	3:24:04 PM	BCl3 MFC set to  0.000000
6/6/2012	3:24:04 PM	PH3 MFC set to  0.000000
6/6/2012	3:24:04 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:24:04 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:24:05 PM	Tube furnace set to 0
6/6/2012	3:24:35 PM	Helium valve closed
6/6/2012	3:24:35 PM	H2 valve closed
6/6/2012	3:24:35 PM	BCl3 valve closed
6/6/2012	3:24:35 PM	PH3 valve closed
6/6/2012	3:24:35 PM	SiCl4 pre valve closed
6/6/2012	3:24:35 PM	SiCl4 post valve closed
6/6/2012	3:24:35 PM	Bypass valve closed
6/6/2012	3:24:35 PM	Bubbler valve closed
6/6/2012	3:24:35 PM	Main Vac valve opened
6/6/2012	3:24:35 PM	Helium MFC set to  0.000000
6/6/2012	3:24:35 PM	H2 MFC set to  0.000000
6/6/2012	3:24:35 PM	BCl3 MFC set to  0.000000
6/6/2012	3:24:35 PM	PH3 MFC set to  0.000000
6/6/2012	3:24:35 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:24:35 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:24:35 PM	Tube furnace set to 0
6/6/2012	3:25:05 PM	H2 valve closed
6/6/2012	3:25:05 PM	BCl3 valve closed
6/6/2012	3:25:05 PM	PH3 valve closed
6/6/2012	3:25:05 PM	SiCl4 pre valve closed
6/6/2012	3:25:05 PM	SiCl4 post valve closed
6/6/2012	3:25:05 PM	Bypass valve closed
6/6/2012	3:25:05 PM	Bubbler valve closed
6/6/2012	3:25:05 PM	Helium valve opened
6/6/2012	3:25:05 PM	Main Vac valve opened
6/6/2012	3:25:05 PM	Helium MFC set to  20.000000
6/6/2012	3:25:05 PM	H2 MFC set to  0.000000
6/6/2012	3:25:05 PM	BCl3 MFC set to  0.000000
6/6/2012	3:25:05 PM	PH3 MFC set to  0.000000
6/6/2012	3:25:05 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:25:05 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:25:05 PM	Tube furnace set to 0
6/6/2012	3:25:35 PM	Helium valve closed
6/6/2012	3:25:35 PM	H2 valve closed
6/6/2012	3:25:35 PM	BCl3 valve closed
6/6/2012	3:25:35 PM	PH3 valve closed
6/6/2012	3:25:35 PM	SiCl4 pre valve closed
6/6/2012	3:25:35 PM	SiCl4 post valve closed
6/6/2012	3:25:35 PM	Bypass valve closed
6/6/2012	3:25:35 PM	Bubbler valve closed
6/6/2012	3:25:35 PM	Main Vac valve opened
6/6/2012	3:25:35 PM	Helium MFC set to  0.000000
6/6/2012	3:25:35 PM	H2 MFC set to  0.000000
6/6/2012	3:25:35 PM	BCl3 MFC set to  0.000000
6/6/2012	3:25:35 PM	PH3 MFC set to  0.000000
6/6/2012	3:25:35 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:25:35 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:25:35 PM	Tube furnace set to 0
6/6/2012	3:26:05 PM	H2 valve closed
6/6/2012	3:26:05 PM	BCl3 valve closed
6/6/2012	3:26:05 PM	PH3 valve closed
6/6/2012	3:26:05 PM	SiCl4 pre valve closed
6/6/2012	3:26:05 PM	SiCl4 post valve closed
6/6/2012	3:26:05 PM	Bypass valve closed
6/6/2012	3:26:05 PM	Bubbler valve closed
6/6/2012	3:26:05 PM	Helium valve opened
6/6/2012	3:26:05 PM	Main Vac valve opened
6/6/2012	3:26:05 PM	Helium MFC set to  20.000000
6/6/2012	3:26:05 PM	H2 MFC set to  0.000000
6/6/2012	3:26:05 PM	BCl3 MFC set to  0.000000
6/6/2012	3:26:05 PM	PH3 MFC set to  0.000000
6/6/2012	3:26:05 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:26:05 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:26:06 PM	Tube furnace set to 0
6/6/2012	3:26:36 PM	Helium valve closed
6/6/2012	3:26:36 PM	H2 valve closed
6/6/2012	3:26:36 PM	BCl3 valve closed
6/6/2012	3:26:36 PM	PH3 valve closed
6/6/2012	3:26:36 PM	SiCl4 pre valve closed
6/6/2012	3:26:36 PM	SiCl4 post valve closed
6/6/2012	3:26:36 PM	Bypass valve closed
6/6/2012	3:26:36 PM	Bubbler valve closed
6/6/2012	3:26:36 PM	Main Vac valve opened
6/6/2012	3:26:36 PM	Helium MFC set to  0.000000
6/6/2012	3:26:36 PM	H2 MFC set to  0.000000
6/6/2012	3:26:36 PM	BCl3 MFC set to  0.000000
6/6/2012	3:26:36 PM	PH3 MFC set to  0.000000
6/6/2012	3:26:36 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:26:36 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:26:36 PM	Tube furnace set to 0
6/6/2012	3:27:06 PM	H2 valve closed
6/6/2012	3:27:06 PM	BCl3 valve closed
6/6/2012	3:27:06 PM	PH3 valve closed
6/6/2012	3:27:06 PM	SiCl4 pre valve closed
6/6/2012	3:27:06 PM	SiCl4 post valve closed
6/6/2012	3:27:06 PM	Bypass valve closed
6/6/2012	3:27:06 PM	Bubbler valve closed
6/6/2012	3:27:06 PM	Helium valve opened
6/6/2012	3:27:06 PM	Main Vac valve opened
6/6/2012	3:27:06 PM	Helium MFC set to  20.000000
6/6/2012	3:27:06 PM	H2 MFC set to  0.000000
6/6/2012	3:27:06 PM	BCl3 MFC set to  0.000000
6/6/2012	3:27:06 PM	PH3 MFC set to  0.000000
6/6/2012	3:27:06 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:27:06 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:27:06 PM	Tube furnace set to 0
6/6/2012	3:27:36 PM	Helium valve closed
6/6/2012	3:27:36 PM	H2 valve closed
6/6/2012	3:27:36 PM	BCl3 valve closed
6/6/2012	3:27:36 PM	PH3 valve closed
6/6/2012	3:27:36 PM	SiCl4 pre valve closed
6/6/2012	3:27:36 PM	SiCl4 post valve closed
6/6/2012	3:27:36 PM	Bypass valve closed
6/6/2012	3:27:36 PM	Bubbler valve closed
6/6/2012	3:27:36 PM	Main Vac valve opened
6/6/2012	3:27:36 PM	Helium MFC set to  0.000000
6/6/2012	3:27:36 PM	H2 MFC set to  0.000000
6/6/2012	3:27:36 PM	BCl3 MFC set to  0.000000
6/6/2012	3:27:36 PM	PH3 MFC set to  0.000000
6/6/2012	3:27:36 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:27:36 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:27:36 PM	Tube furnace set to 0
6/6/2012	3:28:06 PM	H2 valve closed
6/6/2012	3:28:06 PM	BCl3 valve closed
6/6/2012	3:28:06 PM	PH3 valve closed
6/6/2012	3:28:06 PM	SiCl4 pre valve closed
6/6/2012	3:28:06 PM	SiCl4 post valve closed
6/6/2012	3:28:06 PM	Bypass valve closed
6/6/2012	3:28:06 PM	Bubbler valve closed
6/6/2012	3:28:06 PM	Helium valve opened
6/6/2012	3:28:06 PM	Main Vac valve opened
6/6/2012	3:28:06 PM	Helium MFC set to  20.000000
6/6/2012	3:28:06 PM	H2 MFC set to  0.000000
6/6/2012	3:28:06 PM	BCl3 MFC set to  0.000000
6/6/2012	3:28:06 PM	PH3 MFC set to  0.000000
6/6/2012	3:28:06 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:28:06 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:28:06 PM	Tube furnace set to 0
6/6/2012	3:28:37 PM	Helium valve closed
6/6/2012	3:28:37 PM	H2 valve closed
6/6/2012	3:28:37 PM	BCl3 valve closed
6/6/2012	3:28:37 PM	PH3 valve closed
6/6/2012	3:28:37 PM	SiCl4 pre valve closed
6/6/2012	3:28:37 PM	SiCl4 post valve closed
6/6/2012	3:28:37 PM	Bypass valve closed
6/6/2012	3:28:37 PM	Bubbler valve closed
6/6/2012	3:28:37 PM	Main Vac valve opened
6/6/2012	3:28:37 PM	Helium MFC set to  0.000000
6/6/2012	3:28:37 PM	H2 MFC set to  0.000000
6/6/2012	3:28:37 PM	BCl3 MFC set to  0.000000
6/6/2012	3:28:37 PM	PH3 MFC set to  0.000000
6/6/2012	3:28:37 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:28:37 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:28:37 PM	Tube furnace set to 200
6/6/2012	3:29:07 PM	H2 valve closed
6/6/2012	3:29:07 PM	BCl3 valve closed
6/6/2012	3:29:07 PM	PH3 valve closed
6/6/2012	3:29:07 PM	SiCl4 pre valve closed
6/6/2012	3:29:07 PM	SiCl4 post valve closed
6/6/2012	3:29:07 PM	Bypass valve closed
6/6/2012	3:29:07 PM	Bubbler valve closed
6/6/2012	3:29:07 PM	Helium valve opened
6/6/2012	3:29:07 PM	Main Vac valve opened
6/6/2012	3:29:07 PM	Helium MFC set to  20.000000
6/6/2012	3:29:07 PM	H2 MFC set to  0.000000
6/6/2012	3:29:07 PM	BCl3 MFC set to  0.000000
6/6/2012	3:29:07 PM	PH3 MFC set to  0.000000
6/6/2012	3:29:07 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:29:07 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:29:07 PM	Tube furnace set to 200
6/6/2012	3:29:37 PM	Helium valve closed
6/6/2012	3:29:37 PM	H2 valve closed
6/6/2012	3:29:37 PM	BCl3 valve closed
6/6/2012	3:29:37 PM	PH3 valve closed
6/6/2012	3:29:37 PM	SiCl4 pre valve closed
6/6/2012	3:29:37 PM	SiCl4 post valve closed
6/6/2012	3:29:37 PM	Bypass valve closed
6/6/2012	3:29:37 PM	Bubbler valve closed
6/6/2012	3:29:37 PM	Main Vac valve opened
6/6/2012	3:29:37 PM	Helium MFC set to  0.000000
6/6/2012	3:29:37 PM	H2 MFC set to  0.000000
6/6/2012	3:29:37 PM	BCl3 MFC set to  0.000000
6/6/2012	3:29:37 PM	PH3 MFC set to  0.000000
6/6/2012	3:29:37 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:29:37 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:29:37 PM	Tube furnace set to 200
6/6/2012	3:30:07 PM	H2 valve closed
6/6/2012	3:30:07 PM	BCl3 valve closed
6/6/2012	3:30:07 PM	PH3 valve closed
6/6/2012	3:30:07 PM	SiCl4 pre valve closed
6/6/2012	3:30:07 PM	SiCl4 post valve closed
6/6/2012	3:30:07 PM	Bypass valve closed
6/6/2012	3:30:07 PM	Bubbler valve closed
6/6/2012	3:30:07 PM	Helium valve opened
6/6/2012	3:30:07 PM	Main Vac valve opened
6/6/2012	3:30:07 PM	Helium MFC set to  20.000000
6/6/2012	3:30:07 PM	H2 MFC set to  0.000000
6/6/2012	3:30:07 PM	BCl3 MFC set to  0.000000
6/6/2012	3:30:07 PM	PH3 MFC set to  0.000000
6/6/2012	3:30:07 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:30:07 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:30:07 PM	Tube furnace set to 200
6/6/2012	3:30:37 PM	Helium valve closed
6/6/2012	3:30:37 PM	H2 valve closed
6/6/2012	3:30:37 PM	BCl3 valve closed
6/6/2012	3:30:37 PM	PH3 valve closed
6/6/2012	3:30:37 PM	SiCl4 pre valve closed
6/6/2012	3:30:37 PM	SiCl4 post valve closed
6/6/2012	3:30:37 PM	Bypass valve closed
6/6/2012	3:30:37 PM	Bubbler valve closed
6/6/2012	3:30:37 PM	Main Vac valve opened
6/6/2012	3:30:37 PM	Helium MFC set to  0.000000
6/6/2012	3:30:38 PM	H2 MFC set to  0.000000
6/6/2012	3:30:38 PM	BCl3 MFC set to  0.000000
6/6/2012	3:30:38 PM	PH3 MFC set to  0.000000
6/6/2012	3:30:38 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:30:38 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:30:38 PM	Tube furnace set to 200
6/6/2012	3:31:08 PM	H2 valve closed
6/6/2012	3:31:08 PM	BCl3 valve closed
6/6/2012	3:31:08 PM	PH3 valve closed
6/6/2012	3:31:08 PM	SiCl4 pre valve closed
6/6/2012	3:31:08 PM	SiCl4 post valve closed
6/6/2012	3:31:08 PM	Bypass valve closed
6/6/2012	3:31:08 PM	Bubbler valve closed
6/6/2012	3:31:08 PM	Helium valve opened
6/6/2012	3:31:08 PM	Main Vac valve opened
6/6/2012	3:31:08 PM	Helium MFC set to  20.000000
6/6/2012	3:31:08 PM	H2 MFC set to  0.000000
6/6/2012	3:31:08 PM	BCl3 MFC set to  0.000000
6/6/2012	3:31:08 PM	PH3 MFC set to  0.000000
6/6/2012	3:31:08 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:31:08 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:31:08 PM	Tube furnace set to 200
6/6/2012	3:31:38 PM	Helium valve closed
6/6/2012	3:31:38 PM	H2 valve closed
6/6/2012	3:31:38 PM	BCl3 valve closed
6/6/2012	3:31:38 PM	PH3 valve closed
6/6/2012	3:31:38 PM	SiCl4 pre valve closed
6/6/2012	3:31:38 PM	SiCl4 post valve closed
6/6/2012	3:31:38 PM	Bypass valve closed
6/6/2012	3:31:38 PM	Bubbler valve closed
6/6/2012	3:31:38 PM	Main Vac valve opened
6/6/2012	3:31:38 PM	Helium MFC set to  0.000000
6/6/2012	3:31:38 PM	H2 MFC set to  0.000000
6/6/2012	3:31:38 PM	BCl3 MFC set to  0.000000
6/6/2012	3:31:38 PM	PH3 MFC set to  0.000000
6/6/2012	3:31:38 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:31:38 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:31:38 PM	Tube furnace set to 200
6/6/2012	3:32:08 PM	H2 valve closed
6/6/2012	3:32:08 PM	BCl3 valve closed
6/6/2012	3:32:08 PM	PH3 valve closed
6/6/2012	3:32:08 PM	SiCl4 pre valve closed
6/6/2012	3:32:08 PM	SiCl4 post valve closed
6/6/2012	3:32:08 PM	Bypass valve closed
6/6/2012	3:32:08 PM	Bubbler valve closed
6/6/2012	3:32:08 PM	Helium valve opened
6/6/2012	3:32:08 PM	Main Vac valve opened
6/6/2012	3:32:08 PM	Helium MFC set to  20.000000
6/6/2012	3:32:08 PM	H2 MFC set to  0.000000
6/6/2012	3:32:08 PM	BCl3 MFC set to  0.000000
6/6/2012	3:32:08 PM	PH3 MFC set to  0.000000
6/6/2012	3:32:08 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:32:08 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:32:08 PM	Tube furnace set to 200
6/6/2012	3:32:38 PM	Helium valve closed
6/6/2012	3:32:38 PM	H2 valve closed
6/6/2012	3:32:38 PM	BCl3 valve closed
6/6/2012	3:32:38 PM	PH3 valve closed
6/6/2012	3:32:38 PM	SiCl4 pre valve closed
6/6/2012	3:32:38 PM	SiCl4 post valve closed
6/6/2012	3:32:38 PM	Bypass valve closed
6/6/2012	3:32:38 PM	Bubbler valve closed
6/6/2012	3:32:38 PM	Main Vac valve opened
6/6/2012	3:32:38 PM	Helium MFC set to  0.000000
6/6/2012	3:32:38 PM	H2 MFC set to  0.000000
6/6/2012	3:32:38 PM	BCl3 MFC set to  0.000000
6/6/2012	3:32:38 PM	PH3 MFC set to  0.000000
6/6/2012	3:32:38 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:32:38 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:32:39 PM	Tube furnace set to 200
6/6/2012	3:33:09 PM	H2 valve closed
6/6/2012	3:33:09 PM	BCl3 valve closed
6/6/2012	3:33:09 PM	PH3 valve closed
6/6/2012	3:33:09 PM	SiCl4 pre valve closed
6/6/2012	3:33:09 PM	SiCl4 post valve closed
6/6/2012	3:33:09 PM	Bypass valve closed
6/6/2012	3:33:09 PM	Bubbler valve closed
6/6/2012	3:33:09 PM	Helium valve opened
6/6/2012	3:33:09 PM	Main Vac valve opened
6/6/2012	3:33:09 PM	Helium MFC set to  20.000000
6/6/2012	3:33:09 PM	H2 MFC set to  0.000000
6/6/2012	3:33:09 PM	BCl3 MFC set to  0.000000
6/6/2012	3:33:09 PM	PH3 MFC set to  0.000000
6/6/2012	3:33:09 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:33:09 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:33:09 PM	Tube furnace set to 200
6/6/2012	3:33:39 PM	Helium valve closed
6/6/2012	3:33:39 PM	H2 valve closed
6/6/2012	3:33:39 PM	BCl3 valve closed
6/6/2012	3:33:39 PM	PH3 valve closed
6/6/2012	3:33:39 PM	SiCl4 pre valve closed
6/6/2012	3:33:39 PM	SiCl4 post valve closed
6/6/2012	3:33:39 PM	Bypass valve closed
6/6/2012	3:33:39 PM	Bubbler valve closed
6/6/2012	3:33:39 PM	Main Vac valve opened
6/6/2012	3:33:39 PM	Helium MFC set to  0.000000
6/6/2012	3:33:39 PM	H2 MFC set to  0.000000
6/6/2012	3:33:39 PM	BCl3 MFC set to  0.000000
6/6/2012	3:33:39 PM	PH3 MFC set to  0.000000
6/6/2012	3:33:39 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:33:39 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:33:39 PM	Tube furnace set to 200
6/6/2012	3:34:09 PM	H2 valve closed
6/6/2012	3:34:09 PM	BCl3 valve closed
6/6/2012	3:34:09 PM	PH3 valve closed
6/6/2012	3:34:09 PM	SiCl4 pre valve closed
6/6/2012	3:34:09 PM	SiCl4 post valve closed
6/6/2012	3:34:09 PM	Bypass valve closed
6/6/2012	3:34:09 PM	Bubbler valve closed
6/6/2012	3:34:09 PM	Helium valve opened
6/6/2012	3:34:09 PM	Main Vac valve opened
6/6/2012	3:34:09 PM	Helium MFC set to  20.000000
6/6/2012	3:34:09 PM	H2 MFC set to  0.000000
6/6/2012	3:34:09 PM	BCl3 MFC set to  0.000000
6/6/2012	3:34:09 PM	PH3 MFC set to  0.000000
6/6/2012	3:34:09 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:34:09 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:34:09 PM	Tube furnace set to 200
6/6/2012	3:34:39 PM	Helium valve closed
6/6/2012	3:34:39 PM	H2 valve closed
6/6/2012	3:34:39 PM	BCl3 valve closed
6/6/2012	3:34:39 PM	PH3 valve closed
6/6/2012	3:34:39 PM	SiCl4 pre valve closed
6/6/2012	3:34:39 PM	SiCl4 post valve closed
6/6/2012	3:34:39 PM	Bypass valve closed
6/6/2012	3:34:39 PM	Bubbler valve closed
6/6/2012	3:34:39 PM	Main Vac valve opened
6/6/2012	3:34:39 PM	Helium MFC set to  0.000000
6/6/2012	3:34:39 PM	H2 MFC set to  0.000000
6/6/2012	3:34:39 PM	BCl3 MFC set to  0.000000
6/6/2012	3:34:39 PM	PH3 MFC set to  0.000000
6/6/2012	3:34:39 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:34:39 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:34:40 PM	Tube furnace set to 0
6/6/2012	3:34:41 PM	Run finished at 3:34 PM
6/6/2012	3:42:23 PM	Main Vac valve closed
6/6/2012	3:42:45 PM	Main Vac valve opened
6/6/2012	3:43:40 PM	Recipe started at 3:43 PM
6/6/2012	3:43:40 PM	Helium valve closed
6/6/2012	3:43:40 PM	H2 valve closed
6/6/2012	3:43:40 PM	BCl3 valve closed
6/6/2012	3:43:40 PM	PH3 valve closed
6/6/2012	3:43:40 PM	SiCl4 pre valve closed
6/6/2012	3:43:40 PM	SiCl4 post valve closed
6/6/2012	3:43:40 PM	Main Vac valve closed
6/6/2012	3:43:40 PM	Bypass valve closed
6/6/2012	3:43:40 PM	Bubbler valve closed
6/6/2012	3:43:40 PM	Helium MFC set to  0.000000
6/6/2012	3:43:40 PM	H2 MFC set to  0.000000
6/6/2012	3:43:40 PM	BCl3 MFC set to  0.000000
6/6/2012	3:43:40 PM	PH3 MFC set to  0.000000
6/6/2012	3:43:40 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:43:40 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:43:41 PM	Tube furnace set to 0
6/6/2012	3:43:44 PM	Helium valve closed
6/6/2012	3:43:44 PM	BCl3 valve closed
6/6/2012	3:43:44 PM	PH3 valve closed
6/6/2012	3:43:44 PM	SiCl4 pre valve closed
6/6/2012	3:43:44 PM	SiCl4 post valve closed
6/6/2012	3:43:44 PM	Main Vac valve closed
6/6/2012	3:43:44 PM	Bypass valve closed
6/6/2012	3:43:44 PM	Bubbler valve closed
6/6/2012	3:43:44 PM	H2 valve opened
6/6/2012	3:43:44 PM	Helium MFC set to  0.000000
6/6/2012	3:43:44 PM	H2 MFC set to  500.000000
6/6/2012	3:43:44 PM	BCl3 MFC set to  0.000000
6/6/2012	3:43:44 PM	PH3 MFC set to  0.000000
6/6/2012	3:43:44 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:43:44 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:43:44 PM	Tube furnace set to 0
6/6/2012	3:44:56 PM	Helium valve closed
6/6/2012	3:44:56 PM	BCl3 valve closed
6/6/2012	3:44:56 PM	PH3 valve closed
6/6/2012	3:44:56 PM	SiCl4 pre valve closed
6/6/2012	3:44:56 PM	SiCl4 post valve closed
6/6/2012	3:44:56 PM	Main Vac valve closed
6/6/2012	3:44:56 PM	Bypass valve closed
6/6/2012	3:44:56 PM	H2 valve opened
6/6/2012	3:44:56 PM	Bubbler valve opened
6/6/2012	3:44:56 PM	Helium MFC set to  0.000000
6/6/2012	3:44:56 PM	H2 MFC set to  500.000000
6/6/2012	3:44:56 PM	BCl3 MFC set to  0.000000
6/6/2012	3:44:56 PM	PH3 MFC set to  0.000000
6/6/2012	3:44:56 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:44:56 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:44:56 PM	Tube furnace set to 0
6/6/2012	3:44:57 PM	Helium valve closed
6/6/2012	3:44:57 PM	BCl3 valve closed
6/6/2012	3:44:57 PM	PH3 valve closed
6/6/2012	3:44:57 PM	SiCl4 pre valve closed
6/6/2012	3:44:57 PM	SiCl4 post valve closed
6/6/2012	3:44:57 PM	Main Vac valve closed
6/6/2012	3:44:57 PM	Bypass valve closed
6/6/2012	3:44:57 PM	H2 valve opened
6/6/2012	3:44:57 PM	Bubbler valve opened
6/6/2012	3:44:57 PM	Helium MFC set to  0.000000
6/6/2012	3:44:57 PM	H2 MFC set to  500.000000
6/6/2012	3:44:57 PM	BCl3 MFC set to  0.000000
6/6/2012	3:44:57 PM	PH3 MFC set to  0.000000
6/6/2012	3:44:57 PM	SiCl4 MFC set to  0.000000
6/6/2012	3:44:57 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	3:44:57 PM	Tube furnace set to 1000
6/6/2012	4:04:57 PM	Helium valve closed
6/6/2012	4:04:57 PM	BCl3 valve closed
6/6/2012	4:04:57 PM	Main Vac valve closed
6/6/2012	4:04:57 PM	Bypass valve closed
6/6/2012	4:04:57 PM	H2 valve opened
6/6/2012	4:04:57 PM	PH3 valve opened
6/6/2012	4:04:57 PM	SiCl4 pre valve opened
6/6/2012	4:04:57 PM	SiCl4 post valve opened
6/6/2012	4:04:57 PM	Bubbler valve opened
6/6/2012	4:04:57 PM	Helium MFC set to  0.000000
6/6/2012	4:04:57 PM	H2 MFC set to  500.000000
6/6/2012	4:04:57 PM	BCl3 MFC set to  0.000000
6/6/2012	4:04:57 PM	PH3 MFC set to  20.000000
6/6/2012	4:04:57 PM	SiCl4 MFC set to  25.000000
6/6/2012	4:04:57 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	4:04:58 PM	Tube furnace set to 1000
6/6/2012	4:06:28 PM	Helium valve closed
6/6/2012	4:06:28 PM	BCl3 valve closed
6/6/2012	4:06:28 PM	PH3 valve closed
6/6/2012	4:06:28 PM	Main Vac valve closed
6/6/2012	4:06:28 PM	Bypass valve closed
6/6/2012	4:06:28 PM	H2 valve opened
6/6/2012	4:06:28 PM	SiCl4 pre valve opened
6/6/2012	4:06:28 PM	SiCl4 post valve opened
6/6/2012	4:06:28 PM	Bubbler valve opened
6/6/2012	4:06:28 PM	Helium MFC set to  0.000000
6/6/2012	4:06:28 PM	H2 MFC set to  500.000000
6/6/2012	4:06:28 PM	BCl3 MFC set to  0.000000
6/6/2012	4:06:28 PM	PH3 MFC set to  0.000000
6/6/2012	4:06:28 PM	SiCl4 MFC set to  25.000000
6/6/2012	4:06:28 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	4:06:28 PM	Tube furnace set to 1000
6/6/2012	4:24:28 PM	Helium valve closed
6/6/2012	4:24:28 PM	BCl3 valve closed
6/6/2012	4:24:28 PM	PH3 valve closed
6/6/2012	4:24:28 PM	SiCl4 pre valve closed
6/6/2012	4:24:28 PM	SiCl4 post valve closed
6/6/2012	4:24:28 PM	Main Vac valve closed
6/6/2012	4:24:28 PM	Bypass valve closed
6/6/2012	4:24:28 PM	H2 valve opened
6/6/2012	4:24:28 PM	Bubbler valve opened
6/6/2012	4:24:28 PM	Helium MFC set to  0.000000
6/6/2012	4:24:28 PM	H2 MFC set to  500.000000
6/6/2012	4:24:28 PM	BCl3 MFC set to  0.000000
6/6/2012	4:24:28 PM	PH3 MFC set to  0.000000
6/6/2012	4:24:28 PM	SiCl4 MFC set to  0.000000
6/6/2012	4:24:28 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	4:24:28 PM	Tube furnace set to 950
6/6/2012	4:26:28 PM	Helium valve closed
6/6/2012	4:26:28 PM	BCl3 valve closed
6/6/2012	4:26:28 PM	PH3 valve closed
6/6/2012	4:26:28 PM	SiCl4 pre valve closed
6/6/2012	4:26:28 PM	SiCl4 post valve closed
6/6/2012	4:26:28 PM	Main Vac valve closed
6/6/2012	4:26:28 PM	Bypass valve closed
6/6/2012	4:26:28 PM	H2 valve opened
6/6/2012	4:26:28 PM	Bubbler valve opened
6/6/2012	4:26:28 PM	Helium MFC set to  0.000000
6/6/2012	4:26:28 PM	H2 MFC set to  500.000000
6/6/2012	4:26:28 PM	BCl3 MFC set to  0.000000
6/6/2012	4:26:28 PM	PH3 MFC set to  0.000000
6/6/2012	4:26:28 PM	SiCl4 MFC set to  0.000000
6/6/2012	4:26:28 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	4:26:28 PM	Tube furnace set to 900
6/6/2012	4:28:28 PM	Helium valve closed
6/6/2012	4:28:28 PM	BCl3 valve closed
6/6/2012	4:28:28 PM	PH3 valve closed
6/6/2012	4:28:28 PM	SiCl4 pre valve closed
6/6/2012	4:28:28 PM	SiCl4 post valve closed
6/6/2012	4:28:28 PM	Main Vac valve closed
6/6/2012	4:28:28 PM	Bypass valve closed
6/6/2012	4:28:28 PM	H2 valve opened
6/6/2012	4:28:28 PM	Bubbler valve opened
6/6/2012	4:28:28 PM	Helium MFC set to  0.000000
6/6/2012	4:28:28 PM	H2 MFC set to  500.000000
6/6/2012	4:28:28 PM	BCl3 MFC set to  0.000000
6/6/2012	4:28:28 PM	PH3 MFC set to  0.000000
6/6/2012	4:28:28 PM	SiCl4 MFC set to  0.000000
6/6/2012	4:28:28 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	4:28:28 PM	Tube furnace set to 850
6/6/2012	4:30:28 PM	H2 valve closed
6/6/2012	4:30:28 PM	BCl3 valve closed
6/6/2012	4:30:28 PM	PH3 valve closed
6/6/2012	4:30:28 PM	SiCl4 pre valve closed
6/6/2012	4:30:28 PM	SiCl4 post valve closed
6/6/2012	4:30:28 PM	Main Vac valve closed
6/6/2012	4:30:28 PM	Bypass valve closed
6/6/2012	4:30:28 PM	Helium valve opened
6/6/2012	4:30:28 PM	Bubbler valve opened
6/6/2012	4:30:28 PM	Helium MFC set to  500.000000
6/6/2012	4:30:28 PM	H2 MFC set to  0.000000
6/6/2012	4:30:28 PM	BCl3 MFC set to  0.000000
6/6/2012	4:30:28 PM	PH3 MFC set to  0.000000
6/6/2012	4:30:28 PM	SiCl4 MFC set to  0.000000
6/6/2012	4:30:28 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	4:30:29 PM	Tube furnace set to 800
6/6/2012	4:32:29 PM	H2 valve closed
6/6/2012	4:32:29 PM	BCl3 valve closed
6/6/2012	4:32:29 PM	PH3 valve closed
6/6/2012	4:32:29 PM	SiCl4 pre valve closed
6/6/2012	4:32:29 PM	SiCl4 post valve closed
6/6/2012	4:32:29 PM	Main Vac valve closed
6/6/2012	4:32:29 PM	Bypass valve closed
6/6/2012	4:32:29 PM	Helium valve opened
6/6/2012	4:32:29 PM	Bubbler valve opened
6/6/2012	4:32:29 PM	Helium MFC set to  500.000000
6/6/2012	4:32:29 PM	H2 MFC set to  0.000000
6/6/2012	4:32:29 PM	BCl3 MFC set to  0.000000
6/6/2012	4:32:29 PM	PH3 MFC set to  0.000000
6/6/2012	4:32:29 PM	SiCl4 MFC set to  0.000000
6/6/2012	4:32:29 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	4:32:29 PM	Tube furnace set to 750
6/6/2012	4:34:29 PM	H2 valve closed
6/6/2012	4:34:29 PM	BCl3 valve closed
6/6/2012	4:34:29 PM	PH3 valve closed
6/6/2012	4:34:29 PM	SiCl4 pre valve closed
6/6/2012	4:34:29 PM	SiCl4 post valve closed
6/6/2012	4:34:29 PM	Main Vac valve closed
6/6/2012	4:34:29 PM	Bypass valve closed
6/6/2012	4:34:29 PM	Helium valve opened
6/6/2012	4:34:29 PM	Bubbler valve opened
6/6/2012	4:34:29 PM	Helium MFC set to  500.000000
6/6/2012	4:34:29 PM	H2 MFC set to  0.000000
6/6/2012	4:34:29 PM	BCl3 MFC set to  0.000000
6/6/2012	4:34:29 PM	PH3 MFC set to  0.000000
6/6/2012	4:34:29 PM	SiCl4 MFC set to  0.000000
6/6/2012	4:34:29 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	4:34:29 PM	Tube furnace set to 0
6/6/2012	4:54:29 PM	Helium valve closed
6/6/2012	4:54:29 PM	H2 valve closed
6/6/2012	4:54:29 PM	BCl3 valve closed
6/6/2012	4:54:29 PM	PH3 valve closed
6/6/2012	4:54:29 PM	SiCl4 pre valve closed
6/6/2012	4:54:29 PM	SiCl4 post valve closed
6/6/2012	4:54:29 PM	Main Vac valve closed
6/6/2012	4:54:29 PM	Bypass valve closed
6/6/2012	4:54:29 PM	Bubbler valve closed
6/6/2012	4:54:29 PM	Helium MFC set to  0.000000
6/6/2012	4:54:29 PM	H2 MFC set to  0.000000
6/6/2012	4:54:29 PM	BCl3 MFC set to  0.000000
6/6/2012	4:54:29 PM	PH3 MFC set to  0.000000
6/6/2012	4:54:29 PM	SiCl4 MFC set to  0.000000
6/6/2012	4:54:29 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	4:54:29 PM	Tube furnace set to 0
6/6/2012	4:54:30 PM	Run finished at 4:54 PM
6/6/2012	5:49:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/6/2012	5:49:53 PM	Recipe started at 5:49 PM
6/6/2012	5:49:53 PM	Helium valve closed
6/6/2012	5:49:53 PM	H2 valve closed
6/6/2012	5:49:53 PM	BCl3 valve closed
6/6/2012	5:49:53 PM	PH3 valve closed
6/6/2012	5:49:53 PM	SiCl4 pre valve closed
6/6/2012	5:49:53 PM	SiCl4 post valve closed
6/6/2012	5:49:53 PM	Main Vac valve closed
6/6/2012	5:49:53 PM	Bubbler valve closed
6/6/2012	5:49:53 PM	Bypass valve opened
6/6/2012	5:49:53 PM	Helium MFC set to  0.000000
6/6/2012	5:49:53 PM	H2 MFC set to  0.000000
6/6/2012	5:49:53 PM	BCl3 MFC set to  0.000000
6/6/2012	5:49:53 PM	PH3 MFC set to  0.000000
6/6/2012	5:49:53 PM	SiCl4 MFC set to  0.000000
6/6/2012	5:49:53 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	5:49:53 PM	Tube furnace set to 0
6/6/2012	5:50:46 PM	Helium valve closed
6/6/2012	5:50:46 PM	H2 valve closed
6/6/2012	5:50:46 PM	BCl3 valve closed
6/6/2012	5:50:46 PM	PH3 valve closed
6/6/2012	5:50:46 PM	SiCl4 pre valve closed
6/6/2012	5:50:46 PM	SiCl4 post valve closed
6/6/2012	5:50:46 PM	Main Vac valve closed
6/6/2012	5:50:46 PM	Bubbler valve closed
6/6/2012	5:50:46 PM	Bypass valve opened
6/6/2012	5:50:46 PM	Helium MFC set to  0.000000
6/6/2012	5:50:46 PM	H2 MFC set to  0.000000
6/6/2012	5:50:46 PM	BCl3 MFC set to  0.000000
6/6/2012	5:50:46 PM	PH3 MFC set to  0.000000
6/6/2012	5:50:46 PM	SiCl4 MFC set to  0.000000
6/6/2012	5:50:46 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	5:50:46 PM	Tube furnace set to 0
6/6/2012	5:51:46 PM	Helium valve closed
6/6/2012	5:51:46 PM	H2 valve closed
6/6/2012	5:51:46 PM	BCl3 valve closed
6/6/2012	5:51:46 PM	PH3 valve closed
6/6/2012	5:51:46 PM	SiCl4 pre valve closed
6/6/2012	5:51:46 PM	SiCl4 post valve closed
6/6/2012	5:51:46 PM	Bypass valve closed
6/6/2012	5:51:46 PM	Bubbler valve closed
6/6/2012	5:51:46 PM	Main Vac valve opened
6/6/2012	5:51:46 PM	Helium MFC set to  0.000000
6/6/2012	5:51:46 PM	H2 MFC set to  0.000000
6/6/2012	5:51:46 PM	BCl3 MFC set to  0.000000
6/6/2012	5:51:46 PM	PH3 MFC set to  0.000000
6/6/2012	5:51:46 PM	SiCl4 MFC set to  0.000000
6/6/2012	5:51:46 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	5:51:46 PM	Tube furnace set to 0
6/6/2012	5:51:47 PM	Run finished at 5:51 PM
6/6/2012	5:51:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/6/2012	7:37:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2012	7:37:18 PM	Recipe started at 7:37 PM
6/6/2012	7:37:18 PM	Helium valve closed
6/6/2012	7:37:18 PM	H2 valve closed
6/6/2012	7:37:18 PM	BCl3 valve closed
6/6/2012	7:37:18 PM	PH3 valve closed
6/6/2012	7:37:18 PM	SiCl4 pre valve closed
6/6/2012	7:37:18 PM	SiCl4 post valve closed
6/6/2012	7:37:18 PM	Main Vac valve closed
6/6/2012	7:37:18 PM	Bypass valve closed
6/6/2012	7:37:18 PM	Bubbler valve closed
6/6/2012	7:37:18 PM	Helium MFC set to  0.000000
6/6/2012	7:37:18 PM	H2 MFC set to  0.000000
6/6/2012	7:37:18 PM	BCl3 MFC set to  0.000000
6/6/2012	7:37:18 PM	PH3 MFC set to  0.000000
6/6/2012	7:37:18 PM	SiCl4 MFC set to  0.000000
6/6/2012	7:37:18 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	7:37:19 PM	Tube furnace set to 0
6/6/2012	7:37:22 PM	H2 valve closed
6/6/2012	7:37:22 PM	BCl3 valve closed
6/6/2012	7:37:22 PM	PH3 valve closed
6/6/2012	7:37:22 PM	SiCl4 pre valve closed
6/6/2012	7:37:22 PM	SiCl4 post valve closed
6/6/2012	7:37:22 PM	Main Vac valve closed
6/6/2012	7:37:22 PM	Bypass valve closed
6/6/2012	7:37:22 PM	Bubbler valve closed
6/6/2012	7:37:22 PM	Helium valve opened
6/6/2012	7:37:22 PM	Helium MFC set to  500.000000
6/6/2012	7:37:22 PM	H2 MFC set to  0.000000
6/6/2012	7:37:22 PM	BCl3 MFC set to  0.000000
6/6/2012	7:37:22 PM	PH3 MFC set to  0.000000
6/6/2012	7:37:22 PM	SiCl4 MFC set to  0.000000
6/6/2012	7:37:22 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	7:37:22 PM	Tube furnace set to 0
6/6/2012	7:38:33 PM	Helium valve closed
6/6/2012	7:38:33 PM	H2 valve closed
6/6/2012	7:38:33 PM	BCl3 valve closed
6/6/2012	7:38:33 PM	PH3 valve closed
6/6/2012	7:38:33 PM	SiCl4 pre valve closed
6/6/2012	7:38:33 PM	SiCl4 post valve closed
6/6/2012	7:38:33 PM	Main Vac valve closed
6/6/2012	7:38:33 PM	Bypass valve closed
6/6/2012	7:38:33 PM	Bubbler valve closed
6/6/2012	7:38:33 PM	Helium MFC set to  0.000000
6/6/2012	7:38:33 PM	H2 MFC set to  0.000000
6/6/2012	7:38:33 PM	BCl3 MFC set to  0.000000
6/6/2012	7:38:33 PM	PH3 MFC set to  0.000000
6/6/2012	7:38:33 PM	SiCl4 MFC set to  0.000000
6/6/2012	7:38:33 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	7:38:33 PM	Tube furnace set to 0
6/6/2012	7:38:34 PM	Run finished at 7:38 PM
6/6/2012	7:38:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/6/2012	7:40:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/6/2012	7:40:31 PM	Recipe started at 7:40 PM
6/6/2012	7:40:31 PM	Helium valve closed
6/6/2012	7:40:31 PM	H2 valve closed
6/6/2012	7:40:31 PM	BCl3 valve closed
6/6/2012	7:40:31 PM	PH3 valve closed
6/6/2012	7:40:31 PM	SiCl4 pre valve closed
6/6/2012	7:40:31 PM	SiCl4 post valve closed
6/6/2012	7:40:31 PM	Main Vac valve closed
6/6/2012	7:40:31 PM	Bubbler valve closed
6/6/2012	7:40:31 PM	Bypass valve opened
6/6/2012	7:40:31 PM	Helium MFC set to  0.000000
6/6/2012	7:40:31 PM	H2 MFC set to  0.000000
6/6/2012	7:40:31 PM	BCl3 MFC set to  0.000000
6/6/2012	7:40:31 PM	PH3 MFC set to  0.000000
6/6/2012	7:40:31 PM	SiCl4 MFC set to  0.000000
6/6/2012	7:40:31 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	7:40:31 PM	Tube furnace set to 0
6/6/2012	7:41:36 PM	Helium valve closed
6/6/2012	7:41:36 PM	H2 valve closed
6/6/2012	7:41:36 PM	BCl3 valve closed
6/6/2012	7:41:36 PM	PH3 valve closed
6/6/2012	7:41:36 PM	SiCl4 pre valve closed
6/6/2012	7:41:36 PM	SiCl4 post valve closed
6/6/2012	7:41:36 PM	Main Vac valve closed
6/6/2012	7:41:36 PM	Bubbler valve closed
6/6/2012	7:41:36 PM	Bypass valve opened
6/6/2012	7:41:36 PM	Helium MFC set to  0.000000
6/6/2012	7:41:36 PM	H2 MFC set to  0.000000
6/6/2012	7:41:36 PM	BCl3 MFC set to  0.000000
6/6/2012	7:41:36 PM	PH3 MFC set to  0.000000
6/6/2012	7:41:36 PM	SiCl4 MFC set to  0.000000
6/6/2012	7:41:36 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	7:41:36 PM	Tube furnace set to 0
6/6/2012	7:42:36 PM	Helium valve closed
6/6/2012	7:42:36 PM	H2 valve closed
6/6/2012	7:42:36 PM	BCl3 valve closed
6/6/2012	7:42:36 PM	PH3 valve closed
6/6/2012	7:42:36 PM	SiCl4 pre valve closed
6/6/2012	7:42:36 PM	SiCl4 post valve closed
6/6/2012	7:42:36 PM	Bypass valve closed
6/6/2012	7:42:36 PM	Bubbler valve closed
6/6/2012	7:42:36 PM	Main Vac valve opened
6/6/2012	7:42:36 PM	Helium MFC set to  0.000000
6/6/2012	7:42:36 PM	H2 MFC set to  0.000000
6/6/2012	7:42:36 PM	BCl3 MFC set to  0.000000
6/6/2012	7:42:36 PM	PH3 MFC set to  0.000000
6/6/2012	7:42:36 PM	SiCl4 MFC set to  0.000000
6/6/2012	7:42:36 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	7:42:37 PM	Tube furnace set to 0
6/6/2012	7:42:38 PM	Run finished at 7:42 PM
6/6/2012	7:42:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/6/2012	8:03:45 PM	Recipe started at 8:03 PM
6/6/2012	8:03:45 PM	Helium valve closed
6/6/2012	8:03:45 PM	H2 valve closed
6/6/2012	8:03:45 PM	BCl3 valve closed
6/6/2012	8:03:45 PM	PH3 valve closed
6/6/2012	8:03:45 PM	SiCl4 pre valve closed
6/6/2012	8:03:45 PM	SiCl4 post valve closed
6/6/2012	8:03:45 PM	Bypass valve closed
6/6/2012	8:03:45 PM	Bubbler valve closed
6/6/2012	8:03:45 PM	Main Vac valve opened
6/6/2012	8:03:45 PM	Helium MFC set to  0.000000
6/6/2012	8:03:45 PM	H2 MFC set to  0.000000
6/6/2012	8:03:45 PM	BCl3 MFC set to  0.000000
6/6/2012	8:03:45 PM	PH3 MFC set to  0.000000
6/6/2012	8:03:45 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:03:45 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:03:45 PM	Tube furnace set to 0
6/6/2012	8:04:15 PM	H2 valve closed
6/6/2012	8:04:15 PM	BCl3 valve closed
6/6/2012	8:04:15 PM	PH3 valve closed
6/6/2012	8:04:15 PM	SiCl4 pre valve closed
6/6/2012	8:04:15 PM	SiCl4 post valve closed
6/6/2012	8:04:15 PM	Bypass valve closed
6/6/2012	8:04:15 PM	Bubbler valve closed
6/6/2012	8:04:15 PM	Helium valve opened
6/6/2012	8:04:15 PM	Main Vac valve opened
6/6/2012	8:04:15 PM	Helium MFC set to  20.000000
6/6/2012	8:04:15 PM	H2 MFC set to  0.000000
6/6/2012	8:04:15 PM	BCl3 MFC set to  0.000000
6/6/2012	8:04:15 PM	PH3 MFC set to  0.000000
6/6/2012	8:04:15 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:04:15 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:04:15 PM	Tube furnace set to 0
6/6/2012	8:04:18 PM	Helium valve closed
6/6/2012	8:04:18 PM	H2 valve closed
6/6/2012	8:04:18 PM	BCl3 valve closed
6/6/2012	8:04:18 PM	PH3 valve closed
6/6/2012	8:04:18 PM	SiCl4 pre valve closed
6/6/2012	8:04:18 PM	SiCl4 post valve closed
6/6/2012	8:04:18 PM	Bypass valve closed
6/6/2012	8:04:18 PM	Bubbler valve closed
6/6/2012	8:04:18 PM	Main Vac valve opened
6/6/2012	8:04:18 PM	Helium MFC set to  0.000000
6/6/2012	8:04:18 PM	H2 MFC set to  0.000000
6/6/2012	8:04:18 PM	BCl3 MFC set to  0.000000
6/6/2012	8:04:18 PM	PH3 MFC set to  0.000000
6/6/2012	8:04:18 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:04:18 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:04:18 PM	Tube furnace set to 0
6/6/2012	8:04:48 PM	H2 valve closed
6/6/2012	8:04:48 PM	BCl3 valve closed
6/6/2012	8:04:48 PM	PH3 valve closed
6/6/2012	8:04:48 PM	SiCl4 pre valve closed
6/6/2012	8:04:48 PM	SiCl4 post valve closed
6/6/2012	8:04:48 PM	Bypass valve closed
6/6/2012	8:04:48 PM	Bubbler valve closed
6/6/2012	8:04:48 PM	Helium valve opened
6/6/2012	8:04:48 PM	Main Vac valve opened
6/6/2012	8:04:48 PM	Helium MFC set to  20.000000
6/6/2012	8:04:48 PM	H2 MFC set to  0.000000
6/6/2012	8:04:48 PM	BCl3 MFC set to  0.000000
6/6/2012	8:04:48 PM	PH3 MFC set to  0.000000
6/6/2012	8:04:48 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:04:48 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:04:48 PM	Tube furnace set to 0
6/6/2012	8:05:18 PM	Helium valve closed
6/6/2012	8:05:18 PM	H2 valve closed
6/6/2012	8:05:18 PM	BCl3 valve closed
6/6/2012	8:05:18 PM	PH3 valve closed
6/6/2012	8:05:18 PM	SiCl4 pre valve closed
6/6/2012	8:05:18 PM	SiCl4 post valve closed
6/6/2012	8:05:18 PM	Bypass valve closed
6/6/2012	8:05:18 PM	Bubbler valve closed
6/6/2012	8:05:18 PM	Main Vac valve opened
6/6/2012	8:05:18 PM	Helium MFC set to  0.000000
6/6/2012	8:05:18 PM	H2 MFC set to  0.000000
6/6/2012	8:05:18 PM	BCl3 MFC set to  0.000000
6/6/2012	8:05:18 PM	PH3 MFC set to  0.000000
6/6/2012	8:05:18 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:05:18 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:05:18 PM	Tube furnace set to 0
6/6/2012	8:05:48 PM	H2 valve closed
6/6/2012	8:05:48 PM	BCl3 valve closed
6/6/2012	8:05:48 PM	PH3 valve closed
6/6/2012	8:05:48 PM	SiCl4 pre valve closed
6/6/2012	8:05:48 PM	SiCl4 post valve closed
6/6/2012	8:05:48 PM	Bypass valve closed
6/6/2012	8:05:48 PM	Bubbler valve closed
6/6/2012	8:05:48 PM	Helium valve opened
6/6/2012	8:05:49 PM	Main Vac valve opened
6/6/2012	8:05:49 PM	Helium MFC set to  20.000000
6/6/2012	8:05:49 PM	H2 MFC set to  0.000000
6/6/2012	8:05:49 PM	BCl3 MFC set to  0.000000
6/6/2012	8:05:49 PM	PH3 MFC set to  0.000000
6/6/2012	8:05:49 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:05:49 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:05:49 PM	Tube furnace set to 0
6/6/2012	8:06:19 PM	Helium valve closed
6/6/2012	8:06:19 PM	H2 valve closed
6/6/2012	8:06:19 PM	BCl3 valve closed
6/6/2012	8:06:19 PM	PH3 valve closed
6/6/2012	8:06:19 PM	SiCl4 pre valve closed
6/6/2012	8:06:19 PM	SiCl4 post valve closed
6/6/2012	8:06:19 PM	Bypass valve closed
6/6/2012	8:06:19 PM	Bubbler valve closed
6/6/2012	8:06:19 PM	Main Vac valve opened
6/6/2012	8:06:19 PM	Helium MFC set to  0.000000
6/6/2012	8:06:19 PM	H2 MFC set to  0.000000
6/6/2012	8:06:19 PM	BCl3 MFC set to  0.000000
6/6/2012	8:06:19 PM	PH3 MFC set to  0.000000
6/6/2012	8:06:19 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:06:19 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:06:19 PM	Tube furnace set to 0
6/6/2012	8:06:49 PM	H2 valve closed
6/6/2012	8:06:49 PM	BCl3 valve closed
6/6/2012	8:06:49 PM	PH3 valve closed
6/6/2012	8:06:49 PM	SiCl4 pre valve closed
6/6/2012	8:06:49 PM	SiCl4 post valve closed
6/6/2012	8:06:49 PM	Bypass valve closed
6/6/2012	8:06:49 PM	Bubbler valve closed
6/6/2012	8:06:49 PM	Helium valve opened
6/6/2012	8:06:49 PM	Main Vac valve opened
6/6/2012	8:06:49 PM	Helium MFC set to  20.000000
6/6/2012	8:06:49 PM	H2 MFC set to  0.000000
6/6/2012	8:06:49 PM	BCl3 MFC set to  0.000000
6/6/2012	8:06:49 PM	PH3 MFC set to  0.000000
6/6/2012	8:06:49 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:06:49 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:06:49 PM	Tube furnace set to 0
6/6/2012	8:07:19 PM	Helium valve closed
6/6/2012	8:07:19 PM	H2 valve closed
6/6/2012	8:07:19 PM	BCl3 valve closed
6/6/2012	8:07:19 PM	PH3 valve closed
6/6/2012	8:07:19 PM	SiCl4 pre valve closed
6/6/2012	8:07:19 PM	SiCl4 post valve closed
6/6/2012	8:07:19 PM	Bypass valve closed
6/6/2012	8:07:19 PM	Bubbler valve closed
6/6/2012	8:07:19 PM	Main Vac valve opened
6/6/2012	8:07:19 PM	Helium MFC set to  0.000000
6/6/2012	8:07:19 PM	H2 MFC set to  0.000000
6/6/2012	8:07:19 PM	BCl3 MFC set to  0.000000
6/6/2012	8:07:19 PM	PH3 MFC set to  0.000000
6/6/2012	8:07:19 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:07:19 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:07:19 PM	Tube furnace set to 0
6/6/2012	8:07:49 PM	H2 valve closed
6/6/2012	8:07:49 PM	BCl3 valve closed
6/6/2012	8:07:49 PM	PH3 valve closed
6/6/2012	8:07:49 PM	SiCl4 pre valve closed
6/6/2012	8:07:49 PM	SiCl4 post valve closed
6/6/2012	8:07:49 PM	Bypass valve closed
6/6/2012	8:07:49 PM	Bubbler valve closed
6/6/2012	8:07:49 PM	Helium valve opened
6/6/2012	8:07:49 PM	Main Vac valve opened
6/6/2012	8:07:49 PM	Helium MFC set to  20.000000
6/6/2012	8:07:49 PM	H2 MFC set to  0.000000
6/6/2012	8:07:49 PM	BCl3 MFC set to  0.000000
6/6/2012	8:07:49 PM	PH3 MFC set to  0.000000
6/6/2012	8:07:49 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:07:49 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:07:50 PM	Tube furnace set to 0
6/6/2012	8:08:20 PM	Helium valve closed
6/6/2012	8:08:20 PM	H2 valve closed
6/6/2012	8:08:20 PM	BCl3 valve closed
6/6/2012	8:08:20 PM	PH3 valve closed
6/6/2012	8:08:20 PM	SiCl4 pre valve closed
6/6/2012	8:08:20 PM	SiCl4 post valve closed
6/6/2012	8:08:20 PM	Bypass valve closed
6/6/2012	8:08:20 PM	Bubbler valve closed
6/6/2012	8:08:20 PM	Main Vac valve opened
6/6/2012	8:08:20 PM	Helium MFC set to  0.000000
6/6/2012	8:08:20 PM	H2 MFC set to  0.000000
6/6/2012	8:08:20 PM	BCl3 MFC set to  0.000000
6/6/2012	8:08:20 PM	PH3 MFC set to  0.000000
6/6/2012	8:08:20 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:08:20 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:08:20 PM	Tube furnace set to 0
6/6/2012	8:08:50 PM	H2 valve closed
6/6/2012	8:08:50 PM	BCl3 valve closed
6/6/2012	8:08:50 PM	PH3 valve closed
6/6/2012	8:08:50 PM	SiCl4 pre valve closed
6/6/2012	8:08:50 PM	SiCl4 post valve closed
6/6/2012	8:08:50 PM	Bypass valve closed
6/6/2012	8:08:50 PM	Bubbler valve closed
6/6/2012	8:08:50 PM	Helium valve opened
6/6/2012	8:08:50 PM	Main Vac valve opened
6/6/2012	8:08:50 PM	Helium MFC set to  20.000000
6/6/2012	8:08:50 PM	H2 MFC set to  0.000000
6/6/2012	8:08:50 PM	BCl3 MFC set to  0.000000
6/6/2012	8:08:50 PM	PH3 MFC set to  0.000000
6/6/2012	8:08:50 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:08:50 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:08:50 PM	Tube furnace set to 0
6/6/2012	8:09:20 PM	Helium valve closed
6/6/2012	8:09:20 PM	H2 valve closed
6/6/2012	8:09:20 PM	BCl3 valve closed
6/6/2012	8:09:20 PM	PH3 valve closed
6/6/2012	8:09:20 PM	SiCl4 pre valve closed
6/6/2012	8:09:20 PM	SiCl4 post valve closed
6/6/2012	8:09:20 PM	Bypass valve closed
6/6/2012	8:09:20 PM	Bubbler valve closed
6/6/2012	8:09:20 PM	Main Vac valve opened
6/6/2012	8:09:20 PM	Helium MFC set to  0.000000
6/6/2012	8:09:20 PM	H2 MFC set to  0.000000
6/6/2012	8:09:20 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:20 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:20 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:20 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:09:20 PM	Tube furnace set to 0
6/6/2012	8:09:38 PM	H2 valve closed
6/6/2012	8:09:38 PM	BCl3 valve closed
6/6/2012	8:09:38 PM	PH3 valve closed
6/6/2012	8:09:38 PM	SiCl4 pre valve closed
6/6/2012	8:09:38 PM	SiCl4 post valve closed
6/6/2012	8:09:38 PM	Bypass valve closed
6/6/2012	8:09:38 PM	Bubbler valve closed
6/6/2012	8:09:38 PM	Helium valve opened
6/6/2012	8:09:38 PM	Main Vac valve opened
6/6/2012	8:09:38 PM	Helium MFC set to  20.000000
6/6/2012	8:09:38 PM	H2 MFC set to  0.000000
6/6/2012	8:09:38 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:38 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:38 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:38 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:09:38 PM	Tube furnace set to 0
6/6/2012	8:09:38 PM	Helium valve closed
6/6/2012	8:09:38 PM	H2 valve closed
6/6/2012	8:09:38 PM	BCl3 valve closed
6/6/2012	8:09:38 PM	PH3 valve closed
6/6/2012	8:09:38 PM	SiCl4 pre valve closed
6/6/2012	8:09:38 PM	SiCl4 post valve closed
6/6/2012	8:09:38 PM	Bypass valve closed
6/6/2012	8:09:38 PM	Bubbler valve closed
6/6/2012	8:09:38 PM	Main Vac valve opened
6/6/2012	8:09:38 PM	Helium MFC set to  0.000000
6/6/2012	8:09:38 PM	H2 MFC set to  0.000000
6/6/2012	8:09:38 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:38 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:38 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:38 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:09:38 PM	Tube furnace set to 0
6/6/2012	8:09:39 PM	H2 valve closed
6/6/2012	8:09:39 PM	BCl3 valve closed
6/6/2012	8:09:39 PM	PH3 valve closed
6/6/2012	8:09:39 PM	SiCl4 pre valve closed
6/6/2012	8:09:39 PM	SiCl4 post valve closed
6/6/2012	8:09:39 PM	Bypass valve closed
6/6/2012	8:09:39 PM	Bubbler valve closed
6/6/2012	8:09:39 PM	Helium valve opened
6/6/2012	8:09:39 PM	Main Vac valve opened
6/6/2012	8:09:39 PM	Helium MFC set to  20.000000
6/6/2012	8:09:39 PM	H2 MFC set to  0.000000
6/6/2012	8:09:39 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:39 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:39 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:39 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:09:39 PM	Tube furnace set to 0
6/6/2012	8:09:39 PM	Helium valve closed
6/6/2012	8:09:39 PM	H2 valve closed
6/6/2012	8:09:39 PM	BCl3 valve closed
6/6/2012	8:09:39 PM	PH3 valve closed
6/6/2012	8:09:39 PM	SiCl4 pre valve closed
6/6/2012	8:09:39 PM	SiCl4 post valve closed
6/6/2012	8:09:39 PM	Bypass valve closed
6/6/2012	8:09:39 PM	Bubbler valve closed
6/6/2012	8:09:39 PM	Main Vac valve opened
6/6/2012	8:09:39 PM	Helium MFC set to  0.000000
6/6/2012	8:09:39 PM	H2 MFC set to  0.000000
6/6/2012	8:09:39 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:39 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:39 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:39 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:09:40 PM	Tube furnace set to 0
6/6/2012	8:09:40 PM	H2 valve closed
6/6/2012	8:09:40 PM	BCl3 valve closed
6/6/2012	8:09:40 PM	PH3 valve closed
6/6/2012	8:09:40 PM	SiCl4 pre valve closed
6/6/2012	8:09:40 PM	SiCl4 post valve closed
6/6/2012	8:09:40 PM	Bypass valve closed
6/6/2012	8:09:40 PM	Bubbler valve closed
6/6/2012	8:09:40 PM	Helium valve opened
6/6/2012	8:09:40 PM	Main Vac valve opened
6/6/2012	8:09:40 PM	Helium MFC set to  20.000000
6/6/2012	8:09:40 PM	H2 MFC set to  0.000000
6/6/2012	8:09:40 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:40 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:40 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:40 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:09:40 PM	Tube furnace set to 0
6/6/2012	8:09:40 PM	Helium valve closed
6/6/2012	8:09:40 PM	H2 valve closed
6/6/2012	8:09:40 PM	BCl3 valve closed
6/6/2012	8:09:40 PM	PH3 valve closed
6/6/2012	8:09:40 PM	SiCl4 pre valve closed
6/6/2012	8:09:40 PM	SiCl4 post valve closed
6/6/2012	8:09:40 PM	Bypass valve closed
6/6/2012	8:09:40 PM	Bubbler valve closed
6/6/2012	8:09:40 PM	Main Vac valve opened
6/6/2012	8:09:40 PM	Helium MFC set to  0.000000
6/6/2012	8:09:40 PM	H2 MFC set to  0.000000
6/6/2012	8:09:40 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:40 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:40 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:40 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:09:41 PM	Tube furnace set to 200
6/6/2012	8:09:41 PM	H2 valve closed
6/6/2012	8:09:41 PM	BCl3 valve closed
6/6/2012	8:09:41 PM	PH3 valve closed
6/6/2012	8:09:41 PM	SiCl4 pre valve closed
6/6/2012	8:09:41 PM	SiCl4 post valve closed
6/6/2012	8:09:41 PM	Bypass valve closed
6/6/2012	8:09:41 PM	Bubbler valve closed
6/6/2012	8:09:41 PM	Helium valve opened
6/6/2012	8:09:41 PM	Main Vac valve opened
6/6/2012	8:09:41 PM	Helium MFC set to  20.000000
6/6/2012	8:09:41 PM	H2 MFC set to  0.000000
6/6/2012	8:09:41 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:41 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:41 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:41 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:09:41 PM	Tube furnace set to 200
6/6/2012	8:09:41 PM	Helium valve closed
6/6/2012	8:09:41 PM	H2 valve closed
6/6/2012	8:09:41 PM	BCl3 valve closed
6/6/2012	8:09:41 PM	PH3 valve closed
6/6/2012	8:09:41 PM	SiCl4 pre valve closed
6/6/2012	8:09:41 PM	SiCl4 post valve closed
6/6/2012	8:09:41 PM	Bypass valve closed
6/6/2012	8:09:41 PM	Bubbler valve closed
6/6/2012	8:09:41 PM	Main Vac valve opened
6/6/2012	8:09:41 PM	Helium MFC set to  0.000000
6/6/2012	8:09:41 PM	H2 MFC set to  0.000000
6/6/2012	8:09:41 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:41 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:41 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:41 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:09:41 PM	Tube furnace set to 200
6/6/2012	8:09:42 PM	H2 valve closed
6/6/2012	8:09:42 PM	BCl3 valve closed
6/6/2012	8:09:42 PM	PH3 valve closed
6/6/2012	8:09:42 PM	SiCl4 pre valve closed
6/6/2012	8:09:42 PM	SiCl4 post valve closed
6/6/2012	8:09:42 PM	Bypass valve closed
6/6/2012	8:09:42 PM	Bubbler valve closed
6/6/2012	8:09:42 PM	Helium valve opened
6/6/2012	8:09:42 PM	Main Vac valve opened
6/6/2012	8:09:42 PM	Helium MFC set to  20.000000
6/6/2012	8:09:42 PM	H2 MFC set to  0.000000
6/6/2012	8:09:42 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:42 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:42 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:42 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:09:42 PM	Tube furnace set to 200
6/6/2012	8:09:42 PM	Helium valve closed
6/6/2012	8:09:42 PM	H2 valve closed
6/6/2012	8:09:42 PM	BCl3 valve closed
6/6/2012	8:09:43 PM	PH3 valve closed
6/6/2012	8:09:43 PM	SiCl4 pre valve closed
6/6/2012	8:09:43 PM	SiCl4 post valve closed
6/6/2012	8:09:43 PM	Bypass valve closed
6/6/2012	8:09:43 PM	Bubbler valve closed
6/6/2012	8:09:43 PM	Main Vac valve opened
6/6/2012	8:09:43 PM	Helium MFC set to  0.000000
6/6/2012	8:09:43 PM	H2 MFC set to  0.000000
6/6/2012	8:09:43 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:43 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:43 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:43 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:09:43 PM	Tube furnace set to 200
6/6/2012	8:09:43 PM	H2 valve closed
6/6/2012	8:09:43 PM	BCl3 valve closed
6/6/2012	8:09:43 PM	PH3 valve closed
6/6/2012	8:09:43 PM	SiCl4 pre valve closed
6/6/2012	8:09:43 PM	SiCl4 post valve closed
6/6/2012	8:09:43 PM	Bypass valve closed
6/6/2012	8:09:43 PM	Bubbler valve closed
6/6/2012	8:09:43 PM	Helium valve opened
6/6/2012	8:09:43 PM	Main Vac valve opened
6/6/2012	8:09:43 PM	Helium MFC set to  20.000000
6/6/2012	8:09:43 PM	H2 MFC set to  0.000000
6/6/2012	8:09:43 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:43 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:43 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:43 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:09:43 PM	Tube furnace set to 200
6/6/2012	8:09:44 PM	Helium valve closed
6/6/2012	8:09:44 PM	H2 valve closed
6/6/2012	8:09:44 PM	BCl3 valve closed
6/6/2012	8:09:44 PM	PH3 valve closed
6/6/2012	8:09:44 PM	SiCl4 pre valve closed
6/6/2012	8:09:44 PM	SiCl4 post valve closed
6/6/2012	8:09:44 PM	Bypass valve closed
6/6/2012	8:09:44 PM	Bubbler valve closed
6/6/2012	8:09:44 PM	Main Vac valve opened
6/6/2012	8:09:44 PM	Helium MFC set to  0.000000
6/6/2012	8:09:44 PM	H2 MFC set to  0.000000
6/6/2012	8:09:44 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:44 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:44 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:44 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:09:44 PM	Tube furnace set to 200
6/6/2012	8:09:48 PM	Run aborted at 8:09 PM
6/6/2012	8:09:48 PM	Helium valve closed
6/6/2012	8:09:48 PM	H2 valve closed
6/6/2012	8:09:48 PM	BCl3 valve closed
6/6/2012	8:09:48 PM	PH3 valve closed
6/6/2012	8:09:48 PM	SiCl4 pre valve closed
6/6/2012	8:09:48 PM	SiCl4 post valve closed
6/6/2012	8:09:48 PM	Bypass valve closed
6/6/2012	8:09:48 PM	Main Vac valve closed
6/6/2012	8:09:48 PM	Bubbler valve closed
6/6/2012	8:09:48 PM	Helium MFC set to  0.000000
6/6/2012	8:09:48 PM	H2 MFC set to  0.000000
6/6/2012	8:09:48 PM	BCl3 MFC set to  0.000000
6/6/2012	8:09:48 PM	PH3 MFC set to  0.000000
6/6/2012	8:09:48 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:09:48 PM	Tube furnace set to 0
6/6/2012	8:09:50 PM	Main Vac valve opened
6/6/2012	8:09:59 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:03 PM	Recipe started at 8:11 PM
6/6/2012	8:12:03 PM	Helium valve closed
6/6/2012	8:12:03 PM	H2 valve closed
6/6/2012	8:12:03 PM	BCl3 valve closed
6/6/2012	8:12:03 PM	PH3 valve closed
6/6/2012	8:12:03 PM	SiCl4 pre valve closed
6/6/2012	8:12:03 PM	SiCl4 post valve closed
6/6/2012	8:12:03 PM	Bypass valve closed
6/6/2012	8:12:03 PM	Bubbler valve closed
6/6/2012	8:12:03 PM	Main Vac valve opened
6/6/2012	8:12:03 PM	Helium MFC set to  0.000000
6/6/2012	8:12:03 PM	H2 MFC set to  0.000000
6/6/2012	8:12:03 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:03 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:03 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:03 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:03 PM	Tube furnace set to 0
6/6/2012	8:12:07 PM	H2 valve closed
6/6/2012	8:12:07 PM	BCl3 valve closed
6/6/2012	8:12:07 PM	PH3 valve closed
6/6/2012	8:12:07 PM	SiCl4 pre valve closed
6/6/2012	8:12:07 PM	SiCl4 post valve closed
6/6/2012	8:12:07 PM	Bypass valve closed
6/6/2012	8:12:07 PM	Bubbler valve closed
6/6/2012	8:12:07 PM	Helium valve opened
6/6/2012	8:12:07 PM	Main Vac valve opened
6/6/2012	8:12:07 PM	Helium MFC set to  20.000000
6/6/2012	8:12:07 PM	H2 MFC set to  0.000000
6/6/2012	8:12:07 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:07 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:07 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:07 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:07 PM	Tube furnace set to 0
6/6/2012	8:12:07 PM	Helium valve closed
6/6/2012	8:12:07 PM	H2 valve closed
6/6/2012	8:12:07 PM	BCl3 valve closed
6/6/2012	8:12:07 PM	PH3 valve closed
6/6/2012	8:12:07 PM	SiCl4 pre valve closed
6/6/2012	8:12:07 PM	SiCl4 post valve closed
6/6/2012	8:12:07 PM	Bypass valve closed
6/6/2012	8:12:07 PM	Bubbler valve closed
6/6/2012	8:12:07 PM	Main Vac valve opened
6/6/2012	8:12:07 PM	Helium MFC set to  0.000000
6/6/2012	8:12:07 PM	H2 MFC set to  0.000000
6/6/2012	8:12:07 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:07 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:07 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:07 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:07 PM	Tube furnace set to 0
6/6/2012	8:12:08 PM	H2 valve closed
6/6/2012	8:12:08 PM	BCl3 valve closed
6/6/2012	8:12:08 PM	PH3 valve closed
6/6/2012	8:12:08 PM	SiCl4 pre valve closed
6/6/2012	8:12:08 PM	SiCl4 post valve closed
6/6/2012	8:12:08 PM	Bypass valve closed
6/6/2012	8:12:08 PM	Bubbler valve closed
6/6/2012	8:12:08 PM	Helium valve opened
6/6/2012	8:12:08 PM	Main Vac valve opened
6/6/2012	8:12:08 PM	Helium MFC set to  20.000000
6/6/2012	8:12:08 PM	H2 MFC set to  0.000000
6/6/2012	8:12:08 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:08 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:08 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:08 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:08 PM	Tube furnace set to 0
6/6/2012	8:12:08 PM	Helium valve closed
6/6/2012	8:12:08 PM	H2 valve closed
6/6/2012	8:12:08 PM	BCl3 valve closed
6/6/2012	8:12:08 PM	PH3 valve closed
6/6/2012	8:12:08 PM	SiCl4 pre valve closed
6/6/2012	8:12:08 PM	SiCl4 post valve closed
6/6/2012	8:12:08 PM	Bypass valve closed
6/6/2012	8:12:08 PM	Bubbler valve closed
6/6/2012	8:12:09 PM	Main Vac valve opened
6/6/2012	8:12:09 PM	Helium MFC set to  0.000000
6/6/2012	8:12:09 PM	H2 MFC set to  0.000000
6/6/2012	8:12:09 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:09 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:09 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:09 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:09 PM	Tube furnace set to 0
6/6/2012	8:12:09 PM	H2 valve closed
6/6/2012	8:12:09 PM	BCl3 valve closed
6/6/2012	8:12:09 PM	PH3 valve closed
6/6/2012	8:12:09 PM	SiCl4 pre valve closed
6/6/2012	8:12:09 PM	SiCl4 post valve closed
6/6/2012	8:12:09 PM	Bypass valve closed
6/6/2012	8:12:09 PM	Bubbler valve closed
6/6/2012	8:12:09 PM	Helium valve opened
6/6/2012	8:12:09 PM	Main Vac valve opened
6/6/2012	8:12:09 PM	Helium MFC set to  20.000000
6/6/2012	8:12:09 PM	H2 MFC set to  0.000000
6/6/2012	8:12:09 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:09 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:09 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:09 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:09 PM	Tube furnace set to 0
6/6/2012	8:12:11 PM	Helium valve closed
6/6/2012	8:12:11 PM	H2 valve closed
6/6/2012	8:12:11 PM	BCl3 valve closed
6/6/2012	8:12:11 PM	PH3 valve closed
6/6/2012	8:12:11 PM	SiCl4 pre valve closed
6/6/2012	8:12:11 PM	SiCl4 post valve closed
6/6/2012	8:12:11 PM	Bypass valve closed
6/6/2012	8:12:11 PM	Bubbler valve closed
6/6/2012	8:12:11 PM	Main Vac valve opened
6/6/2012	8:12:11 PM	Helium MFC set to  0.000000
6/6/2012	8:12:11 PM	H2 MFC set to  0.000000
6/6/2012	8:12:11 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:11 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:11 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:11 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:11 PM	Tube furnace set to 0
6/6/2012	8:12:12 PM	H2 valve closed
6/6/2012	8:12:12 PM	BCl3 valve closed
6/6/2012	8:12:12 PM	PH3 valve closed
6/6/2012	8:12:12 PM	SiCl4 pre valve closed
6/6/2012	8:12:12 PM	SiCl4 post valve closed
6/6/2012	8:12:12 PM	Bypass valve closed
6/6/2012	8:12:12 PM	Bubbler valve closed
6/6/2012	8:12:12 PM	Helium valve opened
6/6/2012	8:12:12 PM	Main Vac valve opened
6/6/2012	8:12:12 PM	Helium MFC set to  20.000000
6/6/2012	8:12:12 PM	H2 MFC set to  0.000000
6/6/2012	8:12:12 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:12 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:12 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:12 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:12 PM	Tube furnace set to 0
6/6/2012	8:12:12 PM	Helium valve closed
6/6/2012	8:12:12 PM	H2 valve closed
6/6/2012	8:12:12 PM	BCl3 valve closed
6/6/2012	8:12:12 PM	PH3 valve closed
6/6/2012	8:12:12 PM	SiCl4 pre valve closed
6/6/2012	8:12:12 PM	SiCl4 post valve closed
6/6/2012	8:12:12 PM	Bypass valve closed
6/6/2012	8:12:12 PM	Bubbler valve closed
6/6/2012	8:12:12 PM	Main Vac valve opened
6/6/2012	8:12:12 PM	Helium MFC set to  0.000000
6/6/2012	8:12:12 PM	H2 MFC set to  0.000000
6/6/2012	8:12:12 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:12 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:12 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:12 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:13 PM	Tube furnace set to 0
6/6/2012	8:12:13 PM	H2 valve closed
6/6/2012	8:12:13 PM	BCl3 valve closed
6/6/2012	8:12:13 PM	PH3 valve closed
6/6/2012	8:12:13 PM	SiCl4 pre valve closed
6/6/2012	8:12:13 PM	SiCl4 post valve closed
6/6/2012	8:12:13 PM	Bypass valve closed
6/6/2012	8:12:13 PM	Bubbler valve closed
6/6/2012	8:12:13 PM	Helium valve opened
6/6/2012	8:12:13 PM	Main Vac valve opened
6/6/2012	8:12:13 PM	Helium MFC set to  20.000000
6/6/2012	8:12:13 PM	H2 MFC set to  0.000000
6/6/2012	8:12:13 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:13 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:13 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:13 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:13 PM	Tube furnace set to 0
6/6/2012	8:12:14 PM	Helium valve closed
6/6/2012	8:12:14 PM	H2 valve closed
6/6/2012	8:12:14 PM	BCl3 valve closed
6/6/2012	8:12:14 PM	PH3 valve closed
6/6/2012	8:12:14 PM	SiCl4 pre valve closed
6/6/2012	8:12:14 PM	SiCl4 post valve closed
6/6/2012	8:12:14 PM	Bypass valve closed
6/6/2012	8:12:14 PM	Bubbler valve closed
6/6/2012	8:12:14 PM	Main Vac valve opened
6/6/2012	8:12:14 PM	Helium MFC set to  0.000000
6/6/2012	8:12:14 PM	H2 MFC set to  0.000000
6/6/2012	8:12:14 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:14 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:14 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:14 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:14 PM	Tube furnace set to 0
6/6/2012	8:12:14 PM	H2 valve closed
6/6/2012	8:12:14 PM	BCl3 valve closed
6/6/2012	8:12:14 PM	PH3 valve closed
6/6/2012	8:12:14 PM	SiCl4 pre valve closed
6/6/2012	8:12:14 PM	SiCl4 post valve closed
6/6/2012	8:12:14 PM	Bypass valve closed
6/6/2012	8:12:14 PM	Bubbler valve closed
6/6/2012	8:12:14 PM	Helium valve opened
6/6/2012	8:12:14 PM	Main Vac valve opened
6/6/2012	8:12:14 PM	Helium MFC set to  20.000000
6/6/2012	8:12:14 PM	H2 MFC set to  0.000000
6/6/2012	8:12:14 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:14 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:14 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:14 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:15 PM	Tube furnace set to 0
6/6/2012	8:12:34 PM	Helium valve closed
6/6/2012	8:12:34 PM	H2 valve closed
6/6/2012	8:12:34 PM	BCl3 valve closed
6/6/2012	8:12:34 PM	PH3 valve closed
6/6/2012	8:12:34 PM	SiCl4 pre valve closed
6/6/2012	8:12:34 PM	SiCl4 post valve closed
6/6/2012	8:12:34 PM	Bypass valve closed
6/6/2012	8:12:34 PM	Bubbler valve closed
6/6/2012	8:12:34 PM	Main Vac valve opened
6/6/2012	8:12:34 PM	Helium MFC set to  0.000000
6/6/2012	8:12:34 PM	H2 MFC set to  0.000000
6/6/2012	8:12:34 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:34 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:34 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:34 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:35 PM	Tube furnace set to 0
6/6/2012	8:12:35 PM	H2 valve closed
6/6/2012	8:12:35 PM	BCl3 valve closed
6/6/2012	8:12:35 PM	PH3 valve closed
6/6/2012	8:12:35 PM	SiCl4 pre valve closed
6/6/2012	8:12:35 PM	SiCl4 post valve closed
6/6/2012	8:12:35 PM	Bypass valve closed
6/6/2012	8:12:35 PM	Bubbler valve closed
6/6/2012	8:12:35 PM	Helium valve opened
6/6/2012	8:12:35 PM	Main Vac valve opened
6/6/2012	8:12:35 PM	Helium MFC set to  20.000000
6/6/2012	8:12:35 PM	H2 MFC set to  0.000000
6/6/2012	8:12:35 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:35 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:35 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:35 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:35 PM	Tube furnace set to 0
6/6/2012	8:12:36 PM	Helium valve closed
6/6/2012	8:12:36 PM	H2 valve closed
6/6/2012	8:12:36 PM	BCl3 valve closed
6/6/2012	8:12:36 PM	PH3 valve closed
6/6/2012	8:12:36 PM	SiCl4 pre valve closed
6/6/2012	8:12:36 PM	SiCl4 post valve closed
6/6/2012	8:12:36 PM	Bypass valve closed
6/6/2012	8:12:36 PM	Bubbler valve closed
6/6/2012	8:12:36 PM	Main Vac valve opened
6/6/2012	8:12:36 PM	Helium MFC set to  0.000000
6/6/2012	8:12:36 PM	H2 MFC set to  0.000000
6/6/2012	8:12:36 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:36 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:36 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:36 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:36 PM	Tube furnace set to 0
6/6/2012	8:12:36 PM	H2 valve closed
6/6/2012	8:12:36 PM	BCl3 valve closed
6/6/2012	8:12:36 PM	PH3 valve closed
6/6/2012	8:12:36 PM	SiCl4 pre valve closed
6/6/2012	8:12:36 PM	SiCl4 post valve closed
6/6/2012	8:12:36 PM	Bypass valve closed
6/6/2012	8:12:36 PM	Bubbler valve closed
6/6/2012	8:12:36 PM	Helium valve opened
6/6/2012	8:12:36 PM	Main Vac valve opened
6/6/2012	8:12:36 PM	Helium MFC set to  20.000000
6/6/2012	8:12:36 PM	H2 MFC set to  0.000000
6/6/2012	8:12:36 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:36 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:36 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:36 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:36 PM	Tube furnace set to 0
6/6/2012	8:12:37 PM	Helium valve closed
6/6/2012	8:12:37 PM	H2 valve closed
6/6/2012	8:12:37 PM	BCl3 valve closed
6/6/2012	8:12:37 PM	PH3 valve closed
6/6/2012	8:12:37 PM	SiCl4 pre valve closed
6/6/2012	8:12:37 PM	SiCl4 post valve closed
6/6/2012	8:12:37 PM	Bypass valve closed
6/6/2012	8:12:37 PM	Bubbler valve closed
6/6/2012	8:12:37 PM	Main Vac valve opened
6/6/2012	8:12:37 PM	Helium MFC set to  0.000000
6/6/2012	8:12:37 PM	H2 MFC set to  0.000000
6/6/2012	8:12:37 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:37 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:37 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:37 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:37 PM	Tube furnace set to 0
6/6/2012	8:12:37 PM	H2 valve closed
6/6/2012	8:12:37 PM	BCl3 valve closed
6/6/2012	8:12:37 PM	PH3 valve closed
6/6/2012	8:12:37 PM	SiCl4 pre valve closed
6/6/2012	8:12:37 PM	SiCl4 post valve closed
6/6/2012	8:12:37 PM	Bypass valve closed
6/6/2012	8:12:37 PM	Bubbler valve closed
6/6/2012	8:12:37 PM	Helium valve opened
6/6/2012	8:12:37 PM	Main Vac valve opened
6/6/2012	8:12:37 PM	Helium MFC set to  20.000000
6/6/2012	8:12:37 PM	H2 MFC set to  0.000000
6/6/2012	8:12:37 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:37 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:37 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:37 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:37 PM	Tube furnace set to 0
6/6/2012	8:12:38 PM	Helium valve closed
6/6/2012	8:12:38 PM	H2 valve closed
6/6/2012	8:12:38 PM	BCl3 valve closed
6/6/2012	8:12:38 PM	PH3 valve closed
6/6/2012	8:12:38 PM	SiCl4 pre valve closed
6/6/2012	8:12:38 PM	SiCl4 post valve closed
6/6/2012	8:12:38 PM	Bypass valve closed
6/6/2012	8:12:38 PM	Bubbler valve closed
6/6/2012	8:12:38 PM	Main Vac valve opened
6/6/2012	8:12:38 PM	Helium MFC set to  0.000000
6/6/2012	8:12:38 PM	H2 MFC set to  0.000000
6/6/2012	8:12:38 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:38 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:38 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:38 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:38 PM	Tube furnace set to 200
6/6/2012	8:12:38 PM	H2 valve closed
6/6/2012	8:12:38 PM	BCl3 valve closed
6/6/2012	8:12:38 PM	PH3 valve closed
6/6/2012	8:12:38 PM	SiCl4 pre valve closed
6/6/2012	8:12:38 PM	SiCl4 post valve closed
6/6/2012	8:12:38 PM	Bypass valve closed
6/6/2012	8:12:38 PM	Bubbler valve closed
6/6/2012	8:12:38 PM	Helium valve opened
6/6/2012	8:12:38 PM	Main Vac valve opened
6/6/2012	8:12:38 PM	Helium MFC set to  20.000000
6/6/2012	8:12:38 PM	H2 MFC set to  0.000000
6/6/2012	8:12:38 PM	BCl3 MFC set to  0.000000
6/6/2012	8:12:38 PM	PH3 MFC set to  0.000000
6/6/2012	8:12:38 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:12:38 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:12:38 PM	Tube furnace set to 200
6/6/2012	8:13:08 PM	Helium valve closed
6/6/2012	8:13:08 PM	H2 valve closed
6/6/2012	8:13:08 PM	BCl3 valve closed
6/6/2012	8:13:08 PM	PH3 valve closed
6/6/2012	8:13:09 PM	SiCl4 pre valve closed
6/6/2012	8:13:09 PM	SiCl4 post valve closed
6/6/2012	8:13:09 PM	Bypass valve closed
6/6/2012	8:13:09 PM	Bubbler valve closed
6/6/2012	8:13:09 PM	Main Vac valve opened
6/6/2012	8:13:09 PM	Helium MFC set to  0.000000
6/6/2012	8:13:09 PM	H2 MFC set to  0.000000
6/6/2012	8:13:09 PM	BCl3 MFC set to  0.000000
6/6/2012	8:13:09 PM	PH3 MFC set to  0.000000
6/6/2012	8:13:09 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:13:09 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:13:09 PM	Tube furnace set to 200
6/6/2012	8:13:39 PM	H2 valve closed
6/6/2012	8:13:39 PM	BCl3 valve closed
6/6/2012	8:13:39 PM	PH3 valve closed
6/6/2012	8:13:39 PM	SiCl4 pre valve closed
6/6/2012	8:13:39 PM	SiCl4 post valve closed
6/6/2012	8:13:39 PM	Bypass valve closed
6/6/2012	8:13:39 PM	Bubbler valve closed
6/6/2012	8:13:39 PM	Helium valve opened
6/6/2012	8:13:39 PM	Main Vac valve opened
6/6/2012	8:13:39 PM	Helium MFC set to  20.000000
6/6/2012	8:13:39 PM	H2 MFC set to  0.000000
6/6/2012	8:13:39 PM	BCl3 MFC set to  0.000000
6/6/2012	8:13:39 PM	PH3 MFC set to  0.000000
6/6/2012	8:13:39 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:13:39 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:13:39 PM	Tube furnace set to 200
6/6/2012	8:14:09 PM	Helium valve closed
6/6/2012	8:14:09 PM	H2 valve closed
6/6/2012	8:14:09 PM	BCl3 valve closed
6/6/2012	8:14:09 PM	PH3 valve closed
6/6/2012	8:14:09 PM	SiCl4 pre valve closed
6/6/2012	8:14:09 PM	SiCl4 post valve closed
6/6/2012	8:14:09 PM	Bypass valve closed
6/6/2012	8:14:09 PM	Bubbler valve closed
6/6/2012	8:14:09 PM	Main Vac valve opened
6/6/2012	8:14:09 PM	Helium MFC set to  0.000000
6/6/2012	8:14:09 PM	H2 MFC set to  0.000000
6/6/2012	8:14:09 PM	BCl3 MFC set to  0.000000
6/6/2012	8:14:09 PM	PH3 MFC set to  0.000000
6/6/2012	8:14:09 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:14:09 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:14:09 PM	Tube furnace set to 200
6/6/2012	8:14:39 PM	H2 valve closed
6/6/2012	8:14:39 PM	BCl3 valve closed
6/6/2012	8:14:39 PM	PH3 valve closed
6/6/2012	8:14:39 PM	SiCl4 pre valve closed
6/6/2012	8:14:39 PM	SiCl4 post valve closed
6/6/2012	8:14:39 PM	Bypass valve closed
6/6/2012	8:14:39 PM	Bubbler valve closed
6/6/2012	8:14:39 PM	Helium valve opened
6/6/2012	8:14:39 PM	Main Vac valve opened
6/6/2012	8:14:39 PM	Helium MFC set to  20.000000
6/6/2012	8:14:39 PM	H2 MFC set to  0.000000
6/6/2012	8:14:39 PM	BCl3 MFC set to  0.000000
6/6/2012	8:14:39 PM	PH3 MFC set to  0.000000
6/6/2012	8:14:39 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:14:39 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:14:39 PM	Tube furnace set to 200
6/6/2012	8:15:09 PM	Helium valve closed
6/6/2012	8:15:09 PM	H2 valve closed
6/6/2012	8:15:09 PM	BCl3 valve closed
6/6/2012	8:15:09 PM	PH3 valve closed
6/6/2012	8:15:09 PM	SiCl4 pre valve closed
6/6/2012	8:15:09 PM	SiCl4 post valve closed
6/6/2012	8:15:09 PM	Bypass valve closed
6/6/2012	8:15:09 PM	Bubbler valve closed
6/6/2012	8:15:09 PM	Main Vac valve opened
6/6/2012	8:15:09 PM	Helium MFC set to  0.000000
6/6/2012	8:15:09 PM	H2 MFC set to  0.000000
6/6/2012	8:15:09 PM	BCl3 MFC set to  0.000000
6/6/2012	8:15:09 PM	PH3 MFC set to  0.000000
6/6/2012	8:15:09 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:15:09 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:15:10 PM	Tube furnace set to 200
6/6/2012	8:15:40 PM	H2 valve closed
6/6/2012	8:15:40 PM	BCl3 valve closed
6/6/2012	8:15:40 PM	PH3 valve closed
6/6/2012	8:15:40 PM	SiCl4 pre valve closed
6/6/2012	8:15:40 PM	SiCl4 post valve closed
6/6/2012	8:15:40 PM	Bypass valve closed
6/6/2012	8:15:40 PM	Bubbler valve closed
6/6/2012	8:15:40 PM	Helium valve opened
6/6/2012	8:15:40 PM	Main Vac valve opened
6/6/2012	8:15:40 PM	Helium MFC set to  20.000000
6/6/2012	8:15:40 PM	H2 MFC set to  0.000000
6/6/2012	8:15:40 PM	BCl3 MFC set to  0.000000
6/6/2012	8:15:40 PM	PH3 MFC set to  0.000000
6/6/2012	8:15:40 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:15:40 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:15:40 PM	Tube furnace set to 200
6/6/2012	8:16:10 PM	Helium valve closed
6/6/2012	8:16:10 PM	H2 valve closed
6/6/2012	8:16:10 PM	BCl3 valve closed
6/6/2012	8:16:10 PM	PH3 valve closed
6/6/2012	8:16:10 PM	SiCl4 pre valve closed
6/6/2012	8:16:10 PM	SiCl4 post valve closed
6/6/2012	8:16:10 PM	Bypass valve closed
6/6/2012	8:16:10 PM	Bubbler valve closed
6/6/2012	8:16:10 PM	Main Vac valve opened
6/6/2012	8:16:10 PM	Helium MFC set to  0.000000
6/6/2012	8:16:10 PM	H2 MFC set to  0.000000
6/6/2012	8:16:10 PM	BCl3 MFC set to  0.000000
6/6/2012	8:16:10 PM	PH3 MFC set to  0.000000
6/6/2012	8:16:10 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:16:10 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:16:10 PM	Tube furnace set to 200
6/6/2012	8:16:40 PM	H2 valve closed
6/6/2012	8:16:40 PM	BCl3 valve closed
6/6/2012	8:16:40 PM	PH3 valve closed
6/6/2012	8:16:40 PM	SiCl4 pre valve closed
6/6/2012	8:16:40 PM	SiCl4 post valve closed
6/6/2012	8:16:40 PM	Bypass valve closed
6/6/2012	8:16:40 PM	Bubbler valve closed
6/6/2012	8:16:40 PM	Helium valve opened
6/6/2012	8:16:40 PM	Main Vac valve opened
6/6/2012	8:16:40 PM	Helium MFC set to  20.000000
6/6/2012	8:16:40 PM	H2 MFC set to  0.000000
6/6/2012	8:16:40 PM	BCl3 MFC set to  0.000000
6/6/2012	8:16:40 PM	PH3 MFC set to  0.000000
6/6/2012	8:16:40 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:16:40 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:16:40 PM	Tube furnace set to 200
6/6/2012	8:17:10 PM	Helium valve closed
6/6/2012	8:17:10 PM	H2 valve closed
6/6/2012	8:17:10 PM	BCl3 valve closed
6/6/2012	8:17:10 PM	PH3 valve closed
6/6/2012	8:17:10 PM	SiCl4 pre valve closed
6/6/2012	8:17:10 PM	SiCl4 post valve closed
6/6/2012	8:17:10 PM	Bypass valve closed
6/6/2012	8:17:10 PM	Bubbler valve closed
6/6/2012	8:17:10 PM	Main Vac valve opened
6/6/2012	8:17:10 PM	Helium MFC set to  0.000000
6/6/2012	8:17:10 PM	H2 MFC set to  0.000000
6/6/2012	8:17:10 PM	BCl3 MFC set to  0.000000
6/6/2012	8:17:10 PM	PH3 MFC set to  0.000000
6/6/2012	8:17:10 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:17:10 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:17:11 PM	Tube furnace set to 200
6/6/2012	8:17:41 PM	H2 valve closed
6/6/2012	8:17:41 PM	BCl3 valve closed
6/6/2012	8:17:41 PM	PH3 valve closed
6/6/2012	8:17:41 PM	SiCl4 pre valve closed
6/6/2012	8:17:41 PM	SiCl4 post valve closed
6/6/2012	8:17:41 PM	Bypass valve closed
6/6/2012	8:17:41 PM	Bubbler valve closed
6/6/2012	8:17:41 PM	Helium valve opened
6/6/2012	8:17:41 PM	Main Vac valve opened
6/6/2012	8:17:41 PM	Helium MFC set to  20.000000
6/6/2012	8:17:41 PM	H2 MFC set to  0.000000
6/6/2012	8:17:41 PM	BCl3 MFC set to  0.000000
6/6/2012	8:17:41 PM	PH3 MFC set to  0.000000
6/6/2012	8:17:41 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:17:41 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:17:41 PM	Tube furnace set to 200
6/6/2012	8:18:11 PM	Helium valve closed
6/6/2012	8:18:11 PM	H2 valve closed
6/6/2012	8:18:11 PM	BCl3 valve closed
6/6/2012	8:18:11 PM	PH3 valve closed
6/6/2012	8:18:11 PM	SiCl4 pre valve closed
6/6/2012	8:18:11 PM	SiCl4 post valve closed
6/6/2012	8:18:11 PM	Bypass valve closed
6/6/2012	8:18:11 PM	Bubbler valve closed
6/6/2012	8:18:11 PM	Main Vac valve opened
6/6/2012	8:18:11 PM	Helium MFC set to  0.000000
6/6/2012	8:18:11 PM	H2 MFC set to  0.000000
6/6/2012	8:18:11 PM	BCl3 MFC set to  0.000000
6/6/2012	8:18:11 PM	PH3 MFC set to  0.000000
6/6/2012	8:18:11 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:18:11 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:18:11 PM	Tube furnace set to 0
6/6/2012	8:18:12 PM	Run finished at 8:18 PM
6/6/2012	8:23:26 PM	Recipe started at 8:23 PM
6/6/2012	8:23:26 PM	Helium valve closed
6/6/2012	8:23:26 PM	H2 valve closed
6/6/2012	8:23:26 PM	BCl3 valve closed
6/6/2012	8:23:26 PM	PH3 valve closed
6/6/2012	8:23:26 PM	SiCl4 pre valve closed
6/6/2012	8:23:26 PM	SiCl4 post valve closed
6/6/2012	8:23:26 PM	Bypass valve closed
6/6/2012	8:23:26 PM	Bubbler valve closed
6/6/2012	8:23:26 PM	Main Vac valve opened
6/6/2012	8:23:26 PM	Helium MFC set to  0.000000
6/6/2012	8:23:26 PM	H2 MFC set to  0.000000
6/6/2012	8:23:26 PM	BCl3 MFC set to  0.000000
6/6/2012	8:23:26 PM	PH3 MFC set to  0.000000
6/6/2012	8:23:26 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:23:26 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:23:26 PM	Tube furnace set to 0
6/6/2012	8:23:56 PM	H2 valve closed
6/6/2012	8:23:56 PM	BCl3 valve closed
6/6/2012	8:23:56 PM	PH3 valve closed
6/6/2012	8:23:56 PM	SiCl4 pre valve closed
6/6/2012	8:23:56 PM	SiCl4 post valve closed
6/6/2012	8:23:56 PM	Bypass valve closed
6/6/2012	8:23:56 PM	Bubbler valve closed
6/6/2012	8:23:56 PM	Helium valve opened
6/6/2012	8:23:56 PM	Main Vac valve opened
6/6/2012	8:23:56 PM	Helium MFC set to  20.000000
6/6/2012	8:23:56 PM	H2 MFC set to  0.000000
6/6/2012	8:23:56 PM	BCl3 MFC set to  0.000000
6/6/2012	8:23:56 PM	PH3 MFC set to  0.000000
6/6/2012	8:23:56 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:23:56 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:23:56 PM	Tube furnace set to 0
6/6/2012	8:24:27 PM	Helium valve closed
6/6/2012	8:24:27 PM	H2 valve closed
6/6/2012	8:24:27 PM	BCl3 valve closed
6/6/2012	8:24:27 PM	PH3 valve closed
6/6/2012	8:24:27 PM	SiCl4 pre valve closed
6/6/2012	8:24:27 PM	SiCl4 post valve closed
6/6/2012	8:24:27 PM	Bypass valve closed
6/6/2012	8:24:27 PM	Bubbler valve closed
6/6/2012	8:24:27 PM	Main Vac valve opened
6/6/2012	8:24:27 PM	Helium MFC set to  0.000000
6/6/2012	8:24:27 PM	H2 MFC set to  0.000000
6/6/2012	8:24:27 PM	BCl3 MFC set to  0.000000
6/6/2012	8:24:27 PM	PH3 MFC set to  0.000000
6/6/2012	8:24:27 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:24:27 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:24:27 PM	Tube furnace set to 0
6/6/2012	8:24:57 PM	H2 valve closed
6/6/2012	8:24:57 PM	BCl3 valve closed
6/6/2012	8:24:57 PM	PH3 valve closed
6/6/2012	8:24:57 PM	SiCl4 pre valve closed
6/6/2012	8:24:57 PM	SiCl4 post valve closed
6/6/2012	8:24:57 PM	Bypass valve closed
6/6/2012	8:24:57 PM	Bubbler valve closed
6/6/2012	8:24:57 PM	Helium valve opened
6/6/2012	8:24:57 PM	Main Vac valve opened
6/6/2012	8:24:57 PM	Helium MFC set to  20.000000
6/6/2012	8:24:57 PM	H2 MFC set to  0.000000
6/6/2012	8:24:57 PM	BCl3 MFC set to  0.000000
6/6/2012	8:24:57 PM	PH3 MFC set to  0.000000
6/6/2012	8:24:57 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:24:57 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:24:57 PM	Tube furnace set to 0
6/6/2012	8:25:27 PM	Helium valve closed
6/6/2012	8:25:27 PM	H2 valve closed
6/6/2012	8:25:27 PM	BCl3 valve closed
6/6/2012	8:25:27 PM	PH3 valve closed
6/6/2012	8:25:27 PM	SiCl4 pre valve closed
6/6/2012	8:25:27 PM	SiCl4 post valve closed
6/6/2012	8:25:27 PM	Bypass valve closed
6/6/2012	8:25:27 PM	Bubbler valve closed
6/6/2012	8:25:27 PM	Main Vac valve opened
6/6/2012	8:25:27 PM	Helium MFC set to  0.000000
6/6/2012	8:25:27 PM	H2 MFC set to  0.000000
6/6/2012	8:25:27 PM	BCl3 MFC set to  0.000000
6/6/2012	8:25:27 PM	PH3 MFC set to  0.000000
6/6/2012	8:25:27 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:25:27 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:25:27 PM	Tube furnace set to 0
6/6/2012	8:25:57 PM	H2 valve closed
6/6/2012	8:25:57 PM	BCl3 valve closed
6/6/2012	8:25:57 PM	PH3 valve closed
6/6/2012	8:25:57 PM	SiCl4 pre valve closed
6/6/2012	8:25:57 PM	SiCl4 post valve closed
6/6/2012	8:25:57 PM	Bypass valve closed
6/6/2012	8:25:57 PM	Bubbler valve closed
6/6/2012	8:25:57 PM	Helium valve opened
6/6/2012	8:25:57 PM	Main Vac valve opened
6/6/2012	8:25:57 PM	Helium MFC set to  20.000000
6/6/2012	8:25:57 PM	H2 MFC set to  0.000000
6/6/2012	8:25:57 PM	BCl3 MFC set to  0.000000
6/6/2012	8:25:57 PM	PH3 MFC set to  0.000000
6/6/2012	8:25:57 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:25:57 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:25:57 PM	Tube furnace set to 0
6/6/2012	8:26:27 PM	Helium valve closed
6/6/2012	8:26:27 PM	H2 valve closed
6/6/2012	8:26:27 PM	BCl3 valve closed
6/6/2012	8:26:27 PM	PH3 valve closed
6/6/2012	8:26:27 PM	SiCl4 pre valve closed
6/6/2012	8:26:27 PM	SiCl4 post valve closed
6/6/2012	8:26:27 PM	Bypass valve closed
6/6/2012	8:26:27 PM	Bubbler valve closed
6/6/2012	8:26:27 PM	Main Vac valve opened
6/6/2012	8:26:28 PM	Helium MFC set to  0.000000
6/6/2012	8:26:28 PM	H2 MFC set to  0.000000
6/6/2012	8:26:28 PM	BCl3 MFC set to  0.000000
6/6/2012	8:26:28 PM	PH3 MFC set to  0.000000
6/6/2012	8:26:28 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:26:28 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:26:28 PM	Tube furnace set to 0
6/6/2012	8:26:58 PM	H2 valve closed
6/6/2012	8:26:58 PM	BCl3 valve closed
6/6/2012	8:26:58 PM	PH3 valve closed
6/6/2012	8:26:58 PM	SiCl4 pre valve closed
6/6/2012	8:26:58 PM	SiCl4 post valve closed
6/6/2012	8:26:58 PM	Bypass valve closed
6/6/2012	8:26:58 PM	Bubbler valve closed
6/6/2012	8:26:58 PM	Helium valve opened
6/6/2012	8:26:58 PM	Main Vac valve opened
6/6/2012	8:26:58 PM	Helium MFC set to  20.000000
6/6/2012	8:26:58 PM	H2 MFC set to  0.000000
6/6/2012	8:26:58 PM	BCl3 MFC set to  0.000000
6/6/2012	8:26:58 PM	PH3 MFC set to  0.000000
6/6/2012	8:26:58 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:26:58 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:26:58 PM	Tube furnace set to 0
6/6/2012	8:27:28 PM	Helium valve closed
6/6/2012	8:27:28 PM	H2 valve closed
6/6/2012	8:27:28 PM	BCl3 valve closed
6/6/2012	8:27:28 PM	PH3 valve closed
6/6/2012	8:27:28 PM	SiCl4 pre valve closed
6/6/2012	8:27:28 PM	SiCl4 post valve closed
6/6/2012	8:27:28 PM	Bypass valve closed
6/6/2012	8:27:28 PM	Bubbler valve closed
6/6/2012	8:27:28 PM	Main Vac valve opened
6/6/2012	8:27:28 PM	Helium MFC set to  0.000000
6/6/2012	8:27:28 PM	H2 MFC set to  0.000000
6/6/2012	8:27:28 PM	BCl3 MFC set to  0.000000
6/6/2012	8:27:28 PM	PH3 MFC set to  0.000000
6/6/2012	8:27:28 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:27:28 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:27:28 PM	Tube furnace set to 0
6/6/2012	8:27:58 PM	H2 valve closed
6/6/2012	8:27:58 PM	BCl3 valve closed
6/6/2012	8:27:58 PM	PH3 valve closed
6/6/2012	8:27:58 PM	SiCl4 pre valve closed
6/6/2012	8:27:58 PM	SiCl4 post valve closed
6/6/2012	8:27:58 PM	Bypass valve closed
6/6/2012	8:27:58 PM	Bubbler valve closed
6/6/2012	8:27:58 PM	Helium valve opened
6/6/2012	8:27:58 PM	Main Vac valve opened
6/6/2012	8:27:58 PM	Helium MFC set to  20.000000
6/6/2012	8:27:58 PM	H2 MFC set to  0.000000
6/6/2012	8:27:58 PM	BCl3 MFC set to  0.000000
6/6/2012	8:27:58 PM	PH3 MFC set to  0.000000
6/6/2012	8:27:58 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:27:58 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:27:58 PM	Tube furnace set to 0
6/6/2012	8:28:28 PM	Helium valve closed
6/6/2012	8:28:28 PM	H2 valve closed
6/6/2012	8:28:28 PM	BCl3 valve closed
6/6/2012	8:28:28 PM	PH3 valve closed
6/6/2012	8:28:28 PM	SiCl4 pre valve closed
6/6/2012	8:28:28 PM	SiCl4 post valve closed
6/6/2012	8:28:28 PM	Bypass valve closed
6/6/2012	8:28:28 PM	Bubbler valve closed
6/6/2012	8:28:28 PM	Main Vac valve opened
6/6/2012	8:28:28 PM	Helium MFC set to  0.000000
6/6/2012	8:28:28 PM	H2 MFC set to  0.000000
6/6/2012	8:28:28 PM	BCl3 MFC set to  0.000000
6/6/2012	8:28:28 PM	PH3 MFC set to  0.000000
6/6/2012	8:28:28 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:28:28 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:28:29 PM	Tube furnace set to 0
6/6/2012	8:28:59 PM	H2 valve closed
6/6/2012	8:28:59 PM	BCl3 valve closed
6/6/2012	8:28:59 PM	PH3 valve closed
6/6/2012	8:28:59 PM	SiCl4 pre valve closed
6/6/2012	8:28:59 PM	SiCl4 post valve closed
6/6/2012	8:28:59 PM	Bypass valve closed
6/6/2012	8:28:59 PM	Bubbler valve closed
6/6/2012	8:28:59 PM	Helium valve opened
6/6/2012	8:28:59 PM	Main Vac valve opened
6/6/2012	8:28:59 PM	Helium MFC set to  20.000000
6/6/2012	8:28:59 PM	H2 MFC set to  0.000000
6/6/2012	8:28:59 PM	BCl3 MFC set to  0.000000
6/6/2012	8:28:59 PM	PH3 MFC set to  0.000000
6/6/2012	8:28:59 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:28:59 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:28:59 PM	Tube furnace set to 0
6/6/2012	8:29:29 PM	Helium valve closed
6/6/2012	8:29:29 PM	H2 valve closed
6/6/2012	8:29:29 PM	BCl3 valve closed
6/6/2012	8:29:29 PM	PH3 valve closed
6/6/2012	8:29:29 PM	SiCl4 pre valve closed
6/6/2012	8:29:29 PM	SiCl4 post valve closed
6/6/2012	8:29:29 PM	Bypass valve closed
6/6/2012	8:29:29 PM	Bubbler valve closed
6/6/2012	8:29:29 PM	Main Vac valve opened
6/6/2012	8:29:29 PM	Helium MFC set to  0.000000
6/6/2012	8:29:29 PM	H2 MFC set to  0.000000
6/6/2012	8:29:29 PM	BCl3 MFC set to  0.000000
6/6/2012	8:29:29 PM	PH3 MFC set to  0.000000
6/6/2012	8:29:29 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:29:29 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:29:29 PM	Tube furnace set to 0
6/6/2012	8:29:59 PM	H2 valve closed
6/6/2012	8:29:59 PM	BCl3 valve closed
6/6/2012	8:29:59 PM	PH3 valve closed
6/6/2012	8:29:59 PM	SiCl4 pre valve closed
6/6/2012	8:29:59 PM	SiCl4 post valve closed
6/6/2012	8:29:59 PM	Bypass valve closed
6/6/2012	8:29:59 PM	Bubbler valve closed
6/6/2012	8:29:59 PM	Helium valve opened
6/6/2012	8:29:59 PM	Main Vac valve opened
6/6/2012	8:29:59 PM	Helium MFC set to  20.000000
6/6/2012	8:29:59 PM	H2 MFC set to  0.000000
6/6/2012	8:29:59 PM	BCl3 MFC set to  0.000000
6/6/2012	8:29:59 PM	PH3 MFC set to  0.000000
6/6/2012	8:29:59 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:29:59 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:29:59 PM	Tube furnace set to 0
6/6/2012	8:30:29 PM	Helium valve closed
6/6/2012	8:30:29 PM	H2 valve closed
6/6/2012	8:30:29 PM	BCl3 valve closed
6/6/2012	8:30:29 PM	PH3 valve closed
6/6/2012	8:30:29 PM	SiCl4 pre valve closed
6/6/2012	8:30:29 PM	SiCl4 post valve closed
6/6/2012	8:30:29 PM	Bypass valve closed
6/6/2012	8:30:29 PM	Bubbler valve closed
6/6/2012	8:30:29 PM	Main Vac valve opened
6/6/2012	8:30:29 PM	Helium MFC set to  0.000000
6/6/2012	8:30:29 PM	H2 MFC set to  0.000000
6/6/2012	8:30:29 PM	BCl3 MFC set to  0.000000
6/6/2012	8:30:29 PM	PH3 MFC set to  0.000000
6/6/2012	8:30:29 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:30:29 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:30:30 PM	Tube furnace set to 0
6/6/2012	8:31:00 PM	H2 valve closed
6/6/2012	8:31:00 PM	BCl3 valve closed
6/6/2012	8:31:00 PM	PH3 valve closed
6/6/2012	8:31:00 PM	SiCl4 pre valve closed
6/6/2012	8:31:00 PM	SiCl4 post valve closed
6/6/2012	8:31:00 PM	Bypass valve closed
6/6/2012	8:31:00 PM	Bubbler valve closed
6/6/2012	8:31:00 PM	Helium valve opened
6/6/2012	8:31:00 PM	Main Vac valve opened
6/6/2012	8:31:00 PM	Helium MFC set to  20.000000
6/6/2012	8:31:00 PM	H2 MFC set to  0.000000
6/6/2012	8:31:00 PM	BCl3 MFC set to  0.000000
6/6/2012	8:31:00 PM	PH3 MFC set to  0.000000
6/6/2012	8:31:00 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:31:00 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:31:00 PM	Tube furnace set to 0
6/6/2012	8:31:30 PM	Helium valve closed
6/6/2012	8:31:30 PM	H2 valve closed
6/6/2012	8:31:30 PM	BCl3 valve closed
6/6/2012	8:31:30 PM	PH3 valve closed
6/6/2012	8:31:30 PM	SiCl4 pre valve closed
6/6/2012	8:31:30 PM	SiCl4 post valve closed
6/6/2012	8:31:30 PM	Bypass valve closed
6/6/2012	8:31:30 PM	Bubbler valve closed
6/6/2012	8:31:30 PM	Main Vac valve opened
6/6/2012	8:31:30 PM	Helium MFC set to  0.000000
6/6/2012	8:31:30 PM	H2 MFC set to  0.000000
6/6/2012	8:31:30 PM	BCl3 MFC set to  0.000000
6/6/2012	8:31:30 PM	PH3 MFC set to  0.000000
6/6/2012	8:31:30 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:31:30 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:31:30 PM	Tube furnace set to 0
6/6/2012	8:32:00 PM	H2 valve closed
6/6/2012	8:32:00 PM	BCl3 valve closed
6/6/2012	8:32:00 PM	PH3 valve closed
6/6/2012	8:32:00 PM	SiCl4 pre valve closed
6/6/2012	8:32:00 PM	SiCl4 post valve closed
6/6/2012	8:32:00 PM	Bypass valve closed
6/6/2012	8:32:00 PM	Bubbler valve closed
6/6/2012	8:32:00 PM	Helium valve opened
6/6/2012	8:32:00 PM	Main Vac valve opened
6/6/2012	8:32:00 PM	Helium MFC set to  20.000000
6/6/2012	8:32:00 PM	H2 MFC set to  0.000000
6/6/2012	8:32:00 PM	BCl3 MFC set to  0.000000
6/6/2012	8:32:00 PM	PH3 MFC set to  0.000000
6/6/2012	8:32:00 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:32:00 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:32:00 PM	Tube furnace set to 0
6/6/2012	8:32:30 PM	Helium valve closed
6/6/2012	8:32:30 PM	H2 valve closed
6/6/2012	8:32:30 PM	BCl3 valve closed
6/6/2012	8:32:30 PM	PH3 valve closed
6/6/2012	8:32:30 PM	SiCl4 pre valve closed
6/6/2012	8:32:30 PM	SiCl4 post valve closed
6/6/2012	8:32:30 PM	Bypass valve closed
6/6/2012	8:32:30 PM	Bubbler valve closed
6/6/2012	8:32:30 PM	Main Vac valve opened
6/6/2012	8:32:30 PM	Helium MFC set to  0.000000
6/6/2012	8:32:30 PM	H2 MFC set to  0.000000
6/6/2012	8:32:30 PM	BCl3 MFC set to  0.000000
6/6/2012	8:32:30 PM	PH3 MFC set to  0.000000
6/6/2012	8:32:30 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:32:30 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:32:31 PM	Tube furnace set to 200
6/6/2012	8:33:01 PM	H2 valve closed
6/6/2012	8:33:01 PM	BCl3 valve closed
6/6/2012	8:33:01 PM	PH3 valve closed
6/6/2012	8:33:01 PM	SiCl4 pre valve closed
6/6/2012	8:33:01 PM	SiCl4 post valve closed
6/6/2012	8:33:01 PM	Bypass valve closed
6/6/2012	8:33:01 PM	Bubbler valve closed
6/6/2012	8:33:01 PM	Helium valve opened
6/6/2012	8:33:01 PM	Main Vac valve opened
6/6/2012	8:33:01 PM	Helium MFC set to  20.000000
6/6/2012	8:33:01 PM	H2 MFC set to  0.000000
6/6/2012	8:33:01 PM	BCl3 MFC set to  0.000000
6/6/2012	8:33:01 PM	PH3 MFC set to  0.000000
6/6/2012	8:33:01 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:33:01 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:33:01 PM	Tube furnace set to 200
6/6/2012	8:33:31 PM	Helium valve closed
6/6/2012	8:33:31 PM	H2 valve closed
6/6/2012	8:33:31 PM	BCl3 valve closed
6/6/2012	8:33:31 PM	PH3 valve closed
6/6/2012	8:33:31 PM	SiCl4 pre valve closed
6/6/2012	8:33:31 PM	SiCl4 post valve closed
6/6/2012	8:33:31 PM	Bypass valve closed
6/6/2012	8:33:31 PM	Bubbler valve closed
6/6/2012	8:33:31 PM	Main Vac valve opened
6/6/2012	8:33:31 PM	Helium MFC set to  0.000000
6/6/2012	8:33:31 PM	H2 MFC set to  0.000000
6/6/2012	8:33:31 PM	BCl3 MFC set to  0.000000
6/6/2012	8:33:31 PM	PH3 MFC set to  0.000000
6/6/2012	8:33:31 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:33:31 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:33:31 PM	Tube furnace set to 200
6/6/2012	8:34:01 PM	H2 valve closed
6/6/2012	8:34:01 PM	BCl3 valve closed
6/6/2012	8:34:01 PM	PH3 valve closed
6/6/2012	8:34:01 PM	SiCl4 pre valve closed
6/6/2012	8:34:01 PM	SiCl4 post valve closed
6/6/2012	8:34:01 PM	Bypass valve closed
6/6/2012	8:34:01 PM	Bubbler valve closed
6/6/2012	8:34:01 PM	Helium valve opened
6/6/2012	8:34:01 PM	Main Vac valve opened
6/6/2012	8:34:01 PM	Helium MFC set to  20.000000
6/6/2012	8:34:01 PM	H2 MFC set to  0.000000
6/6/2012	8:34:01 PM	BCl3 MFC set to  0.000000
6/6/2012	8:34:01 PM	PH3 MFC set to  0.000000
6/6/2012	8:34:01 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:34:01 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:34:01 PM	Tube furnace set to 200
6/6/2012	8:34:31 PM	Helium valve closed
6/6/2012	8:34:31 PM	H2 valve closed
6/6/2012	8:34:31 PM	BCl3 valve closed
6/6/2012	8:34:31 PM	PH3 valve closed
6/6/2012	8:34:31 PM	SiCl4 pre valve closed
6/6/2012	8:34:31 PM	SiCl4 post valve closed
6/6/2012	8:34:31 PM	Bypass valve closed
6/6/2012	8:34:31 PM	Bubbler valve closed
6/6/2012	8:34:31 PM	Main Vac valve opened
6/6/2012	8:34:31 PM	Helium MFC set to  0.000000
6/6/2012	8:34:31 PM	H2 MFC set to  0.000000
6/6/2012	8:34:31 PM	BCl3 MFC set to  0.000000
6/6/2012	8:34:31 PM	PH3 MFC set to  0.000000
6/6/2012	8:34:31 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:34:31 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:34:31 PM	Tube furnace set to 200
6/6/2012	8:35:01 PM	H2 valve closed
6/6/2012	8:35:01 PM	BCl3 valve closed
6/6/2012	8:35:01 PM	PH3 valve closed
6/6/2012	8:35:01 PM	SiCl4 pre valve closed
6/6/2012	8:35:01 PM	SiCl4 post valve closed
6/6/2012	8:35:01 PM	Bypass valve closed
6/6/2012	8:35:01 PM	Bubbler valve closed
6/6/2012	8:35:02 PM	Helium valve opened
6/6/2012	8:35:02 PM	Main Vac valve opened
6/6/2012	8:35:02 PM	Helium MFC set to  20.000000
6/6/2012	8:35:02 PM	H2 MFC set to  0.000000
6/6/2012	8:35:02 PM	BCl3 MFC set to  0.000000
6/6/2012	8:35:02 PM	PH3 MFC set to  0.000000
6/6/2012	8:35:02 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:35:02 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:35:02 PM	Tube furnace set to 200
6/6/2012	8:35:32 PM	Helium valve closed
6/6/2012	8:35:32 PM	H2 valve closed
6/6/2012	8:35:32 PM	BCl3 valve closed
6/6/2012	8:35:32 PM	PH3 valve closed
6/6/2012	8:35:32 PM	SiCl4 pre valve closed
6/6/2012	8:35:32 PM	SiCl4 post valve closed
6/6/2012	8:35:32 PM	Bypass valve closed
6/6/2012	8:35:32 PM	Bubbler valve closed
6/6/2012	8:35:32 PM	Main Vac valve opened
6/6/2012	8:35:32 PM	Helium MFC set to  0.000000
6/6/2012	8:35:32 PM	H2 MFC set to  0.000000
6/6/2012	8:35:32 PM	BCl3 MFC set to  0.000000
6/6/2012	8:35:32 PM	PH3 MFC set to  0.000000
6/6/2012	8:35:32 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:35:32 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:35:32 PM	Tube furnace set to 200
6/6/2012	8:36:02 PM	H2 valve closed
6/6/2012	8:36:02 PM	BCl3 valve closed
6/6/2012	8:36:02 PM	PH3 valve closed
6/6/2012	8:36:02 PM	SiCl4 pre valve closed
6/6/2012	8:36:02 PM	SiCl4 post valve closed
6/6/2012	8:36:02 PM	Bypass valve closed
6/6/2012	8:36:02 PM	Bubbler valve closed
6/6/2012	8:36:02 PM	Helium valve opened
6/6/2012	8:36:02 PM	Main Vac valve opened
6/6/2012	8:36:02 PM	Helium MFC set to  20.000000
6/6/2012	8:36:02 PM	H2 MFC set to  0.000000
6/6/2012	8:36:02 PM	BCl3 MFC set to  0.000000
6/6/2012	8:36:02 PM	PH3 MFC set to  0.000000
6/6/2012	8:36:02 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:36:02 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:36:02 PM	Tube furnace set to 200
6/6/2012	8:36:32 PM	Helium valve closed
6/6/2012	8:36:32 PM	H2 valve closed
6/6/2012	8:36:32 PM	BCl3 valve closed
6/6/2012	8:36:32 PM	PH3 valve closed
6/6/2012	8:36:32 PM	SiCl4 pre valve closed
6/6/2012	8:36:32 PM	SiCl4 post valve closed
6/6/2012	8:36:32 PM	Bypass valve closed
6/6/2012	8:36:32 PM	Bubbler valve closed
6/6/2012	8:36:32 PM	Main Vac valve opened
6/6/2012	8:36:32 PM	Helium MFC set to  0.000000
6/6/2012	8:36:32 PM	H2 MFC set to  0.000000
6/6/2012	8:36:32 PM	BCl3 MFC set to  0.000000
6/6/2012	8:36:32 PM	PH3 MFC set to  0.000000
6/6/2012	8:36:32 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:36:32 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:36:32 PM	Tube furnace set to 200
6/6/2012	8:37:02 PM	H2 valve closed
6/6/2012	8:37:02 PM	BCl3 valve closed
6/6/2012	8:37:02 PM	PH3 valve closed
6/6/2012	8:37:02 PM	SiCl4 pre valve closed
6/6/2012	8:37:02 PM	SiCl4 post valve closed
6/6/2012	8:37:02 PM	Bypass valve closed
6/6/2012	8:37:02 PM	Bubbler valve closed
6/6/2012	8:37:02 PM	Helium valve opened
6/6/2012	8:37:02 PM	Main Vac valve opened
6/6/2012	8:37:02 PM	Helium MFC set to  20.000000
6/6/2012	8:37:02 PM	H2 MFC set to  0.000000
6/6/2012	8:37:02 PM	BCl3 MFC set to  0.000000
6/6/2012	8:37:02 PM	PH3 MFC set to  0.000000
6/6/2012	8:37:02 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:37:02 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:37:03 PM	Tube furnace set to 200
6/6/2012	8:37:33 PM	Helium valve closed
6/6/2012	8:37:33 PM	H2 valve closed
6/6/2012	8:37:33 PM	BCl3 valve closed
6/6/2012	8:37:33 PM	PH3 valve closed
6/6/2012	8:37:33 PM	SiCl4 pre valve closed
6/6/2012	8:37:33 PM	SiCl4 post valve closed
6/6/2012	8:37:33 PM	Bypass valve closed
6/6/2012	8:37:33 PM	Bubbler valve closed
6/6/2012	8:37:33 PM	Main Vac valve opened
6/6/2012	8:37:33 PM	Helium MFC set to  0.000000
6/6/2012	8:37:33 PM	H2 MFC set to  0.000000
6/6/2012	8:37:33 PM	BCl3 MFC set to  0.000000
6/6/2012	8:37:33 PM	PH3 MFC set to  0.000000
6/6/2012	8:37:33 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:37:33 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:37:33 PM	Tube furnace set to 200
6/6/2012	8:38:03 PM	H2 valve closed
6/6/2012	8:38:03 PM	BCl3 valve closed
6/6/2012	8:38:03 PM	PH3 valve closed
6/6/2012	8:38:03 PM	SiCl4 pre valve closed
6/6/2012	8:38:03 PM	SiCl4 post valve closed
6/6/2012	8:38:03 PM	Bypass valve closed
6/6/2012	8:38:03 PM	Bubbler valve closed
6/6/2012	8:38:03 PM	Helium valve opened
6/6/2012	8:38:03 PM	Main Vac valve opened
6/6/2012	8:38:03 PM	Helium MFC set to  20.000000
6/6/2012	8:38:03 PM	H2 MFC set to  0.000000
6/6/2012	8:38:03 PM	BCl3 MFC set to  0.000000
6/6/2012	8:38:03 PM	PH3 MFC set to  0.000000
6/6/2012	8:38:03 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:38:03 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:38:03 PM	Tube furnace set to 200
6/6/2012	8:38:33 PM	Helium valve closed
6/6/2012	8:38:33 PM	H2 valve closed
6/6/2012	8:38:33 PM	BCl3 valve closed
6/6/2012	8:38:33 PM	PH3 valve closed
6/6/2012	8:38:33 PM	SiCl4 pre valve closed
6/6/2012	8:38:33 PM	SiCl4 post valve closed
6/6/2012	8:38:33 PM	Bypass valve closed
6/6/2012	8:38:33 PM	Bubbler valve closed
6/6/2012	8:38:33 PM	Main Vac valve opened
6/6/2012	8:38:33 PM	Helium MFC set to  0.000000
6/6/2012	8:38:33 PM	H2 MFC set to  0.000000
6/6/2012	8:38:33 PM	BCl3 MFC set to  0.000000
6/6/2012	8:38:33 PM	PH3 MFC set to  0.000000
6/6/2012	8:38:33 PM	SiCl4 MFC set to  0.000000
6/6/2012	8:38:33 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	8:38:33 PM	Tube furnace set to 0
6/6/2012	8:38:34 PM	Run finished at 8:38 PM
6/6/2012	8:59:33 PM	Main Vac valve closed
6/6/2012	8:59:55 PM	Main Vac valve opened
6/6/2012	9:00:57 PM	Recipe started at 9:00 PM
6/6/2012	9:00:57 PM	Helium valve closed
6/6/2012	9:00:57 PM	H2 valve closed
6/6/2012	9:00:57 PM	BCl3 valve closed
6/6/2012	9:00:57 PM	PH3 valve closed
6/6/2012	9:00:57 PM	SiCl4 pre valve closed
6/6/2012	9:00:57 PM	SiCl4 post valve closed
6/6/2012	9:00:57 PM	Main Vac valve closed
6/6/2012	9:00:57 PM	Bypass valve closed
6/6/2012	9:00:57 PM	Bubbler valve closed
6/6/2012	9:00:57 PM	Helium MFC set to  0.000000
6/6/2012	9:00:57 PM	H2 MFC set to  0.000000
6/6/2012	9:00:57 PM	BCl3 MFC set to  0.000000
6/6/2012	9:00:57 PM	PH3 MFC set to  0.000000
6/6/2012	9:00:57 PM	SiCl4 MFC set to  0.000000
6/6/2012	9:00:57 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:00:57 PM	Tube furnace set to 0
6/6/2012	9:01:00 PM	Helium valve closed
6/6/2012	9:01:00 PM	BCl3 valve closed
6/6/2012	9:01:00 PM	PH3 valve closed
6/6/2012	9:01:00 PM	SiCl4 pre valve closed
6/6/2012	9:01:00 PM	SiCl4 post valve closed
6/6/2012	9:01:00 PM	Main Vac valve closed
6/6/2012	9:01:00 PM	Bypass valve closed
6/6/2012	9:01:00 PM	Bubbler valve closed
6/6/2012	9:01:00 PM	H2 valve opened
6/6/2012	9:01:00 PM	Helium MFC set to  0.000000
6/6/2012	9:01:00 PM	H2 MFC set to  500.000000
6/6/2012	9:01:00 PM	BCl3 MFC set to  0.000000
6/6/2012	9:01:00 PM	PH3 MFC set to  0.000000
6/6/2012	9:01:00 PM	SiCl4 MFC set to  0.000000
6/6/2012	9:01:00 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:01:00 PM	Tube furnace set to 0
6/6/2012	9:02:13 PM	Helium valve closed
6/6/2012	9:02:13 PM	BCl3 valve closed
6/6/2012	9:02:13 PM	PH3 valve closed
6/6/2012	9:02:13 PM	SiCl4 pre valve closed
6/6/2012	9:02:13 PM	SiCl4 post valve closed
6/6/2012	9:02:13 PM	Main Vac valve closed
6/6/2012	9:02:13 PM	Bypass valve closed
6/6/2012	9:02:13 PM	H2 valve opened
6/6/2012	9:02:13 PM	Bubbler valve opened
6/6/2012	9:02:13 PM	Helium MFC set to  0.000000
6/6/2012	9:02:13 PM	H2 MFC set to  500.000000
6/6/2012	9:02:13 PM	BCl3 MFC set to  0.000000
6/6/2012	9:02:13 PM	PH3 MFC set to  0.000000
6/6/2012	9:02:13 PM	SiCl4 MFC set to  0.000000
6/6/2012	9:02:13 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:02:13 PM	Tube furnace set to 0
6/6/2012	9:02:14 PM	Helium valve closed
6/6/2012	9:02:14 PM	BCl3 valve closed
6/6/2012	9:02:14 PM	PH3 valve closed
6/6/2012	9:02:14 PM	SiCl4 pre valve closed
6/6/2012	9:02:14 PM	SiCl4 post valve closed
6/6/2012	9:02:14 PM	Main Vac valve closed
6/6/2012	9:02:14 PM	Bypass valve closed
6/6/2012	9:02:14 PM	H2 valve opened
6/6/2012	9:02:14 PM	Bubbler valve opened
6/6/2012	9:02:14 PM	Helium MFC set to  0.000000
6/6/2012	9:02:14 PM	H2 MFC set to  500.000000
6/6/2012	9:02:14 PM	BCl3 MFC set to  0.000000
6/6/2012	9:02:14 PM	PH3 MFC set to  0.000000
6/6/2012	9:02:14 PM	SiCl4 MFC set to  0.000000
6/6/2012	9:02:14 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:02:14 PM	Tube furnace set to 1000
6/6/2012	9:22:14 PM	Helium valve closed
6/6/2012	9:22:14 PM	BCl3 valve closed
6/6/2012	9:22:14 PM	Main Vac valve closed
6/6/2012	9:22:14 PM	Bypass valve closed
6/6/2012	9:22:14 PM	H2 valve opened
6/6/2012	9:22:14 PM	PH3 valve opened
6/6/2012	9:22:14 PM	SiCl4 pre valve opened
6/6/2012	9:22:14 PM	SiCl4 post valve opened
6/6/2012	9:22:14 PM	Bubbler valve opened
6/6/2012	9:22:14 PM	Helium MFC set to  0.000000
6/6/2012	9:22:14 PM	H2 MFC set to  500.000000
6/6/2012	9:22:14 PM	BCl3 MFC set to  0.000000
6/6/2012	9:22:14 PM	PH3 MFC set to  20.000000
6/6/2012	9:22:14 PM	SiCl4 MFC set to  25.000000
6/6/2012	9:22:14 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:22:15 PM	Tube furnace set to 1000
6/6/2012	9:23:45 PM	Helium valve closed
6/6/2012	9:23:45 PM	BCl3 valve closed
6/6/2012	9:23:45 PM	PH3 valve closed
6/6/2012	9:23:45 PM	Main Vac valve closed
6/6/2012	9:23:45 PM	Bypass valve closed
6/6/2012	9:23:45 PM	H2 valve opened
6/6/2012	9:23:45 PM	SiCl4 pre valve opened
6/6/2012	9:23:45 PM	SiCl4 post valve opened
6/6/2012	9:23:45 PM	Bubbler valve opened
6/6/2012	9:23:45 PM	Helium MFC set to  0.000000
6/6/2012	9:23:45 PM	H2 MFC set to  500.000000
6/6/2012	9:23:45 PM	BCl3 MFC set to  0.000000
6/6/2012	9:23:45 PM	PH3 MFC set to  0.000000
6/6/2012	9:23:45 PM	SiCl4 MFC set to  25.000000
6/6/2012	9:23:45 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:23:45 PM	Tube furnace set to 1000
6/6/2012	9:41:45 PM	Helium valve closed
6/6/2012	9:41:45 PM	BCl3 valve closed
6/6/2012	9:41:45 PM	PH3 valve closed
6/6/2012	9:41:45 PM	SiCl4 pre valve closed
6/6/2012	9:41:45 PM	SiCl4 post valve closed
6/6/2012	9:41:45 PM	Main Vac valve closed
6/6/2012	9:41:45 PM	Bypass valve closed
6/6/2012	9:41:45 PM	H2 valve opened
6/6/2012	9:41:45 PM	Bubbler valve opened
6/6/2012	9:41:45 PM	Helium MFC set to  0.000000
6/6/2012	9:41:45 PM	H2 MFC set to  500.000000
6/6/2012	9:41:45 PM	BCl3 MFC set to  0.000000
6/6/2012	9:41:45 PM	PH3 MFC set to  0.000000
6/6/2012	9:41:45 PM	SiCl4 MFC set to  0.000000
6/6/2012	9:41:45 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:41:45 PM	Tube furnace set to 950
6/6/2012	9:43:45 PM	Helium valve closed
6/6/2012	9:43:45 PM	BCl3 valve closed
6/6/2012	9:43:45 PM	PH3 valve closed
6/6/2012	9:43:45 PM	SiCl4 pre valve closed
6/6/2012	9:43:45 PM	SiCl4 post valve closed
6/6/2012	9:43:45 PM	Main Vac valve closed
6/6/2012	9:43:45 PM	Bypass valve closed
6/6/2012	9:43:45 PM	H2 valve opened
6/6/2012	9:43:45 PM	Bubbler valve opened
6/6/2012	9:43:45 PM	Helium MFC set to  0.000000
6/6/2012	9:43:45 PM	H2 MFC set to  500.000000
6/6/2012	9:43:45 PM	BCl3 MFC set to  0.000000
6/6/2012	9:43:45 PM	PH3 MFC set to  0.000000
6/6/2012	9:43:45 PM	SiCl4 MFC set to  0.000000
6/6/2012	9:43:45 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:43:45 PM	Tube furnace set to 900
6/6/2012	9:45:45 PM	Helium valve closed
6/6/2012	9:45:45 PM	BCl3 valve closed
6/6/2012	9:45:45 PM	PH3 valve closed
6/6/2012	9:45:45 PM	SiCl4 pre valve closed
6/6/2012	9:45:45 PM	SiCl4 post valve closed
6/6/2012	9:45:45 PM	Main Vac valve closed
6/6/2012	9:45:45 PM	Bypass valve closed
6/6/2012	9:45:45 PM	H2 valve opened
6/6/2012	9:45:45 PM	Bubbler valve opened
6/6/2012	9:45:45 PM	Helium MFC set to  0.000000
6/6/2012	9:45:45 PM	H2 MFC set to  500.000000
6/6/2012	9:45:45 PM	BCl3 MFC set to  0.000000
6/6/2012	9:45:45 PM	PH3 MFC set to  0.000000
6/6/2012	9:45:45 PM	SiCl4 MFC set to  0.000000
6/6/2012	9:45:45 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:45:46 PM	Tube furnace set to 850
6/6/2012	9:47:46 PM	H2 valve closed
6/6/2012	9:47:46 PM	BCl3 valve closed
6/6/2012	9:47:46 PM	PH3 valve closed
6/6/2012	9:47:46 PM	SiCl4 pre valve closed
6/6/2012	9:47:46 PM	SiCl4 post valve closed
6/6/2012	9:47:46 PM	Main Vac valve closed
6/6/2012	9:47:46 PM	Bypass valve closed
6/6/2012	9:47:46 PM	Helium valve opened
6/6/2012	9:47:46 PM	Bubbler valve opened
6/6/2012	9:47:46 PM	Helium MFC set to  500.000000
6/6/2012	9:47:46 PM	H2 MFC set to  0.000000
6/6/2012	9:47:46 PM	BCl3 MFC set to  0.000000
6/6/2012	9:47:46 PM	PH3 MFC set to  0.000000
6/6/2012	9:47:46 PM	SiCl4 MFC set to  0.000000
6/6/2012	9:47:46 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:47:46 PM	Tube furnace set to 800
6/6/2012	9:49:46 PM	H2 valve closed
6/6/2012	9:49:46 PM	BCl3 valve closed
6/6/2012	9:49:46 PM	PH3 valve closed
6/6/2012	9:49:46 PM	SiCl4 pre valve closed
6/6/2012	9:49:46 PM	SiCl4 post valve closed
6/6/2012	9:49:46 PM	Main Vac valve closed
6/6/2012	9:49:46 PM	Bypass valve closed
6/6/2012	9:49:46 PM	Helium valve opened
6/6/2012	9:49:46 PM	Bubbler valve opened
6/6/2012	9:49:46 PM	Helium MFC set to  500.000000
6/6/2012	9:49:46 PM	H2 MFC set to  0.000000
6/6/2012	9:49:46 PM	BCl3 MFC set to  0.000000
6/6/2012	9:49:46 PM	PH3 MFC set to  0.000000
6/6/2012	9:49:46 PM	SiCl4 MFC set to  0.000000
6/6/2012	9:49:46 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:49:46 PM	Tube furnace set to 750
6/6/2012	9:51:46 PM	H2 valve closed
6/6/2012	9:51:46 PM	BCl3 valve closed
6/6/2012	9:51:46 PM	PH3 valve closed
6/6/2012	9:51:46 PM	SiCl4 pre valve closed
6/6/2012	9:51:46 PM	SiCl4 post valve closed
6/6/2012	9:51:46 PM	Main Vac valve closed
6/6/2012	9:51:46 PM	Bypass valve closed
6/6/2012	9:51:46 PM	Helium valve opened
6/6/2012	9:51:46 PM	Bubbler valve opened
6/6/2012	9:51:46 PM	Helium MFC set to  500.000000
6/6/2012	9:51:46 PM	H2 MFC set to  0.000000
6/6/2012	9:51:46 PM	BCl3 MFC set to  0.000000
6/6/2012	9:51:46 PM	PH3 MFC set to  0.000000
6/6/2012	9:51:46 PM	SiCl4 MFC set to  0.000000
6/6/2012	9:51:46 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	9:51:46 PM	Tube furnace set to 0
6/6/2012	10:11:46 PM	Helium valve closed
6/6/2012	10:11:46 PM	H2 valve closed
6/6/2012	10:11:46 PM	BCl3 valve closed
6/6/2012	10:11:46 PM	PH3 valve closed
6/6/2012	10:11:46 PM	SiCl4 pre valve closed
6/6/2012	10:11:46 PM	SiCl4 post valve closed
6/6/2012	10:11:46 PM	Main Vac valve closed
6/6/2012	10:11:46 PM	Bypass valve closed
6/6/2012	10:11:46 PM	Bubbler valve closed
6/6/2012	10:11:46 PM	Helium MFC set to  0.000000
6/6/2012	10:11:46 PM	H2 MFC set to  0.000000
6/6/2012	10:11:46 PM	BCl3 MFC set to  0.000000
6/6/2012	10:11:46 PM	PH3 MFC set to  0.000000
6/6/2012	10:11:46 PM	SiCl4 MFC set to  0.000000
6/6/2012	10:11:46 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:11:46 PM	Tube furnace set to 0
6/6/2012	10:11:47 PM	Helium valve closed
6/6/2012	10:11:47 PM	H2 valve closed
6/6/2012	10:11:47 PM	BCl3 valve closed
6/6/2012	10:11:47 PM	PH3 valve closed
6/6/2012	10:11:47 PM	SiCl4 pre valve closed
6/6/2012	10:11:47 PM	SiCl4 post valve closed
6/6/2012	10:11:47 PM	Main Vac valve closed
6/6/2012	10:11:47 PM	Bubbler valve closed
6/6/2012	10:11:47 PM	Bypass valve opened
6/6/2012	10:11:47 PM	Helium MFC set to  0.000000
6/6/2012	10:11:47 PM	H2 MFC set to  0.000000
6/6/2012	10:11:47 PM	BCl3 MFC set to  0.000000
6/6/2012	10:11:47 PM	PH3 MFC set to  0.000000
6/6/2012	10:11:47 PM	SiCl4 MFC set to  0.000000
6/6/2012	10:11:47 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:11:48 PM	Tube furnace set to 0
6/6/2012	10:12:38 PM	Helium valve closed
6/6/2012	10:12:38 PM	H2 valve closed
6/6/2012	10:12:38 PM	BCl3 valve closed
6/6/2012	10:12:38 PM	PH3 valve closed
6/6/2012	10:12:38 PM	SiCl4 pre valve closed
6/6/2012	10:12:38 PM	SiCl4 post valve closed
6/6/2012	10:12:38 PM	Main Vac valve closed
6/6/2012	10:12:38 PM	Bubbler valve closed
6/6/2012	10:12:38 PM	Bypass valve opened
6/6/2012	10:12:38 PM	Helium MFC set to  0.000000
6/6/2012	10:12:38 PM	H2 MFC set to  0.000000
6/6/2012	10:12:38 PM	BCl3 MFC set to  0.000000
6/6/2012	10:12:38 PM	PH3 MFC set to  0.000000
6/6/2012	10:12:38 PM	SiCl4 MFC set to  0.000000
6/6/2012	10:12:38 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:12:38 PM	Tube furnace set to 0
6/6/2012	10:13:38 PM	Helium valve closed
6/6/2012	10:13:38 PM	H2 valve closed
6/6/2012	10:13:38 PM	BCl3 valve closed
6/6/2012	10:13:38 PM	PH3 valve closed
6/6/2012	10:13:38 PM	SiCl4 pre valve closed
6/6/2012	10:13:38 PM	SiCl4 post valve closed
6/6/2012	10:13:38 PM	Bypass valve closed
6/6/2012	10:13:38 PM	Bubbler valve closed
6/6/2012	10:13:38 PM	Main Vac valve opened
6/6/2012	10:13:38 PM	Helium MFC set to  0.000000
6/6/2012	10:13:38 PM	H2 MFC set to  0.000000
6/6/2012	10:13:38 PM	BCl3 MFC set to  0.000000
6/6/2012	10:13:38 PM	PH3 MFC set to  0.000000
6/6/2012	10:13:38 PM	SiCl4 MFC set to  0.000000
6/6/2012	10:13:38 PM	Bypass solenoid MFC set to  0.000000
6/6/2012	10:13:38 PM	Tube furnace set to 0
6/6/2012	10:13:39 PM	Run finished at 10:13 PM
